Patent application number | Description | Published |
20090056448 | BIDIRECTIONAL READOUT CIRCUIT FOR DETECTING DIRECTION AND AMPLITUDE OF CAPACITIVE MEMS ACCELEROMETERS - There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors. | 03-05-2009 |
20090308160 | VERTICAL ACCELERATION MEASURING APPARATUS - Provided is a vertical acceleration measuring apparatus including a substrate; a plumb that is separated from the substrate to operate; a plurality of movable electrode plates that are formed at an upper end of the plumb in a predetermined direction; a movable electrode plate supporting portion that is formed at the upper end of the plumb and supports the movable electrode plates; a fixed body that is formed at an upper end of the substrate; a fixed electrode plate supporting portion that is coupled to the fixed body adjacent to the upper end of the plumb; a plurality of fixed electrode plates that are supported by the fixed electrode plate supporting portion and arranged to face the movable electrode plates in parallel; and a connection spring that connects the fixed body and the movable electrode plate supporting portion. | 12-17-2009 |
20090320595 | MICROMACHINED SENSOR FOR MEASURING VIBRATION - There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field. | 12-31-2009 |
20100009514 | METHOD OF FABRICATING MICRO-VERTICAL STRUCTURE - A method of fabricating a micro-vertical structure is provided. The method includes bonding a second crystalline silicon (Si) substrate onto a first crystalline Si substrate by interposing an insulating layer pattern and a cavity, etching the second crystalline Si substrate using a deep reactive ion etch (DRIE) process along a [111] crystal plane vertical to the second crystalline Si substrate, and etching an etched vertical surface of the second crystalline Si substrate using a crystalline wet etching process to improve the surface roughness and flatness of the etched vertical surface. As a result, no morphological defects occur on the etched vertical surface. Also, footings do not occur at an etch end-point due to the insulating layer pattern. In addition, the micro-vertical structure does not float in the air but is fixed to the first crystalline Si substrate, thereby facilitating subsequent processes. | 01-14-2010 |
20100251826 | MICRO PIEZORESISTIVE PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF - A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane. | 10-07-2010 |
20110049651 | THREE-DIMENSIONAL MEMS STRUCTURE AND METHOD OF MANUFACTURING THE SAME - Provided are a three-dimensional (3D) MEMS structure and a method of manufacturing the same. The method of manufacturing the 3D MEMS structure having a floating structure includes depositing a first etch mask on a substrate, etching at least two regions of the first etch mask to expose the substrate, and forming at least one step in the etched region, partially etching the exposed region of the substrate using the first etch mask, and forming at least two grooves, depositing a second etch mask on a sidewall of the groove, and performing an etching process to connect lower regions of the at least two grooves to each other, and forming at least one floating structure. | 03-03-2011 |
20110138913 | VERTICAL ACCELEROMETER - Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a plurality of unit vertical accelerometers, each having a detection mass disposed on the substrate to be rotated by acceleration applied perpendicular to the substrate, and a detection electrode formed at the detection mass. Here, the unit vertical accelerometers are provided to be in contact with the detection electrodes to detect the acceleration through variation in capacitance due to variation in area in which the contacted detection electrodes overlaps each other. | 06-16-2011 |
20110140578 | PIEZOELECTRIC POWER GENERATOR - Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode. | 06-16-2011 |
20110186089 | APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE - An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged. | 08-04-2011 |
20110192040 | CIRCUIT FOR CALCULATING A THREE-DIMENSIONAL INCLINATION ANGLE - A three-dimensional inclination angle calculation circuit is provided. The three-dimensional inclination angle calculation circuit includes: X-axis, Y-axis, and Z-axis vibration sensors which change X-axis, Y-axis, and Z-axis electrostatic capacitances according to three-dimensional positions of a measured plane with respect to a reference plane, respectively; X-axis, Y-axis, and Z-axis position value acquisition units which acquire X-axis, Y-axis, and Z-axis position values corresponding to the X-axis, Y-axis, and Z-axis electrostatic capacitances, respectively; and an inclination angle calculation unit which calculates an inclination angle of the measured plane with respect to the reference plane based on the X-axis, Y-axis, and Z-axis position values. Accordingly, it is possible to very easily calculate an inclination angle according to a three-dimensional position of a to-be-measured apparatus by using an existing vibration sensor. | 08-11-2011 |
20120098076 | ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME - Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode. | 04-26-2012 |
20120139066 | MEMS MICROPHONE - Disclosed is a micro electro mechanical system (MEMS) microphone including: a substrate; an acoustic chamber formed by processing the substrate; a lower electrode formed on the acoustic chamber and fixed to the substrate; a diaphragm formed over the lower electrode so as to be spaced apart from the lower electrode by a predetermined interval; and a diaphragm discharge hole formed at a central portion of the diaphragm. According to an exemplary embodiment of the present disclosure, attenuation generated by an air layer between the diaphragm and the lower electrode in a MEMS microphone may be effectively reduced, thereby making it possible to obtain high sensitivity characteristics and reduce a time and a cost required for removing a sacrificial layer between the diaphragm and the lower electrode. | 06-07-2012 |
20130094675 | MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME - Disclosed are a MEMS microphone and a method of manufacturing the same. The MEMS microphone includes: a substrate; a rear acoustic chamber formed inside a front surface of the substrate; a vibrating plate formed on the substrate and having an exhaust hole; a fixed electrode formed on the vibrating plate; and a fixed electrode support supported by a bottom of the rear acoustic chamber and connected to the fixed electrode through the exhaust hole. | 04-18-2013 |
