| Patent application number | Description | Published |
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| 20090155997 | METHOD FOR FORMING Ta-Ru LINER LAYER FOR Cu WIRING - A method of forming a Ta—Ru metal liner layer for Cu wiring includes: (i) conducting atomic deposition of Ta X times, each atomic deposition of Ta being accomplished by a pulse of hydrogen plasma, wherein X is an integer such that a surface of an underlying layer is not covered with Ta particles; (ii) after step (i), conducting atomic deposition of Ru Y times, each atomic deposition of Ru being accomplished by a pulse of hydrogen plasma, wherein Y is an integer such that the Ta particles are not covered with Ru particles; and (iii) repeating steps (i) and (ii) Z times, thereby forming a Ta—Ru metal liner layer on a Cu wiring substrate. | 06-18-2009 |
| 20100055433 | ATOMIC COMPOSITION CONTROLLED RUTHENIUM ALLOY FILM FORMED BY PLASMA-ENHANCED ATOMIC LAYER DEPOSITION - A metal film composed of multiple atomic layers continuously formed by atomic layer deposition of Ru and Ta or Ti includes at least a top section and a bottom section, wherein an atomic composition of Ru, Ta or Ti, and N varies in a thickness direction of the metal film. The atomic composition of Ru, Ta or Ti, and N in the top section is represented as Ru | 03-04-2010 |
| 20100092696 | METHOD FOR FORMING METAL FILM BY ALD USING BETA-DIKETONE METAL COMPLEX - A method of forming a single-metal film on a substrate by plasma ALD includes: contacting a surface of a substrate with a β-diketone metal complex in a gas phase; exposing molecule-attached surface to a nitrogen-hydrogen mixed plasma; and repeating the above steps, thereby accumulating atomic layers to form a single-metal film on the substrate. | 04-15-2010 |
| Patent application number | Description | Published |
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| 20090232445 | OPTICAL WAVEGUIDE DEVICE, OPTICAL INTEGRATED DEVICE AND OPTICAL TRANSMISSION DEVICE - An optical waveguide device including a first waveguide, a plurality of second waveguides, and a tapered waveguide including a first end connected to the first waveguide and a second end connected to the plurality of second waveguides and configured to receive input of single-mode light from the first waveguide, the tapered waveguide widening as the tapered waveguide extends from the first end toward the second end. | 09-17-2009 |
| 20100158443 | OPTICAL SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF AND OPTICAL TRANSMISSION DEVICE - An optical semiconductor device, including a first optical waveguide with a first width, a second optical waveguide with a second width narrower than the first width with a bending region, and a third optical waveguide with a third width wider than the second width and coupled to the second optical waveguide. | 06-24-2010 |
| 20100166427 | OPTICAL HYBRID CIRCUIT, OPTICAL RECEIVER AND LIGHT RECEIVING METHOD - An optical hybrid circuit includes a MMI coupler including a pair of input channels provided at positions symmetrical with respect to a center position in a widthwise direction thereof, a pair of first output channels outputting a pair of first optical signals having an in-phase relationship, and a pair of second output channels neighboring with each other outputting a pair of second optical signals having an in-phase relationship. The MMI coupler converts QPSK signal light or DQPSK signal light into the pair of first optical signals and the pair of second optical signals having an in-phase relationship. The optical hybrid circuit includes a 2:2 optical coupler connected to the first or the second output channels. The 2:2 optical coupler converts the pair of first optical signals or the pair of second optical signals into a pair of third optical signals having a quadrature phase relationship with the pair of first or second optical signals. | 07-01-2010 |
| 20110064360 | OPTICAL SEMICONDUCTOR ELEMENT AND METHOD FOR MANUFACTURING THE SAME - An optical element includes a first and a second layer in a first and a second region respectively in light propagating direction; a first and a second core layer above the first and the second layers respectively; a top layer above the first and the second core layer, the first and the second core layer extend in succession in the light propagating direction, a first projecting section exposes a side of the first core layer is in the first region, a second projecting section exposes at least part of a side of the second core layer is in the second region, a bottom section of the first projecting section is positioned below the bottom surface of the first core layer and the second core layer, and a bottom section of the second projecting section is positioned higher than the bottom section of the first projecting section. | 03-17-2011 |
| 20110129236 | OPTICAL DEVICE, OPTICAL HYBRID CIRCUIT, AND OPTICAL RECEIVER - According to aspects of embodiments, an optical device includes a first coupler configured to split an optical signal; a second coupler configured to cause optical signals to interfere with each other, a first waveguide configured to couple the first coupler to the second coupler, the first waveguide includes a first phase shifter region having a section narrower in width than an end of the first phase shifter region, the second waveguide includes a second phase shifter region having a section wider in width than an end of the second phase shifter region. | 06-02-2011 |
| 20110158574 | OPTICAL HYBRID CIRCUIT, OPTICAL RECEIVER, AND OPTICAL RECEIVING METHOD - An optical hybrid circuit includes a multimode interference coupler; a first 2:2 optical coupler; a second 2:2 optical coupler; a third 2:2 optical coupler; and a phase controlling region. The first 2:2 optical coupler, the second 2:2 optical coupler, and the third 2:2 optical coupler are coupled to one of the pair of first output channels, the pair of second output channels, the pair of third output channels, and the pair of fourth output channels of the multimode interference coupler. The phase controlling region is provided in one or both of each pair of at least two pairs of output channels from among three pairs of output channels to which the first 2:2 optical coupler, the second 2:2 optical coupler, and the third 2:2 optical coupler are coupled, respectively. | 06-30-2011 |
| 20110229072 | OPTICAL WAVEGUIDE DEVICE AND OPTICAL RECEIVER EQUIPPED WITH SAME - An optical waveguide device includes a plurality of input channels, a plurality of output channels, and a multi-mode interference coupler having one end part coupled to the plurality of input channels and another end part coupled to the plurality of output channels, the multi-mode interference coupler includes a first part gradually narrowing in width from the one end part to the other end part, a second part coupling to the first part and extending from the one end part to the other end part while keeping the width of a coupling part between the first part and the second part, and a third part coupling to the second part and gradually thickening in width from the one end part to the other end part. | 09-22-2011 |
| 20110229074 | OPTICAL WAVEGUIDE DEVICE AND OPTICAL RECEIVER WITH SUCH OPTICAL WAVE GUIDE DEVICE - An optical waveguide device includes two input channels, a plurality of output channels, and a multi-mode interference coupler having one end part coupled to the two input channels and the other end part coupled to the plurality of output channels, the multi-mode interference coupler has a pair of opposite side parts, the multi-mode interference coupler has a width defined by the pair of opposite side parts and the width gradually increases from one end part to the other end part, and the two input channels are asymmetrically coupled to the one end part with respect to the center axis in the width direction. | 09-22-2011 |
| 20120002921 | OPTICAL WAVEGUIDE ELEMENT, OPTICAL HYBRID CIRCUIT, AND OPTICAL RECEIVER - An optical waveguide element includes a first optical coupler, a second optical coupler, and a first optical waveguide and a second optical waveguide that couple an output side of the first optical coupler and an input side of the second optical coupler to each other, the first optical waveguide and the second optical waveguide each include a bent waveguide, and the first optical waveguide and the second optical waveguide are different in optical path length from each other. | 01-05-2012 |
