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| 20090093123 | Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head - Provided is a spin head for supporting a substrate. The spin head includes a rotatable body, and chuck pins protruding upward from the body and configured to support an edge of a substrate placed at the body when the body is rotated. Each of the chuck pins includes a vertical rod vertically disposed at the body, and a support rod extending from a side of the vertical rod and configured to make contact with the edge of the substrate placed at the body when the body is rotated. When the substrate is rotated, the vertical rod is spaced apart from the edge of the substrate. The contact portion includes a streamlined side surface. The support rod includes a contact portion. The contact portion tapers toward the end of the support rod when viewed from the top of the support rod. | 04-09-2009 |
| 20090145463 | Ozonated water mixture supply apparatus and method, and substrate treating facility with the apparatus - Provided are an ozonated water mixture supply apparatus and method, and a substrate treating facility that receives an ozonated water mixture from the apparatus to treat a substrate. The ozonated water mixture supply apparatus includes a mixing line and distribution lines. The mixing line respectively receives a treating liquid and an ozonated water from a treating liquid supply line and an ozonated water supply line and mixes the treating liquid and the ozonated water to generate the ozonated water mixture satisfying a previously set concentration. Each of the distribution lines distributes the ozonated water mixture generated from the mixing line into a process unit. The mixing line includes a mixing valve and a static mixer. Therefore, the ozonated water mixture having the previously set concentration is generated and supplied using an in-line mixing method without requiring a mixing vessel such as a mixing tank. | 06-11-2009 |
| 20100200397 | Apparatus and method for plating substrate - Provided are a substrate plating apparatus and a substrate plating method. In the substrate plating apparatus, a substrate support member supports a substrate to allow a plating surface to look up. A plating solution containing positive ions dissolved from a positive electrode is supplied from a plating solution supply member onto the substrate at an upper side of the substrate support member. A plating bath surrounds the substrate support member. The substrate support member is rotated in a state where it is immersed into the plating solution and an additive. The substrate can be supported by the substrate support member without reversing the substrate. Also, a pattern defect due to bubbles generated during a plating process can be prevented. | 08-12-2010 |
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| 20090108545 | SPIN CHUCK - The present invention is directed to a spin chuck for use in a process, such as a cleaning process and an etching process, performed while rotating a substrate. The spin chuck includes a spin head on which a substrate is placed, a driving part configured to rotate the spin head, and a fix bracket installed on the spin head and having a contact surface that is in contact with a flat surface of a flat zone of the substrate at a position corresponding to the flat zone to prevent a vortex caused by the flat zone. Since the fix bracket has the same shape as the flat zone of the substrate, an air current unbalance resulting from the flat zone is suppressed to uniformly inject etchants to a rear surface of the substrate. | 04-30-2009 |
| 20100047045 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE FOR THE APPARATUS - A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity. | 02-25-2010 |
| 20100126539 | SPIN HEAD, APPARATUS FOR TREATING SUBSTRATE, AND METHOD FOR TREATING SUBSTRATE - Provided is a spin head supporting a substrate and rotating the substrate. The spin head includes a body, chuck pins installed on the body and moving between supporting positions where a substrate is supported and waiting positions providing space for loading/unloading of the substrate, and a chuck pin moving unit configured to move the chuck pins. The chuck pin moving unit includes a rotation rod coupled with each of the chuck pins, a pivot pin fixing the rotation rod to the body, and a driving member rotating the rotation rod about the pivot pin as a rotation shaft to move the chuck pin from the supporting position to the waiting position. When the body rotates, the rotation rod uses reverse centrifugal force to apply force to the chuck pin from the waiting position to the supporting position. The chuck pins include first pins and second pins that alternately chuck a substrate during a process. | 05-27-2010 |
| 20100146813 | APPARATUS AND METHOD FOR DRYING SUBSTRATES - A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate. | 06-17-2010 |