20130100779 | ACOUSTIC SENSOR AND FABRICATION METHOD THEREOF - A method for fabricating an acoustic sensor according to an exemplary embodiment of the present disclosure includes: forming an acoustic sensor unit by forming a lower electrode on an upper portion of a substrate, forming etching holes on the lower electrode, forming a sacrifice layer on an upper portion of the lower electrode, and coupling a diaphragm to an upper portion of the sacrifice layer; coupling a lower portion of the substrate of the acoustic sensor unit to a printed circuit board on which a sound pressure input hole is formed so as to expose the lower portion of the substrate of the acoustic sensor unit to the outside through the sound pressure input hole; attaching a cover covering the acoustic sensor unit on the printed circuit board; etching the substrate of the acoustic sensor unit to form an acoustic chamber; and removing the sacrifice layer. | 04-25-2013 |
20130185928 | ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME - Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode. | 07-25-2013 |
20140061825 | MICRO ELECTRO MECHANICAL SYSTEM(MEMS) ACOUSTIC SENSOR AND FABRICATION METHOD THEREOF - Provided are a micro electro mechanical system (MEMS) acoustic sensor for removing a nonlinear component that occurs due to a vertical motion of a lower electrode when external sound pressure is received by fixing the lower electrode to a substrate using a fixing pin, and a fabrication method thereof. The MEMS acoustic sensor removes an undesired vertical motion of a fixed electrode when sound pressure is received by forming a fixing groove on a portion of the substrate and then forming a fixing pin on the fixing groove, and fixing the fixed electrode to the substrate using the fixing pin, and thereby improves a frequency response characteristic and also improves a yield of a process by inhibiting thermal deformation of the fixed electrode that may occur during the process. | 03-06-2014 |
20140084394 | MICRO ELECTRO MECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION METHOD THEREOF - Provided is a structure for improving performance of a micro electro mechanical system (MEMS) microphone by preventing deformation from occurring due to a residual stress and a package stress of a membrane and by decreasing membrane rigidity. A MEMS microphone according to the present disclosure includes a backplate formed on a substrate, an insulating layer formed on the substrate to surround the backplate; a membrane formed to be separate from above the backplate by a predetermined interval; a membrane supporting portion configured to connect the membrane to the substrate; and a buffering portion formed in a double spring structure between the membrane and the membrane supporting portion. | 03-27-2014 |
Patent application number | Description | Published |
20110150423 | DIGITAL VIDEO MANAGING AND SEARCHING SYSTEM - A system for managing and searching for a digital video includes: a video feature point extraction unit decoding an input video and extracting a feature point; a video feature point database (DB) storing and managing a feature point of a video to be compared (i.e., a comparison target video), and a video feature point comparison unit coarsely comparing the feature point of the input video and that of the comparison target video to acquire a candidate group, and minutely comparing the candidate group to detect a content repeated section, and informing a user of the content repeated section. | 06-23-2011 |
20120148118 | METHOD FOR CLASSIFYING IMAGES AND APPARATUS FOR THE SAME - An image classifying apparatus may include a database constructor which constructs database by detecting face region from received classification target image, extracting face feature descriptor from detected face region, extracting a costume feature descriptor using position information of detected face region, and storing face feature descriptor and costume feature descriptor in database, a first processor which generates representative image model by comparing face feature descriptor and costume feature descriptor of classification target image stored in database based on a received representative image to search for a similar image and registering similar image in a representative image model for each person, and second processor which compares additional information of representative image stored in representative image model for each person and additional information of classification target image stored in database and classifies image for each person based on similarity measured by adding up weights corresponding to similarities according to comparison results. | 06-14-2012 |
20120150890 | METHOD OF SEARCHING FOR MULTIMEDIA CONTENTS AND APPARATUS THEREFOR - Provided are a method of searching for multimedia contents and an apparatus therefor. The method includes separating an audio signal from indexing target multimedia contents and performing pre-processing on the audio signal, extracting a silence period of the audio signal, extracting an audio feature in at least one predetermined length period after an end point of the silence period, storing at least two of information for the multimedia contents, the audio feature and the end point of the silence period, to be associated with each other, in a database, and receiving the audio feature of the multimedia contents and searching the database for multimedia contents having the same or a similar audio feature as the search target multimedia contents. | 06-14-2012 |
20120163475 | FAST MATCHING SYSTEM FOR DIGITAL VIDEO - A fast matching system for a digital video is provided. The fast matching system includes a video feature point extractor for extracting feature points of video frames of a digital video when the digital video is input, a feature point index mapper for receiving the video feature points from the video feature point extractor and configuring an index table by mapping the video feature points to a plurality of indices, a video feature point database (DB) for storing the index table, and a video feature point comparator for outputting video information corresponding to matched indices by comparing the video feature points extracted by the video feature point extractor with the indices of the index table stored in the video feature point DB. | 06-28-2012 |
20130223749 | IMAGE RECOGNITION APPARATUS AND METHOD USING SCALABLE COMPACT LOCAL DESCRIPTOR - An image recognition apparatus using a scalable compact local feature descriptor is provided. The image recognition apparatus includes a feature descriptor generator, a database, and a descriptor matcher. The feature descriptor generator extracts scalable compact local feature descriptor information for recognizing an object from input image information. The database includes information on a plurality of feature descriptors. The descriptor matcher compares a feature descriptor output from the feature descriptor generator with a plurality of feature descriptors stored in the database to recognize an object included in an image. | 08-29-2013 |