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| 20100131187 | POI RECOMMENDATION APPARATUS AND METHODS, AND STORAGE MEDIA - The invention discloses a POI recommendation apparatus comprising a database and a POI recommendation module. The database provides a plurality of predetermined POIs, each having popularity information corresponding to a time period. The POI recommendation module finds out a recommended POI corresponding to the time period from the predetermined POIs according to the popularity information, and transmits the recommended POI to an electronic device. | 05-27-2010 |
| 20100205200 | METHOD AND SYSTEM FOR INSTANTLY EXPANDING A KEYTERM AND COMPUTER READABLE AND WRITABLE RECORDING MEDIUM FOR STORING PROGRAM FOR INSTANTLY EXPANDING KEYTERM - A method for instantly expanding a keyterm is provided. According to the query term, a data search process is performed by several search engines. Several document snippets related to the query term are obtained from the search engines. A related term table containing several keyterms corresponding to each snippet is built up by analyzing each of the document snippet. According to a position relationship between the each keyterm and the query term in each snippet, a correlation calculation is performed for giving each keyterm a correlation value. A semantic merging process is performed to merge the correlation values of the keyterms with the same semantic meaning to be a correlation indicator. Some of the keyterms are determined to form a keyterm set of the query term. | 08-12-2010 |
| 20110087483 | EMOTION ANALYZING METHOD, EMOTION ANALYZING SYSTEM, COMPUTER READABLE AND WRITABLE RECORDING MEDIUM AND EMOTION ANALYZING DEVICE - A system for analyzing a sentence emotion is provided. The system comprises a case repository, an input module, a sentence structure analyzing module, a similarity analyzing module and an emotion detection module. The case repository stores several case sentences and each case sentence comprises at least one major term and is corresponding to at least one emotion annotation. The input module receives an input sentence and the sentence structure analyzing module analyzes a sentence structure of the input sentence. The similarity analyzing module performs a semantic analysis and a syntax analysis according to the sentence structure to obtain a similarity level between the input sentence and each of the case sentences. The emotion detection module detects at least one emotion of the input sentence according to the similarity level between the input sentence and each of the case sentences. | 04-14-2011 |
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| 20110255780 | METHOD FOR PERFORMING COLOR INTERPOLATION ON A DOWN-SAMPLED BAYER IMAGE, AND ASSOCIATED DEVICE - A method for performing color interpolation on a down-sampled Bayer image includes: with regard to at least one pixel to be interpolated in the down-sampled Bayer image, performing at least one pixel prediction operation according to pixel values of a plurality of neighboring pixels kept by a down-sampling operation, in order to generate at least one simulation pixel value of at least one corresponding simulation pixel of at least one neighboring pixel discarded by the down-sampling operation; and performing at least one color interpolation operation according to at least one pixel value of at least one neighboring pixel kept by the down-sampling operation and the at least one simulation pixel value, in order to generate a pixel value of the at least one pixel to be interpolated. An associated device is also provided. | 10-20-2011 |
| 20110274371 | METHOD FOR GENERATING A HIGH QUALITY UP-SCALED IMAGE, AND ASSOCIATED DEVICE - A method for generating a high quality up-scaled image includes: utilizing at least four pixels within a source image as reference pixels within the high quality up-scaled image, where the reference pixels are utilized as a portion of pixels within the high quality up-scaled image, and are utilized as reference for generating another portion of pixels within the high quality up-scaled image; and calculating at least one portion of three linear distribution values corresponding to three quarter points between two adjacent pixels of the reference pixels according to pixel values of the two adjacent pixels and adjusting the portion of the linear distribution values according to pixel values of at least three reference pixels of the four reference pixels, and generating at least one pixel within the high quality up-scaled image accordingly. An associated device is also provided. | 11-10-2011 |
| 20120045123 | METHOD AND APPARATUS FOR PERFORMING DE-NOISE PROCESSING - A method for performing de-noise processing includes: with regard to each direction of a plurality of directions, summing up absolute values of differences between a plurality of sets of first pixel values around a target pixel of an image to generate a first detection value, and with regard to each direction of at least a portion of the directions, selectively averaging at least one set of second pixel values around the target pixel to generate a second detection value; sorting a plurality of pixel values around the target pixel and generating a third detection value accordingly; and with regard to a specific direction of the directions, performing de-noise processing on the target pixel according to at least the former two of the first detection value, the third detection value, and the second detection value. An associated apparatus is also provided. | 02-23-2012 |
