| Patent application number | Description | Published |
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| 20080218718 | Lithographic apparatus and device manufacturing method - A lithographic apparatus is provided. The lithographic apparatus includes a radiation source configured to provide radiation, an array of optical light engines, and a substrate table that supports a substrate. Each of the optical light engines includes an array of individually controllable elements arranged and constructed to receive and to pattern the radiation and projection optics configured to receive the patterned radiation and to project the patterned radiation onto the substrate. The substrate table is arranged and constructed to move relative to the array of optical light engines during exposure of the substrate to the patterned radiation. | 09-11-2008 |
| 20090066921 | METHOD FOR PRODUCING A MARKER ON A SUBSTRATE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A method of producing a marker on a substrate includes projecting a patterned beam on a layer of resist disposed on a substrate in a lithographic apparatus to create a latent marker; and locally heating the substrate at the marker location in the lithographic apparatus to transform the latent marker into a detectable marker. | 03-12-2009 |
| 20090284720 | Lithographic Apparatus and Device Manufacturing Method - A lithography apparatus includes a projection system configured to project a radiation beam onto a substrate, a detector configured to inspect the substrate, and a substrate table configured to support the substrate and move the substrate relative to the projection system and the detector. The detector is arranged to inspect a portion of the substrate while the substrate is moved and before the portion is exposed to the radiation beam. | 11-19-2009 |
| 20100068830 | MARKER STRUCTURE AND METHOD FOR CONTROLLING ALIGNMENT OF LAYERS OF A MULTI-LAYERED SUBSTRATE - The invention includes a lithographic system having a first source for generating radiation with a first wavelength and an alignment system with a second source for generating radiation with a second wavelength. The second wavelength is larger than the first wavelength. A marker structure is provided having a first layer and a second layer. The second layer is present either directly or indirectly on top of said first layer. The first layer has a first periodic structure and the second layer has a second periodic structure. At least one of the periodic structures has a plurality of features in at least one direction with a dimension smaller than 400 nm. Additionally, a combination of the first and second periodic structure forms a diffractive structure arranged to be illuminated by radiation with the second wavelength. | 03-18-2010 |
| 20110128520 | ALIGNMENT SYSTEMS AND METHODS FOR LITHOGRAPHIC SYSTEMS - An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determining unit is constructed to process information from said first and second detector channels in a combination to determine a position of an alignment mark on a work piece, the combination taking into account a manufacturing process of the work piece. A lithographic apparatus has the above mentioned alignment system. Methods of alignment and manufacturing devices with a lithographic apparatus use the above alignment system and lithographic apparatus, respectively. | 06-02-2011 |
| Patent application number | Description | Published |
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| 20080305951 | Method for Incorporating a Functional Additive within a Porous Material - The invention relates a method for incorporating a functional additive within a porous material, which method comprises impregnating the porous material with a slurry of a nano-sized material that carries the functional additive, wherein in the slurry the weight ratio of the additive (A) and the nano-sized material (B) is in the range of from 0.01 to 1.0 (A/B). The invention further relates to a porous material obtainable by said method. | 12-11-2008 |
| 20100047603 | TREATMENT OF WOOD - The invention is directed to the use of a specific class of compounds in the treatment of wood, to a method of treating wood, and to the wood obtained by said method. | 02-25-2010 |
| 20100247760 | MULTI COMPONENT PARTICLE GENERATING SYSTEM - The invention relates to a method of generating a ‘multicomponent particle comprising: and a multicomponent particle generating system comprising: a first nozzle constructed to generate at least one isolated particle; a second nozzle arranged to generate a generally uninterrupted fluid jet without breaking up, —said first and second nozzles arranged to have said isolated particle collide with the fluid jet so as to combine said particle with fluid of the second fluid jet, for providing a multicomponent particle; and a collector by which said isolated particles can be captured after collision with the fluid jet. | 09-30-2010 |
| 20100313786 | Controlled Release of Actives for Materials Used in Construction - The invention is directed to a construction material and to the use of modified layered inorganic material. | 12-16-2010 |
| Patent application number | Description | Published |
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| 20080274021 | Compact Fuel Processor - A fuel processor for producing a hydrogen-containing product stream from a fuel stream and an oxidant stream, comprises a mixing tube from which the combined fuel and oxidant stream is directed substantially axially into a reaction chamber. The reaction chamber comprises a turn-around chamber and a turn-around wall at one end for re-directing the combined reactant stream, so that in the turn-around chamber the re-directed stream surrounds and is in contact with the combined reactant stream flowing substantially axially in the opposite direction. This design and opposing flow configuration creates a low velocity zone which stabilizes the location of a flame in the fuel processor and offers other advantages. | 11-06-2008 |
| 20080295908 | Syngas Flow Diverter - A passively cooled valve assembly selectively diverts a fluid stream from an inlet port selectively through at least one outlet conduit. The valve assembly comprises a housing defining the primary chamber. The housing also comprises at least one inlet port and at least two outlet conduits and associated outlet ports. A rotatable plate with at least one aperture formed therein is located within the primary chamber and is urged against an interior surface of the housing by a spring assembly. The rotatable plate is rotated by a shaft that extends axially through the primary chamber, in order to align the at least one aperture with at least one of the outlet conduits to allow selective fluid flow from an inlet port to an outlet conduit. | 12-04-2008 |
| 20080314037 | Exhaust Gas Diverter - A gas diverter includes at least one port circumscribed by a port seat, and a valve subassembly for selectively obstructing the port. The valve subassembly comprises: (a) an actuation arm; (b) a disk coupled to the arm, and (c) an actuator for selectively causing the disk to be urged against said port seat to obstruct said port. In operation, the disk deforms elastically as it is urged against the port seat. | 12-25-2008 |
| 20090235585 | Actively Cooled Fuel Processor - A fuel processor for producing a hydrogen-containing product stream from a fuel stream and an oxidant stream is actively-cooled by a gaseous or liquid coolant which is directed to flow in contact with at least a portion of the outer shell of the fuel processor. Active cooling can improve the operating characteristics of the fuel processor as well as allowing for the use of compact fuel processor designs that would otherwise tend to have insufficient heat loss capability. | 09-24-2009 |
| 20110173953 | System And Method For Regenerating An Engine Exhaust After-Treatment Device - A system and method for regenerating a device in an engine exhaust after-treatment system is provided. To regenerate the device, a syngas stream is introduced into the engine exhaust stream and combusts in the presence of a catalyst in the after-treatment system, raising the temperature. A supplemental liquid fuel stream is then selectively introduced into and is vaporized by the syngas stream to form a combined fuel stream. Combustion of the combined fuel stream with the engine exhaust in the presence of the catalyst further heats the device bringing it to a temperature suitable for regeneration. The catalyst can be upstream of or within the device being regenerated. | 07-21-2011 |
