| Patent application number | Description | Published |
|---|
| 20080262655 | Method of Controlling Operation of a Processing System - In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool. | 10-23-2008 |
| 20090202411 | Method treating a gas stream - A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within the pump, and a liquid for forming a liquid ring or intermittent flushing within the pump. A liquid stream containing said liquid and a by-product of the oxidation of the silicon-containing gas is exhaust from the pump. | 08-13-2009 |
| 20090297420 | Method of Treating a Gas Stream - A method is described for treating a gas stream comprising fluorine (F | 12-03-2009 |
| 20100006227 | Microwave Plasma Reactor - A microwave plasma reactor ( | 01-14-2010 |
| 20100038230 | Microwave Plasma Abatement Apparatus - In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy. | 02-18-2010 |
| 20100101414 | METHOD OF TREATING A GAS STREAM - A method is described for treating a gas stream containing a flammable gas, such as hydrogen or a hydrocarbon gas. The gas stream is conveyed to a liquid ring pump ( | 04-29-2010 |
| 20100303696 | METHOD OF TREATING A GAS STREAM - A method is described for treating a gas stream containing either fuel only or both fuel and oxidant gases, such as hydrogen, nitrous oxide or a hydrocarbon gas. The gas stream is conveyed through a vacuum pumping arrangement comprising a plurality of pumping stages. Either immediately before or immediately after the final pumping stage, the steps of adding a gaseous oxidant to the gas stream and oxidising the fuel gas are performed. By treating the gas stream in this manner, the risk of uncontrolled combustion of the fuel gas can be minimised. | 12-02-2010 |
| 20110197759 | METHOD OF TREATING A GAS STREAM - A method is described for treating gas exhaust from a polysilicon etch process, which uses a plasma abatement device to treat the gas. The device comprises a stainless steel gas chamber having a gas inlet for receiving the gas and a gas outlet. As the gas may contain a halocompound and water vapour, the chamber is heated to a temperature that inhibits adsorption of water on the surface within the chamber, thereby inhibiting corrosion of the gas chamber. The gas is then conveyed to the gas chamber for treatment, and the temperature of the chamber is maintained above said temperature during treatment of the gas. | 08-18-2011 |