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| 20110095998 | EXTERNAL INPUT DEVICE - An external input device is disclosed. The external input device comprises an upper case, a touch sensor module, a control module, a lighting module, a transfer module, a transparent substrate, and a lower case. The upper case comprises a visible region and a shielding region; the touch sensor module is provided under the upper case; control module is provided under the shielding region; the lighting module is provided on the control module; the transparent substrate is provided under the touch sensor; and the lower case is used for sitting the touch sensor module, the control module, the lighting module, the transfer module, and transparent substrate, and integrates with the upper case. The external input device can be used for performing pointing mode and key-in mode to replace the functions of mice, touch panel, and partial functions of keyboards, and the external input device is easy to switch between the modes for users. | 04-28-2011 |
| 20110214925 | Touch Sensor Device - A touch sensor device with increased transmittance, increased sensitivity and decreased thickness is disclosed. The touch sensor device includes a substrate. The substrate, from bottom to top, sequentially includes a bottom conductive layer, a bottom insulation layer, a top conductive layer, an electrode layer, a top insulation layer and a substrate material layer. The bottom conductive layer can shield external electromagnetic interference and act as a ground. The bottom insulation layer is provided with an insulation effect. The top conductive layer is used for sensing a touch operation to generate a sensor signal. The electrode layer includes a plurality of first electrode lines, a barrier layer and a plurality of second electrode lines. The top insulation layer is provided with an effect for preventing electrostatic discharge. The substrate material layer is used for protecting the touch sensor device. | 09-08-2011 |
| 20110316808 | SINGLE PIECE TYPE CAPACITIVE TOUCH PANEL - A single piece type capacitive touch panel uses an etching process to form a frame on periphery of a transparent substrate. An icon layer is disposed in the frame by printing or sputtering. The icon layer completely fills the frame. In addition, one side face of the icon layer has an optical film. Accordingly, the structure of utilizing the frame to combine the icon layer can greatly increase the visible area, enhance the flatness, and avoid thicker thickness caused by climbing effect on curved corner of the conventional icon layer, or Mura phenomenon caused by the stacked structure at the side of the conventional icon layer. | 12-29-2011 |
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| 20090042649 | INPUT CONTROL APPARATUS AND AN INTERACTIVE SYSTEM USING THE SAME - An input control apparatus and an interactive system using the same are disclosed. The input control apparatus comprises: a switch unit, for selecting an input mode for the input control apparatus selected from the group consisting of a mouse mode, a joystick mode, a keyboard mode and the combination thereof; an interface unit, for generating an input signal according to the input mode selected by the switch unit; a remote control unit, for generating and thus transmitting a control signal according to the input mode and the input signal. By transmitting the control signals of two aforesaid input control apparatuses to an electronic device, such as a computer, an interactive gamming device or an interactive multimedia device, two such input control apparatuses can be integrated as a handheld apparatus with a left-hand unit and a right-hand unit for meeting the control requirements of a comparatively more complicated game executing on the electronic device. However, for those less complicated game, the two input control apparatuses can be configured as independent devices to be operated by different users. Thereby, users are able to interact with the electronic device. | 02-12-2009 |
| 20090058799 | INTERACTIVE POINTING DEVICE - An interactive pointing device having pointing function in space and game control is provided in the present invention. The interactive pointing device comprises an accelerometer module and a gyroscope device. The accelerometer module functions as sensing the movement of the operator and generates at least one axis of accelerating signal corresponding to the sensed movement. The gyroscope device disposed on a turning mechanism functions as sensing rotation status of the interactive pointing device about at least one axis and generate a corresponding rotating signal. The turning mechanism can be operated to adjust the axis of the gyroscope device so that the gyroscope device is capable of sensing rotation status about different axes. The at least one accelerating signal and the rotating signal are then processed for controlling cursor movement of the electrical device and interacting with multimedia gaming programs. | 03-05-2009 |
| 20120112996 | INTERACTIVE POINTING DEVICE - An interactive pointing device having pointing function in space and game control is provided in the present disclosure. The interactive pointing device comprises an accelerometer module, a dual-axis gyroscope device, and a micro processing unit. The accelerometer module functions as sensing the movement of the operator and generates at least one axis of accelerating signal corresponding to the sensed movement. The dual-axis gyroscope device functions as sensing rotation status of the interactive pointing device about dual axis and generate a corresponding rotating signal. The micro processing unit processes the at least one axis of accelerating signal and the rotating signal so as to interact with an electronic device accordingly. The micro processing unit is able to use the rotating signal to compensate the accelerating signal and assist an action evaluation process of the interactive pointing device operating under different operation modes. | 05-10-2012 |