| 20100326476 | METHOD FOR PROCESSING A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME - An apparatus for processing substrate includes a spin chuck, a first nozzle and a second nozzle. The spin chuck fixes and spins the substrate on which a photoresist layer is formed. The first nozzle is disposed over the spin chuck and provides a treatment liquid on the substrate so as to remove the photoresist layer. The second nozzle is disposed over the spin chuck and provides a mist including deionized water or hydrogen peroxide on the substrate to make contact with the treatment liquid so as to increase a temperature of the treatment liquid. Therefore, efficiency of removing the photoresist layer may be improved. | 12-30-2010 |
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| 20090254065 | Simple method of transplanting injectable chordrocyte for autologous chondrocyte transplantation - A method of transplanting an injectable chondrocyte is developed for autologous chondrocyte transplantation, comprising mixing matrices including fibrin, hyaluronic acid and collagen, which are the main ingredients of animal cartilage, and injecting the resulting mixture into a damaged cartilage region. One 1 ml syringe is prepared by mixing 1 ml of a chondrocyte culture with white or light-yellow lyophilized powder (fibrinogen). A second 1 ml syringe is prepared by mixing 1 ml of chondrocyte culture with white lyophilized powder (thrombin), adding 0.1 cc of that mixture to the entire contents of two vials containing chondrocyte suspension, and mixing well. The two syringes are then mounted on a syringe stand, and a mixing tip is mounted to their tips. The contents are mixed in the mixing tip while injecting the resulting mixture into a damaged cartilage region of an animal. | 10-08-2009 |
| 20090325275 | CELL MANIPULATION AND CULTIVATION EQUIPMENTS FOR THE PRODUCTION OF CELL THERAPY PRODUCTS - Cell manipulation and cultivation equipment for the production of cell therapy products has developed for preventing contamination of cells and improving the utility of a space. The equipment includes a room for the production and testing of cell therapy products, the room having an inner space enclosed in all sides and an outer entrance/exit door provided at any one side thereof, an L-shaped partition installed in a position of the room for the production and testing of cell therapy products, the partition having an inner entrance/exit door provided at any one side thereof, and a clean bench device placed inside the partition, the clean bench device including first, second, and third clean benches for preventing contamination of cells and increasing the utility of a space to the maximum extent. The operating of the clean room and clean bench has advantages to prevent contamination and improving the quality and reliability of cell therapy products. | 12-31-2009 |
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| 20100108204 | ZIRCONIUM ALLOY COMPOSITION FOR NUCLEAR FUEL CLADDING TUBE FORMING PROTECTIVE OXIDE FILM, ZIRCONIUM ALLOY NUCLEAR FUEL CLADDING TUBE MANUFACTURED USING THE COMPOSITION, AND METHOD OF MANUFACTURING THE ZIRCONIUM ALLOY NUCLEAR FUEL CLADDING TUBE - Disclosed herein is a zirconium alloy composition for nuclear fuel cladding tubes, comprising: 1.6˜2.0 wt % of Nb; 0.05˜0.14 wt % of Sn; 0.02˜0.2 wt % of one or more elements selected from the group consisting of Fe, Cr and Cu; 0.09˜0.15 wt % of O; 0.008˜0.012 wt % of Si; and a balance of Zr, a nuclear fuel cladding tube comprising the zirconium alloy composition, and a method of manufacturing the nuclear fuel cladding tube. Since the nuclear fuel cladding tube made of the zirconium alloy composition can maintain excellent corrosion resistance by forming a protective oxide film thereon under the conditions of high-temperature and high-pressure cooling water and water vapor, it can be usefully used as a nuclear fuel cladding tube for light water reactors or heavy water reactors, thus improving the economical efficiency and safety of the use of nuclear fuel. | 05-06-2010 |
| 20100322370 | PROCESS OF MANUFACTURING ZIRCONIUM ALLOY FOR FUEL GUIDE TUBE AND MEASURING TUBE HAVING HIGH STRENGTH AND EXCELLENT CORROSION RESISTANCE - A process of manufacturing zirconium alloy. The process may be used to make a nuclear fuel guide tube and/or a measuring tube which are main components of a nuclear fuel assembly structure. While a nuclear fuel guide tube and a measuring tube are manufactured by performing three-step cold working, and intermediate and final thermal annealing from a semi-finished TREX shell in the conventional method, the present invention relates to zirconium alloy undergoing two-step cold working, and intermediate and final thermal annealing from a TREX shell, resulting in enhanced strength and corrosion resistance. The present invention may be applied to a nuclear fuel guide tube and a measuring tube used for a nuclear fuel assembly in a light water nuclear reactor because, by the shortened process, high percentage reduction in thickness between processes and an decrease in thermal annealing time may sustain high strength and excellent corrosion resistance, and achieve economy of manufacture by reducing the number of processes. | 12-23-2010 |
