Inventors list |
Assignees list |
Classification tree browser |
Top 100 Inventors |
Top 100 Assignees |
Ishikawa, Yokohama
Akio Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20100158345 | Defect And Critical Dimension Analysis Systems And Methods For A Semiconductor Lithographic Process - Apparatus and method evaluate a wafer fabrication process for forming patterns on a wafer based upon design data. Within a recipe database, two or more inspection regions are defined on the wafer for analysis. Patterns within each of the inspection regions are automatically selected based upon tendency for measurement variation resulting from variation in the fabrication process. For each inspection region, at least one image of patterns within the inspection region is captured, a reference pattern, represented by one or both of (a) one or more line segments and (b) one or more curves, is automatically generated from the design data. An inspection unit detects edges within each of the images and registers the image with the reference pattern. One or more measurements are determined from the edges for each of the selected patterns and are processed within a statistical analyzer to form statistical information associated with the fabrication process. | 06-24-2010 |
| 20100215247 | System And Method For A Semiconductor Lithographic Process Control Using Statistical Information In Defect Identification - A system and method is described for evaluating a wafer fabrication process for forming patterns on a wafer based upon data. Multiple inspection regions are defined on the wafer for analysis. For each inspection region, images of patterns within the inspection region are captured, edges are detected, and lines are registered to lines of a reference pattern automatically generated from the design data. Line widths are determined from the edges. Measured line widths are analyzed to provide statistics and feedback information regarding the fabrication process. In particular embodiments defects are identified as where measured line widths lie outside boundaries determined from the statistics. In particular embodiments, lines of different drawn width and/or orientation are grouped and analyzed separately. Measured line widths may also be grouped for analysis according to geometry such as shape or proximity to other shapes in the inspection region to provide feedback for optical proximity correction rules. | 08-26-2010 |
| 20120117520 | Systems And Methods For Inspecting And Controlling Integrated Circuit Fabrication Using A Calibrated Lithography Simulator - A system and method for precise control of fine-line photolithography is disclosed. The system includes a wafer inspector that detects and measures edges and contours of patterns as produced on a wafer and a lithography simulator. The method calibrates the lithography simulator using multiple measurements and/or edges of patterns on the wafer. The calibrated lithography simulator is used to simulate processing to permit optimization of processing conditions by iterative adjustment and re-simulation. In embodiments, the process conditions optimized include one or more of dose, placement of edges on masks, and placement, shape, and locations of SRAF/OPC structures on the masks. In embodiments, the method includes using the calibrated lithography simulator to match results of production process equipment to those achieved with standard equipment. In embodiments, process data from multiple process simulations is stored in a single image file. The method concludes with fabrication of wafers using the optimized conditions and masks. | 05-10-2012 |
Hidetoshi Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20120134457 | NODE SYSTEM AND SUPERVISORY NODE - A node system includes a first node, a second node, and a supervisory node which transmit frames while increasing or decreasing the cycle microtick count, and determines reduced cycle microtick counts by subtracting or adding a rate correction limit value from or to the cycle microtick count of the supervisory node when reception of the first frame transmitted by the first node stop and the cycle microtick count of the supervisory node when reception of the first and second frames stop. | 05-31-2012 |
Katsuhiko Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20100029467 | Multiple zeolite catalyst - The multiple zeolite catalyst is a catalytic composition used to convert C | 02-04-2010 |
| 20120116139 | MULTIPLE ZEOLITE CATALYST - The multiple zeolite catalyst is a catalytic composition used to convert C | 05-10-2012 |
Katsumi Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20080265690 | Linear Motor - A position-data converter and a motor-drive control device are connected. The position-data converter receives two-phase, sine-wave analog signals da and db from two first magnetic detectors, respectively, and converts these signals da and db to position data. On receiving a positioning instruction, the motor-drive control device calculates the value of current, from the current position signal generated by the position-data converter. The permanent magnets incorporated in a linear motor are used as components of a linear scale, as well. | 10-30-2008 |
| 20080265826 | Method of Setting the Origin of a Linear Motor - A movable member is moved in a preset direction in a linear motor. A characteristic-change position-detecting unit detects a position where the magnetic characteristic of the magnets has abruptly changed. The position detected is used as an origin-setting reference position. A reference position for the absolute position of the magnetic linear encoder is set based on the reference position. | 10-30-2008 |