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| 20100127959 | Color Sequential Display Device - A color sequential liquid crystal display (LCD) device is disclosed in the present invention. The color sequential LCD device includes an LCD panel, a backlight module, an image processing circuit and a timing control circuit. The image processing circuit is utilized for performing image processing on an image data to generate a frame data with full color information, and sorting the frame data to generate a plurality of frame data based on a predetermined color sequence. The timing controller is utilized for controlling the LCD panel and the backlight module to display the plurality of field data outputted by the image processing circuit, so as to achieve color mixing in time domain. | 05-27-2010 |
| 20100263944 | SENSOR STRUCTURE OF TOUCH PANEL AND METHOD FOR DETERMINING TOUCH SIGNAL GENERATING BY SENSOR STRUCTURE OF TOUCH PANEL - A sensor structure of a touch panel and a method of determining a touch signal generated by the same are disclosed. The sensor structure includes a plurality of sensor lines disposed on a surface of a substrate, and a control circuit electrically connected to the sensor lines. Each of the sensor lines has a plurality of conductive pads and a conductive line electrically connected the conductive pads. The control circuit receives a touch signal from one of the sensor lines. The touch signal is resulting from a touch capacitance generated between a touch and one of the conductive pads of the sensor line. The control circuit calculates the position of the touch based on the touch capacitance. In addition, the touch capacitance generated by a conductive pad close to the control circuit is larger than the touch capacitance generated by another conductive pad further away from the control circuit. | 10-21-2010 |
| 20100271317 | METHOD OF POSITIONING COORDINATE - A method of positioning a coordinate suitable for a touch panel includes following steps. When a touch event occurs, the touch panel generates a corresponding detection coordinate periodically until the touch event ends. When the touch event occurs, the detection coordinate generated by the touch panel is sequentially stored. The touch event is ignored until the number of coordinates generated by the touch panel is greater than or equal to N, and N is a positive integer. When the number of coordinates generated by the touch panel is greater than or equal to N, a touch coordinate corresponding to the touch event is generated according to the last generated N detection coordinates. The above-mentioned step of generating the touch coordinate is repeated according to a cycle of generating the detection coordinate by the touch panel so as to renew the touch coordinate until the touch event ends. | 10-28-2010 |
| 20100309171 | METHOD OF SCANNING TOUCH PANEL - A method of scanning a touch panel is provided. The present method includes following steps. First, a scan area is defined according to the coordinates of a detected touch signal. Next, the scan area is scanned during a predetermined period to detect a next touch panel. After the predetermined period, a sensing range of the touch panel is scanned to re-define the scan area. Because the scan area is smaller than the sensing range of the touch panel, the time and power consumed by the scanning operation can be both reduced by detecting the touch signals within the scan area. | 12-09-2010 |
| 20100315347 | TOUCH INPUT DEVICE - A touch input device includes a substrate, plural sensible conductive layers and plural first switch units. The substrate is provided with an upper surface, the sensible conductive layers are all configured on the upper surface and are arranged in columns and rows. The first switch units are configured on the substrate and are electrically connected with the sensible conductive layers. By the first switch units, same columns of the sensible conductive layers can conduct electrically with one another and same rows of the sensible conductive layers can conduct electrically with one another. | 12-16-2010 |
| 20110181525 | TOUCH DEVICE AND DRIVING METHOD OF TOUCH PANEL THEREOF - A touch device includes a touch panel, a sensing unit, and an operation unit is provided. The sensing unit is coupled to the touch panel, for scanning a scan area of the touch panel to output a touch signal. The operation unit is coupled to the sensing unit, for determining the scan area according to the touch signal. When the touch signal corresponds to a first close path, the operation unit defines a close area formed by the first close path as the first sub touch area. When the first sub touch area is undefined, the operation unit chooses a whole touch area of the touch panel as the scan area. When the first sub touch area is defined, the operation chooses the first sub touch area as the scan area. | 07-28-2011 |
