| Patent application number | Description | Published |
| 20100183956 | COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD - The present invention provides a computer generated hologram including a plurality of cells which form a light intensity distribution on a predetermined plane, the plurality of cells including a plurality of first cells including isotropic media and anisotropic media, and a plurality of second cells including anisotropic media alone, wherein the plurality of cells change a phase of incident light which impinges on each of the plurality of cells to form a phase distribution including N (N≧2) for each of a wavefront of a linearly polarized light component in a first direction and a wavefront of a linearly polarized light component in a second direction perpendicular to the first direction. | 07-22-2010 |
| 20100208315 | COMPUTER GENERATED HOLOGRAM, GENERATION METHOD, AND EXPOSURE APPARATUS - The present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram comprising a plurality of anisotropic cells each including an anisotropic medium configured to change a polarization state of the incident light, and a plurality of isotropic cells each including an isotropic medium configured not to change a polarization state of the incident light, wherein a linearly polarized light component, in a first direction, of the incident light forms a first light intensity distribution on the predetermined plane, and a linearly polarized light component, in a second direction perpendicular to the first direction, of the incident light forms a second light intensity distribution different from the first light intensity distribution on the predetermined plane. | 08-19-2010 |
| 20100220372 | COMPUTER GENERATED HOLOGRAM AND EXPOSURE APPARATUS - The present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram comprising a first anisotropic cell and second anisotropic cell configured to change a polarization state of the incident light, and a first isotropic cell and second isotropic cell configured not to change the polarization state of the incident light, wherein a direction of an optic axis of the first anisotropic cell is different from a direction of an optic axis of the second anisotropic cell, and a thickness of the first isotropic cell is different from a thickness of the second isotropic cell. | 09-02-2010 |
| 20100328742 | HOLOGRAM, HOLOGRAM DATA GENERATION METHOD, AND EXPOSURE APPARATUS - The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using an incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component of the incident light and a phase of a second polarized light component. The plurality of cells are designed to form a portion in an overlap region in which a first light intensity distribution region formed on the predetermined plane by the first polarized light component and a second light intensity distribution region formed on the predetermined plane by the second polarized light component are superposed on each other. The phase of the first polarized light component is diffused in the portion formed in the overlap region. | 12-30-2010 |
| 20110116069 | COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD - The present invention provides a computer generated hologram including a plurality of anisotropic cells having different refractive indices with respect to linearly polarized light in a first direction and linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, wherein the plurality of anisotropic cells are made of an identical material and includes a first anisotropic cell, a second anisotropic cell, a third anisotropic cell, and a fourth anisotropic cell which have different thicknesses, and the plurality of anisotropic cells change phases of linearly polarized light in the first direction and linearly polarized light in the second direction, thereby making a first light intensity distribution formed on a predetermined plane by the linearly polarized light in the first direction different from a second light intensity distribution formed on the predetermined plane by the linearly polarized light in the second direction. | 05-19-2011 |