| Patent application number | Description | Published |
|---|
| 20080243441 | SIGNAL ANALYSIS METHOD FOR VIBRATORY INTERFEROMETRY - A signal analysis method for vibratory interferometry is disclosed in the present invention for measuring the vibratory characteristics of an object under test. The signal analysis method comprises steps of: obtaining a vibratory interferometric signal of an object under vibration; and analyzing the vibratory interferometric signal with a deconvolution operation to obtain a reformed vibratory interferometric signal. | 10-02-2008 |
| 20090010560 | METHOD FOR IMAGE CALIBRATION AND APPARATUS FOR IMAGE ACQUIRING - The present invention relates to a method for image calibration and an apparatus for image acquiring. In the method for image calibration, the image formation position for an image acquiring unit of the apparatus is calibrated according to the relative location of the image acquiring unit to a objective lens of the apparatus, wherein the relative location is determined by calculating the focus index of the image acquired by the image acquiring unit so that a clear and sharp interferogram can be obtained for three dimensional surface profile measuring. In addition, it is possible to obtain a clear and sharp image without any interference fringe outside the coherent range by adjusting the image formation position, which is capable of being utilized for two dimensional defect detection and dimension measurement. | 01-08-2009 |
| 20090079995 | TILTING ADJUSTABLE SURFACE PROFILOMETER - The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. | 03-26-2009 |
| 20090168073 | CANTILEVER SENSOR SYSTEM AND PROFILERS AND BIOSENSORS USING THE SAME - The present invention relates to a cantilever sensor system and profilers as well as biosensors using the same. The cantilever sensor system comprises: an interferometric lens module; a cantilever module; and an imaging device. The interferometric lens module further comprises: a light source; a light splitting unit; and an interferometric lens; wherein a light beam emitted from the light source is projected to the cantilever module through the light splitting unit and the interferometric lens where it is reflected back to the light splitting unit so as to interfere with the reference light beam from the reference mirror. The imaging device is used for capturing interferograms caused by the interference between the light beam of the light source and the reflected beam thereof. The aforesaid system is able to monitor the cantilever module and other objects in the neighborhood of the same simultaneously, and thus detecting the deflection of the cantilever module, which is easy and convenient to be adapted for profilers and biosensors. | 07-02-2009 |
| 20100085575 | METHOD FOR DETERMINING VIBRATION DISPLACEMENT AND VIBRATING FREQUENCY AND APPARATUS USING THE SAME - A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface. | 04-08-2010 |
| 20100277744 | METHOD AND APPARATUS FOR RESONANT FREQUENCY IDENTIFICATION THROUGH OUT-OF-PLANE DISPLACEMENT DETECTION - A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed. | 11-04-2010 |
| 20110157458 | METHOD AND APPARATUS FOR FOCUSING - The present disclosure provides a method and system for focusing, which modulates a broadband light into a dispersive light having a higher dispersion characteristic and a lower dispersion characteristic, and the dispersion light is projected onto an object so as to form an object light. By means of the filtering and dividing procedure, a first optical spectrum of the dispersion light with respect to the higher dispersion characteristic is utilized to detect a height information of the surface profile of the object. Then, according to the height information, a second optical spectrum of the dispersion light with respect to the lower dispersion characteristic is adjusted to focus onto the object so that an imaging sensing device is capable of sensing the object light with respect to the lower dispersion characteristic, and thereby obtaining a clear and focusing image corresponding to the surface of the object. | 06-30-2011 |
