Patent application number | Description | Published |
20080231385 | Oscillator Based on Piezoresistive Resonators - An oscillator circuit has a first and a second piezoresistive resonator ( | 09-25-2008 |
20090026882 | OSCILLATOR BASED ON PIEZORESISTIVE RESONATORS - An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator. | 01-29-2009 |
20090057792 | CHARGE BIASED MEM RESONATOR - A resonator has a vibrating element ( | 03-05-2009 |
20090211885 | ELECTRONIC DEVICE - The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate ( | 08-27-2009 |
20100001615 | Reduction of Air Damping in MEMS Device - A micro-electromechanical device has a substrate ( | 01-07-2010 |
20100202254 | CMUTS WITH A HIGH-K DIELECTRIC - A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate. | 08-12-2010 |
20110127625 | RESONATOR - A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam. | 06-02-2011 |
20110175178 | MICROSCOPIC STRUCTURE PACKAGING METHOD AND DEVICE WITH PACKAGED MICROSCOPIC STRUCTURE - A method of packaging a micro electro-mechanical structure comprises forming said structure on a substrate; depositing a sacrificial layer over said structure; patterning the sacrificial layer; depositing a SIPOS (semi-insulating polycrystalline silicon) layer over the patterned sacrificial layer; treating the SIPOS layer with an etchant to convert the SIPOS layer into a porous SIPOS layer, removing the patterned sacrificial layer through the porous layer SIPOS to form a cavity including said structure; and sealing the porous SIPOS layer. A device including such a packaged micro electro-mechanical structure is also disclosed. | 07-21-2011 |
20110181153 | PIEZO-RESISTIVE MEMS RESONATOR - A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator. | 07-28-2011 |
20110186941 | DEVICE WITH MICROSTRUCTURE AND METHOD OF FORMING SUCH A DEVICE - Disclosed is a device comprising a substrate carrying a microscopic structure in a cavity capped by a capping layer including a material of formula SiN | 08-04-2011 |
20110187347 | ELECTROMECHANICAL TRANSDUCER AND A METHOD OF PROVIDING AN ELECTROMECHANICAL TRANSDUCER - The invention relates to an electromechanical transducer ( | 08-04-2011 |
20110193449 | OSCILLATOR DEVICE - An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device. | 08-11-2011 |
20110215877 | MEMS RESONATOR - A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature. | 09-08-2011 |
20120043188 | MEMS DEVICES - A MEMS device comprises first and second opposing electrode arrangements ( | 02-23-2012 |
20120075027 | MEMS RESONATOR - A MEMS resonator comprises a resonator body ( | 03-29-2012 |
20120086514 | MEMS OSCILLATOR - A piezoresistive MEMS oscillator uses an output circuit to control the voltage across the resonator body. This results in a DC bias of the resonator. A current path is provided between the output of the output circuit and the resonator body such that changes in current through or voltage across the resonator body, resulting from changes in resistance of the resonator body, are coupled to the output. This arrangement uses the bias current flowing through the resonator to derive the output. In this way, the same DC current is used to provide the required DC resonator bias and to drive the output circuit to its DC operating point. The benefit of this arrangement is a reduced power-consumption. | 04-12-2012 |
20120091546 | Microphone - A microphone comprises a substrate ( | 04-19-2012 |
20120139065 | MEMS DEVICE AND MANUFACTURING METHOD - A MEMS manufacturing method and device in which a spacer layer is provided over a side wall of at least one opening in a structural layer which will define the movable MEMS element. The opening extends below the structural layer. The spacer layer forms a side wall portion over the side wall of the at least one opening and also extends below the level of the structural layer to form a contact area. | 06-07-2012 |
20120187507 | MEMS RESONATOR - A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency. | 07-26-2012 |
20120262241 | MEMS RESONATOR AND METHOD OF CONTROLLING THE SAME - A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature. | 10-18-2012 |
20120262242 | RESONATOR AND METHOD OF CONTROLLING THE SAME - A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration. | 10-18-2012 |
20130093525 | CIRCUIT AND METHOD FOR CORRECTING TEMPERATURE DEPENDENCE OF FREQUENCY FOR PIEZORESISTIVE OSCILLATORS - MEMS oscillators, which include a silicon-type, in particular piezoresistive resonators, can be used to provide a fixed, stable output frequency. Silicon has a natural temperature dependence of Young's modulus, therefore, as ambient temperature changes and/or the piezoresistive resonator is powered, the resonator temperature changes, and the resonance frequency of the resonator drifts. In order to account for the temperature drift of the piezoresistive resonator, the piezoresistive resonator itself is used as a temperature sensor. The relative resistance change of the piezoresistive resonator depends only on the relative temperature change and material property of the resonator. Therefore, an accurate temperature can be sensed directly on the piezoresistive resonator. The temperature drift information is provided to a frequency adjuster, which corrects the output frequency of the circuit. | 04-18-2013 |
20130233086 | MEMS CAPACITIVE PRESSURE SENSOR - A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure. | 09-12-2013 |
20140001147 | PIEZO-RESISTIVE MEMS RESONATOR | 01-02-2014 |
20140159826 | MEMS OSCILLATORS - The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated. | 06-12-2014 |