Mizuma Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20090165095 | NETWORK CONNECTION TERMINAL AUTHENTICATION METHOD AND APPARATUS - A network connection terminal authenticating method that authenticates a terminal device demands communication with other terminal device in a computer network. The network connection terminal authenticating method include authenticating the terminal device outside a communication path between the terminal device and the other terminal device in response to a demand for communication of the terminal device with the other terminal device and determining whether communication with the other terminal device is permitted, and starting data transmission from the terminal device to the other terminal device when the terminal device is authenticated in the authenticating. | 06-25-2009 |
| 20090193522 | COMPUTER RESOURCE VERIFYING METHOD AND COMPUTER RESOURCE VERIFYING PROGRAM - A computer resource verifying method verifies computer resources introduced into a client device. The computer resource verifying method includes performing, by the client device, client side processing including verification of individual computer resources introduced into the client device and information collection for a dependence relation between computer resources; performing, by a server device, a server side processing by receiving information on a result of the client side processing performed in the performing of the client side processing to perform verification of the dependence relation between computer resources; and determining, by the server device, whether the client device is normal based on a verification result of the computer resources and a verification result of the dependence relation between computer resources. | 07-30-2009 |
Sadahiro Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20090193388 | SOFTWARE DEVELOPMENT SUPPORT APPARATUS, PROGRAM AND METHOD - Before design information is published, a consistency state of reference design information referred to by the design information is revealed. By this, it is possible to reduce waste caused by redesign or the like of the design information. | 07-30-2009 |
Taichi Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20080256137 | Method and system for data processing with data replication for the same - A replication data base is created on the basis of a predetermined condition. A data processing system adds transactions that are lacking and/or cancels transactions that are not required, to and from a replication data base created on the basis of a certain arbitrary time, in accordance with a predetermined condition defined by the data base user. | 10-16-2008 |
| 20090049107 | Method and System of Database Management for Replica Database - When a database area multi-written or replicated in an external storage unit is separated, a database management system writes consistent data into the external storage unit. A method and system capable of controlling a timing of separating the replicated database area is provided. Furthermore, new data directory information necessary to access the replicated database is dynamically added based on the data directory information of the replication source database. A method and system capable of selecting whether to access the database which is the source of the replication or access the replicated database are provided. Thus, when the database area multi-written or replicated in an external storage unit is separated and physical replicated databases are created, it is possible to maintain consistency of the replicated databases while continuing transaction processing. | 02-19-2009 |
Takao Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20080236984 | LOW-FRICTION SLIDING MEMBER IN TRANSMISSION, AND TRANSMISSION OIL THEREFOR - A low-friction sliding member in a transmission is at least one of sliding members which are in slidable contact with each other in presence of a transmission oil composition. The low-friction sliding member includes a base material having a sliding section. A hard carbon thin film is coated at a sliding surface of the sliding section of the base material. The hard carbon thin film contains hydrogen in an amount not more than 20 atomic %. The transmission oil composition contains at least one of organic oxygen-containing compound and aliphatic amine compound. | 10-02-2008 |
Tatsuya Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20100245685 | PROJECTION TYPE TABLE DISPLAY - In the usage of table projection of a projection type display, depending upon a sitting position of a participant of a conference, the participant views an image projected upon a table as an inversion image turned upside down, resulting in poor visual recognition. In order to improve visual recognition, images are rotated, synthesized and displayed in accordance with the viewing direction of each participant. More specifically, the projection type display is provided with a two-image synthesizing unit for synthesizing two images obtained by processing an input image by two image rotation units for rotating the input image by a first angle and a second angle different from the first angle, into one image on a screen. The projection type display is also provided with an image rotation unit and an image inversion unit for two-image display on a screen. | 09-30-2010 |
Tomoko Ishikawa, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20090246672 | TONER FOR THE DEVELOPMENT OF ELECTROSTATIC IMAGE AND THE PRODUCTION PROCESS THEREOF - A toner for the development of an electrostatic image is provided wherein at least one layer of a particulate resin is coated onto a substantial portion of the surface of an agglomerate of particles made from at least primary polymer particles and primary colorant particles, wherein at least one of the primary polymer particles and the particulate resin contains a wax, and the particulate resin of the outermost layer is substantially free of wax and a process for producing the toner. | 10-01-2009 |