| Patent application number | Description | Published |
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| 20080238467 | REINFORCED CONTACT ELEMENTS - Embodiments of reinforced resilient elements and methods for fabricating same are provided herein. In one embodiment, a reinforced resilient element includes a resilient element configured to electrically probe an unpackaged semiconductor device to be tested, the resilient element having a first end and an opposing second end; and a reinforcement member having a first end affixed to the resilient element at the first end thereof or at a point disposed between the first and the second ends of the resilient element, an opposing second end disposed in a direction towards the second end of the resilient element, and a resilient portion disposed between the first and second ends, wherein the resilient portion is not affixed to the resilient element. | 10-02-2008 |
| 20090066352 | Making And Using Carbon Nanotube Probes - Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices. | 03-12-2009 |
| 20090079455 | REDUCED SCRUB CONTACT ELEMENT - Embodiments of resilient contact elements and methods for fabricating and using same are provided herein. In one embodiment, a resilient contact element includes a lithographically formed resilient beam having a plurality of openings disposed laterally therethrough; and a tip disposed proximate a first end of the beam, the tip and the beam together configured to electrically probe a device to be tested. | 03-26-2009 |
| 20090260960 | SWITCH FOR USE IN MICROELECTROMECHANICAL SYSTEMS (MEMS) AND MEMS DEVICES INCORPORATING SAME - Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS switches. In some embodiments, a MEMS switch may include a resilient contact element comprising a beam and a tip configured to wipe a contact surface; and a MEMS actuator having an open position that maintains the tip and the contact surface in a spaced apart relation and a closed position that brings the tip into contact with the contact surface, wherein the resilient contact element and the MEMS actuator are disposed on a substrate and are movable in a plane substantially parallel to the substrate. In some embodiments, various contact elements are provided for the MEMS switch. In some embodiments, various actuators are provided for control of the operation of the MEMS switch. | 10-22-2009 |
| 20100078206 | Process of Positioning Groups of Contact Structures - A contact apparatus can be made by providing a first substrate with electrically conductive terminals and second substrates each of which can have contact structures. Each of the contact structures can have a contact tip. The second substrates can be aligned such that contact tips of the contact structures are aligned substantially in a plane. An optical system can be used to monitor an actual position of the second substrates, and a mechanical system can be used to move the second substrates to aligned positions. The contact structures can be attached to ones of the terminals on the first substrate while the second substrates are in the aligned positions. | 04-01-2010 |
| 20100112828 | CARBON NANOTUBE CONTACT STRUCTURES - A carbon nanotube contact structure can be used for making pressure connections to a DUT. The contact structure can be formed using a carbon nanotube film or with carbon nanotubes in solution. The carbon nanotube film can be grown in a trench in a sacrificial substrate in which a contact structure such as a beam or contact element is then formed by metal plating. The film can also be formed on a contact element and have metal posts dispersed therein to provide rigidity and elasticity. Contact structures or portions thereof can also be plated with a solution containing carbon nanotubes. The resulting contact structure can be tough, and can provide good electrical conductivity. | 05-06-2010 |
| 20100140793 | Process For Manufacturing Contact Elements For Probe Card Assembles - A process for making contact elements for a probe card assembly includes steps of forming a first continuous trench in a substrate along a first direction, and forming simultaneously a plurality of tip structures adjacent one to another in the first continuous trench in a second direction substantially normal to the first direction, each of the tip structures being part of, or adapted to be part of at least one corresponding contact element capable of forming an electrical contact with a terminal of an electronic device. | 06-10-2010 |
| 20100141290 | MICROSPRING ARRAY HAVING REDUCED PITCH CONTACT ELEMENTS - Embodiments of microspring arrays and methods for fabricating and using same are provided herein. In some embodiments, a microspring array may include at least two lithographically formed resilient contact elements, each resilient contact element having a beam and a tip for contacting a device to be tested, wherein the beams extend in substantially the same direction relative to a first end of the beams, and wherein the ends of the at least two beams are separated by a distance defining a central region and wherein the respective tips of the at least two beams extend away from the beams in a non-zero, non-perpendicular direction into the central region. | 06-10-2010 |
| 20100154861 | PRINTED SOLAR PANEL - A solar panel can include a substrate with layers of droplets of different materials disposed on a surface of the substrate. An outer layer can be disposed away from the surface and can comprise a face of the solar panel. The layers can comprise a cathode electrode and an anode electrode disposed between the outer layer and the surface of the substrate. The layers can further comprise a P region and an N region. The P region can be disposed at least partially around the anode electrode. The N region can be disposed at least partially around the P region and at least partially around the cathode electrode. The P region and the N region can comprise droplets of a P material comprising P-doped semiconductor particles and an N material comprising N-doped semiconductor particles respectively. | 06-24-2010 |
| 20100252317 | CARBON NANOTUBE CONTACT STRUCTURES FOR USE WITH SEMICONDUCTOR DIES AND OTHER ELECTRONIC DEVICES - A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns. | 10-07-2010 |
| 20100315111 | SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN - A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams. | 12-16-2010 |
