Patent application number | Description | Published |
20140054669 | Structures and Methods for Making NAND Flash Memory - A NAND flash memory chip includes wide openings in an inter-poly dielectric layer through which gaps are later etched to define structures such as select gates. Such select gates are asymmetric, with inter-poly dielectric on a side adjacent to a memory cell and no inter-poly dielectric on a side away from a memory cell. Gaps etched through such openings may also define peripheral devices. | 02-27-2014 |
20140078826 | Methods of Making Word Lines and Select Lines in NAND Flash Memory - A NAND flash memory chip includes word lines formed by etching through concentric conductive loops and, in the same etch step, etching through a conductive strip to form select lines. A conductive loop forms two word lines which are in different erase blocks and are separately controlled by peripheral circuits. | 03-20-2014 |
20140080299 | Processes for NAND Flash Memory Fabrication - Narrow word lines are formed in a NAND flash memory array using a double patterning process in which sidewall spacers define word lines. Sidewall spacers also define edges of select gates so that spacing between a select gate and the closest word line is equal to spacing between adjacent word lines. | 03-20-2014 |
20140097482 | Full Metal Gate Replacement Process for NAND Flash Memory - A NAND flash memory chip is made by forming sacrificial control gate structures and sacrificial select structures, and subsequently replacing these sacrificial structures with metal. Filler structures are formed between sacrificial control gate structures and are subsequently removed to form air gaps between neighboring control gate lines and between floating gates. | 04-10-2014 |
20140269100 | SHARED BIT LINE STRING ARCHITECTURE - Methods for programming and reading memory cells using a shared bit line string architecture are described. In some embodiments, memory cells and select devices may correspond with transistors including a charge storage layer. In some cases, the charge storage layer may be conductive (e.g., a polysilicon layer as used in a floating gate device) or non-conductive (e.g., a silicon nitride layer as used in a SONOS device). In some embodiments, selection of a memory cell in a first string of a pair of strings may include setting an SEO transistor into a conducting state and setting an SGD line controlling drain-side select transistors to a voltage that is greater than a first threshold voltage associated with a first drain-side select transistor of the first string and less than a second threshold voltage associated with a second drain-side select transistor of a second string of the pair of strings. | 09-18-2014 |
20140312403 | Memory Cell Floating Gate Replacement - A NAND flash memory chip is formed by depositing two N-type polysilicon layers. The upper N-type polysilicon layer is then replaced with P-type polysilicon and barrier layer in the array area only, while maintaining the upper N-type polysilicon layer in the periphery. In this way, floating gates are substantially P-type while gates of peripheral transistors are N-type. | 10-23-2014 |
20150064906 | Triple Patterning NAND Flash Memory - A NAND flash memory array is initially patterned by forming a plurality of sidewall spacers according along sides of patterned portions of material. The pattern of sidewall spacers is then used to form a second pattern of hard mask portions including first hard mask portions defined on both sides by sidewall spacers and second hard mask portions defined on only one side by sidewall spacers. | 03-05-2015 |
20150064907 | Triple Patterning NAND Flash Memory with Stepped Mandrel - A NAND flash memory array is initially patterned by forming a plurality of sidewall spacers according along sides of patterned portions of material. The pattern of sidewall spacers is then used to form a second pattern of hard mask portions including first hard mask portions defined on both sides by sidewall spacers and second hard mask portions defined on only one side by sidewall spacers. | 03-05-2015 |