Patent application number | Description | Published |
20090231932 | Semiconductor Device and Method Comprising a High Voltage Reset Driver and an Isolated Memory Array - A method of operating a semiconductor device, a semiconductor device and a digital micromirror system are presented. In an embodiment, the semiconductor device comprises a grounded substrate, a memory array, and a reset driver. The memory array may be isolated from the grounded substrate with a buried layer. The set of voltages of the memory array may be shifted with respect to a reset voltage. The reset driver may drive the reset voltage and the reset driver may have at least one extended drain transistor in the grounded substrate. | 09-17-2009 |
20100025797 | Device Comprising an Ohmic Via Contact, and Method of Fabricating Thereof - Device comprising an ohmic via contact, and method of fabricating thereof. A preferred embodiment comprises forming a metal layer over a substrate, forming a conductive barrier layer over the metal layer, depositing an insulating layer over the conductive barrier layer, creating an opening in the insulating layer to expose the conductive barrier layer, and forming a via contact in the opening. The conductive barrier layer protects the metal layer by preventing the formation of an oxide layer, which could reduce conductivity. | 02-04-2010 |
20100176855 | PULSE WIDTH MODULATED CIRCUITRY FOR INTEGRATED DEVICES - An apparatus for producing a separate pulse width modulation signal for each of a plurality of integrated devices, comprising circuitry for each integrated device having structures that :receive and convert a digital signal for each integrated device to an analog voltage level; sample the analog voltage level and storing such analog voltage level; and compare the stored analog voltage level to a common dynamic reference signal and producing a variable width pulse having a first level when the reference signal is above the analog voltage level and a second level when the reference signal is below the analog voltage level, wherein the common dynamic reference signal is the same signal for each integrated device | 07-15-2010 |
20120066876 | CREATING AN IMPROVED PIEZOELECTRIC LAYER FOR TRANSDUCERS - A method for forming a transducer, the method includes the steps of providing a substrate; providing a dielectric on the substrate; providing a first piezoelectric layer of the dielectric; providing a metal layer on the first piezoelectric layer; etching the metal layer to form a predetermined pattern having at least two electrodes; providing a second piezoelectric layer on the first piezoelectric layer and the etched metal layer; and etching a portion of the substrate surrounding the transducer to permit the transducer to move in a bender configuration. | 03-22-2012 |
20120069099 | TRANSDUCER HAVING AN IMPROVED ELECTRIC FIELD - A transducer including a dielectric material; a metal layer configured in a predetermined pattern having at least two electrodes; and a piezoelectric layer disposed underlying, between and overlying at least a portion of the metal layer and a portion of which abuts the dielectric material. | 03-22-2012 |
20120266675 | METHOD OF OPERATING AN ULTRASONIC TRANSMITTER AND RECEIVER - Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member. | 10-25-2012 |
20120266686 | MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE - A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. | 10-25-2012 |
20120267899 | ENERGY HARVESTING USING MEMS COMPOSITE TRANSDUCER - A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal. | 10-25-2012 |
20120267900 | ENERGY HARVESTING DEVICE INCLUDING MEMS COMPOSITE TRANSDUCER - An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device. | 10-25-2012 |
20120268513 | FLUID EJECTION USING MEMS COMPOSITE TRANSDUCER - A method of ejecting a drop of fluid includes providing a fluid ejector. The fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. The substrate includes a cavity and a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member, A second portion of the compliant membrane being anchored to the substrate. Walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. A quantity of fluid is supplied to the chamber through the fluidic feed. An electrical pulse is applied to the MEMS transducing member to eject a drop of fluid through the nozzle. | 10-25-2012 |
20120268525 | CONTINUOUS EJECTION SYSTEM INCLUDING COMPLIANT MEMBRANE TRANSDUCER - A continuous liquid ejection system includes a substrate and an orifice plate affixed to the substrate. Portions of the substrate define a liquid chamber. The orifice plate includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the liquid chamber and is free to move relative to the liquid chamber. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. The compliant membrane includes an orifice. A liquid supply provides a liquid to the liquid chamber under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane of the orifice plate. The MEMS transducing member is selectively actuated to cause a portion of the compliant membrane to be displaced relative to the liquid chamber to cause a drop of liquid to break off from the liquid jet. | 10-25-2012 |
20120268526 | FLUID EJECTOR INCLUDING MEMS COMPOSITE TRANSDUCER - A fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity. Second portions of the substrate define a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. Partitioning walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed. | 10-25-2012 |
20120268527 | FLOW-THROUGH EJECTION SYSTEM INCLUDING COMPLIANT MEMBRANE TRANSDUCER - A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. | 10-25-2012 |
20120268528 | FLOW-THROUGH LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER - A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. A first portion of the substrate defines a liquid dispensing channel including an outlet opening and a second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired. | 10-25-2012 |
20120268529 | CONTINUOUS LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER - A method of continuously ejecting liquid includes providing a liquid ejection system that includes a substrate and an orifice plate affixed to the substrate. Portions of the substrate define a liquid chamber. The orifice plate includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the liquid chamber. The second portion of the MEMS transducing member is free to move relative to the liquid chamber. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. The compliant membrane includes an orifice. Liquid is provided under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane of the orifice plate by a liquid supply. A drop of liquid is caused to break off from the liquid jet by selectively actuating the MEMS transducing member which causes a portion of the compliant membrane to be displaced relative to the liquid chamber. | 10-25-2012 |
20120268530 | FLOW-THROUGH EJECTION SYSTEM INCLUDING COMPLIANT MEMBRANE TRANSDUCER - A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member, positioned on a wall of the liquid dispensing channel that includes the outlet opening, is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A second portion of the MEMS transducing member extends into a portion of the liquid dispensing channel that is adjacent to the outlet opening and is free to move relative to the outlet opening. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane separates the MEMS transducing member from the continuous flow of liquid through the liquid dispensing channel. A second portion of the compliant membrane is anchored to the wall of the liquid dispensing channel that includes the outlet opening. | 10-25-2012 |
20120268531 | FLOW-THROUGH LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER - A method of ejecting a liquid includes providing a liquid dispenser including a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A diverter member is positioned on a wall of the liquid dispensing channel that includes the outlet opening. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A second portion of the MEMS transducing member extends into a portion of the liquid dispensing channel that is adjacent to the outlet opening and is free to move relative to the outlet opening. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane separates the MEMS transducing member from the liquid dispensing channel. A second portion of the compliant membrane is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. | 10-25-2012 |
20120269031 | ULTRASONIC TRANSMITTER AND RECEIVER WITH COMPLIANT MEMBRANE - An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. | 10-25-2012 |
20120270352 | FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE - A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity. | 10-25-2012 |
20130002753 | MICROFLUIDIC DEVICE HAVING IMPROVED EPOXY LAYER ADHESION - A microfluidic device includes a substrate; at least one inorganic layer provided on the substrate; a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer. | 01-03-2013 |
20130004898 | MAKING A MICROFLUIDIC DEVICE WITH IMPROVED ADHESION - A method for making a microfluidic device, the method includes providing at least one inorganic layer on a substrate; applying an alkoxysilane material containing a primary or secondary amine on the at least one inorganic layer; baking the applied alkoxysilane material at a temperature greater than 130 degrees C.; applying an epoxy material to form an epoxy layer, wherein the applied alkoxysilane material is disposed at an interface between the epoxy layer and the at least one inorganic layer; and patterning the epoxy layer to provide a wall for defining a location for a fluid in the microfluidic device. | 01-03-2013 |