Patent application number | Description | Published |
20090047143 | Method and system for high viscosity pump - Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump. | 02-19-2009 |
20090132094 | System and Method for a Variable Home Position Dispense System - Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement. | 05-21-2009 |
20100262304 | System and method for valve sequencing in a pump - Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus). | 10-14-2010 |
20110098864 | SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP - Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc. | 04-28-2011 |
20110208890 | I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER - Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump. | 08-25-2011 |
20110213504 | I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER - Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump. | 09-01-2011 |
20120057990 | System and Method for a Pump With Reduced Form Factor - Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having a motor driven feed stage pump and a motor driven dispense stage pump. The feed stage motor and the feed stage motor can include various types of motors and the pumps can be rolling diaphragm or other pumps. According to one embodiment, a dispense block defining the pump chambers and various flow passages can be formed out of a single piece of material. | 03-08-2012 |
20120070311 | System and Method for Pressure Compensation in a Pump - Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated. | 03-22-2012 |
20120070313 | SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP - Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities. | 03-22-2012 |
20120091165 | System and Method for Correcting for Pressure Variations Using a Motor - Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber. | 04-19-2012 |
20120288379 | System and Method for a Variable Home Position Dispense System - Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement. | 11-15-2012 |
20130004340 | SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP - Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc. | 01-03-2013 |
20130101438 | CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER - Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The switching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters. | 04-25-2013 |
20140044570 | SYSTEM AND METHOD FOR A PUMP WITH ONBOARD ELECTRONICS - Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having onboard electronics and features to prevent heat from the onboard electronics from degrading process fluid or otherwise negatively impacting pump performance. Embodiments may also include features for reducing the likelihood that fluid will enter an electronics housing. | 02-13-2014 |
20140127034 | SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP - Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities. | 05-08-2014 |
20140231318 | METHOD AND SYSTEM FOR HIGH VISCOSITY PUMP - Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump. | 08-21-2014 |
20140303791 | SYSTEM AND METHOD FOR DETECTING AIR IN A FLUID - Embodiments can detect air in a pumping system. A portion of the system may be isolated from other components located upstream or downstream. The isolated portion may include a chamber, tubing, lines, valves or other components of a pump. In one embodiment, the difference between the starting pressure and an ending pressure taken after a piston has moved a predetermined distance. The pressure difference can be compared with an expected value established for the particular system set up and/or fluid property to detect the presence of air in the system. In some embodiments, a distance between the starting and ending positions of a pump component may be determined after a predetermined pressure difference has been achieved. The distance can be compared with an expected distance to detect the presence of air in the system. | 10-09-2014 |
20140322032 | SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP - Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated. | 10-30-2014 |
20140361046 | SYSTEM AND METHOD FOR VARIABLE DISPENSE POSITION - Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement. | 12-11-2014 |