Patent application number | Description | Published |
20090014296 | Contact configurations for MEMS relays and MEMS switches and method for making same - Micro-electromechanical (MEMS) contact configuration is disclosed, comprising a static contact with at least one contact surface and a movable contact with at least one corresponding contact surface. Particularly flat contact surfaces and correspondingly low contact resistance can be achieved, if at least one contact surface plane is formed by a crystal plane of the wafer. Furthermore a method for manufacturing such a contact configuration is proposed, wherein the contact surfaces are obtained by wet anisotropic etching of a silicon wafer, if need be preceded by appropriate masking to expose the to be edged regions only, if need be followed by coating with an electrically conductive layer, e.g., a metal layer. | 01-15-2009 |
20100248497 | METHODS AND APPARATUS FOR FORMING NITROGEN-CONTAINING LAYERS - Methods and apparatus for forming nitrogen-containing layers are provided herein. In some embodiments, a method includes placing a substrate having a first layer disposed thereon on a substrate support of a process chamber; heating the substrate to a temperature of at least about 250 degrees Celsius; and exposing the first layer to a radio frequency (RF) plasma formed from a process gas comprising nitrogen while maintaining the process chamber at a pressure of about 10 mTorr to about 40 mTorr to transform at least an upper portion of the first layer into a nitrogen-containing layer. In some embodiments, the process gas includes ammonia (NH | 09-30-2010 |
20110209746 | Tubular Photovoltaic Device and Method of Making - A tubular photovoltaic device capable of collecting light from a variety of angles is disclosed. The tubular photovoltaic device is sealed at an end with a sealing ring and hermetic sealing cap. Novel deposition electrodes and processes for depositing thin films inside a tubular substrate are also disclosed. | 09-01-2011 |
20110230004 | Methods of Building Crystalline Silicon Solar Cells For Use In Combinatorial Screening - Embodiments of the current invention describe methods of forming different types of crystalline silicon based solar cells that can be combinatorially varied and evaluated. Examples of these different types of solar cells include front and back contact silicon based solar cells, all-back contact solar cells and selective emitter solar cells. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single crystalline silicon substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials. | 09-22-2011 |
20110281442 | METHODS AND APPARATUS FOR FORMING NITROGEN-CONTAINING LAYERS - Methods and apparatus for forming nitrogen-containing layers are provided herein. In some embodiments, a method of forming a nitrogen-containing layer may include placing a substrate having a first layer disposed thereon on a substrate support of a process chamber; heating the substrate to a temperature of at least about 250 degrees Celsius; and exposing the first layer to a radio frequency (RF) plasma formed from a process gas consisting essentially of ammonia (NH | 11-17-2011 |
20120015455 | Method and Apparatus for Calibrating Optical Path Degradation Useful for Decoupled Plasma Nitridation Chambers - Methods for matching semiconductor processing chambers using a calibrated spectrometer are disclosed. In one embodiment, plasma attributes are measured for a process in a reference chamber and a process in an aged chamber. Using a calibrated light source, an optical path equivalent to an optical path in a reference chamber and an optical path in an aged chamber can be compared by determining a correction factor. The correction factor is applied to adjust a measured intensity of plasma radiation through the optical path in the aged chamber. Comparing a measured intensity of plasma radiation in the reference chamber and the adjusted measured intensity in the aged chamber provide an indication of changed chamber conditions. A magnitude of change between the two intensities can be used to adjust the process parameters to yield a processed substrate from the aged chamber which matches that of the reference chamber. | 01-19-2012 |
20120196397 | Methods of Building Crystalline Silicon Solar Cells For Use In Combinatorial Screening - Embodiments of the current invention describe methods of forming different types of crystalline silicon based solar cells that can be combinatorially varied and evaluated. Examples of these different types of solar cells include front and back contact silicon based solar cells, all-back contact solar cells and selective emitter solar cells. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single crystalline silicon substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials. | 08-02-2012 |
20120258561 | Low-Temperature Method for Forming Amorphous Semiconductor Layers - In embodiments of the present invention an undoped amorphous, nanocrystalline or microcrystalline semiconductor layer and a heavily doped amorphous, nanocrystalline, or microcrystalline semiconductor layer are formed on a monocrystalline silicon lamina. The lamina is the base region of a photovoltaic cell, while the amorphous, nanocrystalline or monocrystalline layers serve to passivate the surface of the lamina, reducing recombination at this surface. In embodiments, the heavily doped layer additionally serves as either the emitter of the cell or to provide electrical contact to the base layer. The undoped and heavily doped layers are deposited at low temperature, for example about 150 degrees C. or less with hydrogen dilution. This low temperature allows use of low-temperature materials and methods, while increased hydrogen dilution improves film quality and/or conductivity. | 10-11-2012 |
20130219008 | System and Method for Content and Application Acceleration in a Wireless Communications System - Various methods and communications devices to reduce a bandwidth utilization of a backhaul link in a wireless communications system are provided. By way of example, bandwidth utilization is reduced by relegating the compression of data to the downlink transmission, storing only reference keys in the cache of the transmitting device, and taking advantage of an asymmetrical cache structure between communicating devices. Support is provided for a user equipment to move from one node to another node. | 08-22-2013 |
20130250849 | Method and Apparatus for Efficient Content Delivery in Radio Access Networks - Various methods and communications devices to improve bandwidth utilization in a wireless communication network are provided. By way of example, efficient content delivery in a radio access network is achieved by using an accelerator module configured to implement a stack having, among others, a hypertext transfer protocol (HTTP) layer, a transmission control protocol (TCP) layer, and a de-duplication, Lempel-Ziv (LZ) compression/decompression, and caching layer. | 09-26-2013 |
20130280853 | Combinatorial Methods for Making CIGS Solar Cells - The present disclosure is directed to methods of forming different types of Cu | 10-24-2013 |
20130340805 | Methods of Building Crystalline Silicon Solar Cells for Use in Combinatorial Screening - Embodiments of the current invention describe methods of forming different types of crystalline silicon based solar cells that can be combinatorially varied and evaluated. Examples of these different types of solar cells include front and back contact silicon based solar cells, all-back contact solar cells and selective emitter solar cells. These methodologies all incorporate the formation of site-isolated regions using a combinatorial processing tool and the use of these site-isolated regions to form the solar cell area. Therefore, multiple solar cells may be rapidly formed on a single crystalline silicon substrate for use in combinatorial methodologies. Any of the individual processes of the methods described may be varied combinatorially to test varied process conditions or materials. | 12-26-2013 |