| 20120091319 | DRIVING METHOD FOR PHOTOSENSOR ARRAY PANEL - A driving method for a photosensor array panel including a plurality of photosensor strips, a plurality of scan lines, at least a dummy photosensor strip, and at least a dummy scan line is provided. The photosensor strips are arranged side by side and located beside the dummy photosensor strip. The scan lines are electrically connected to the photosensor strips, and the dummy scan line is electrically connected to the dummy photosensor strip. The driving method includes the following steps. First, the photosensor strips are turned on in sequence through the scan lines. When none of the photosensor strips is turned on, the dummy photosensor strip will be turned on through the dummy scan line. | 04-19-2012 |
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| 20100289814 | COLOR TRANSFORMATION METHOD AND CORRESPONDING COLOR DISPLAY METHOD - A color transformation method includes following steps. First, a color signal is received. Then, a saturation calculation step is performed to generate a saturation value of the color signal, and a hue-angle-weighting calculation step is performed to generate a first hue-angle weighting of the color signal corresponding to a first LUT and a second hue-angle weighting of the color signal corresponding to a second LUT. Next, a color calculation step is performed to transform the color signal into a first color output signal according to the saturation value and the first hue-angle weighting and to transform the color signal to a second color output signal according to the saturation value and the second hue-angle weighting. | 11-18-2010 |
| 20110025613 | TOUCH APPARATUS AND TOUCH SENSING METHOD THEREOF - A touch apparatus and a touch sensing method thereof are provided. The touch apparatus includes a touch panel and a controller coupling to the touch panel. The controller includes a detection unit and a decision unit coupling to the detection unit. A touch coordinate which is resulted from the touch panel being touched is detected by the detection unit, and a decision result is obtained according as the touch coordinate is touched continuously during a specific time. A database for storing a decision data is built in the decision unit according to the decision result. | 02-03-2011 |
| 20110285738 | RGBW DISPLAY SYSTEM AND METHOD FOR DISPLAYING IMAGES THEREOF - When a signal receiving unit receives red, green, and blue sub-pixels of an RGB pixel, a chromaticity weight generation unit generates a chromaticity weight according to the lowest gray level and the highest gray level of the red, green, and blue sub-pixels of the RGB pixel. Then, a gray level generation unit generates gray levels of red, green, blue, and white sub-pixels of an RGBW pixel according to the chromaticity weight, gray levels of the red, green, and blue sub-pixels of the RGB pixel, three chromaticity correction values and the lowest gray level. A RGBW display displays the RGBW pixel according to the gray levels of the red, green, blue, and white sub-pixels of the RGBW pixel. | 11-24-2011 |
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| 20090000689 | TANK-LOCKING DEVICE, SYSTEM FOR MANAGING LIQUID SUPPLY AND METHOD USING THE SAME - A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank. | 01-01-2009 |
| 20120103434 | TANK-LOCKING DEVICE, SYSTEM FOR MANAGING LIQUID SUPPLY AND METHOD USING THE SAME - A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank. | 05-03-2012 |
| 20120104088 | TANK-LOCKING DEVICE, SYSTEM FOR MANAGING LIQUID SUPPLY AND METHOD USING THE SAME - A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank. | 05-03-2012 |
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| 20090166772 | MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND PROCESS FOR FABRICATING THE SAME - A micro-electro-mechanical systems (MEMS) device includes a back-plate substrate, having an intended region formed with a plurality of perforating holes. A first structural dielectric layer, disposed on the back-plate substrate, wherein the dielectric layer having an opening above the intended region. An etching stop layer, disposed over the first structural dielectric layer. A second structural dielectric layer, formed over the back-plate substrate. The etching stop layer and the second structural dielectric layer form at least a part of a micro-machine diaphragm, and cover over the opening of the first structural dielectric layer to form a chamber between the micro-machine diaphragm and the back-plate substrate. | 07-02-2009 |
| 20090179233 | MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE - The present invention provides a MEMS device, be implemented on many MEMS device, such as MEMS microphone, MEMS speaker, MEMS accelerometer, MEMS gyroscope. The MEMS device includes a substrate. A dielectric structural layer is disposed over the substrate, wherein the dielectric structural layer has an opening to expose the substrate. A diaphragm layer is disposed over the dielectric structural layer, wherein the diaphragm layer covers the opening of the dielectric structural layer to form a chamber. A conductive electrode structure is adapted in the diaphragm layer and the substrate to store nonvolatile charges. | 07-16-2009 |
| 20100052082 | MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) PACKAGE AND METHOD FOR FORMING THE MEMS PACKAGE - A micro-electro-mechanical systems (MEMS) package includes a MEMS microphone device. The MEMS microphone device has a first substrate and at least a sensing element on the first substrate wherein a first chamber in the MEMS microphone device is connected to the sensing element. A second substrate is disposed over the MEMS microphone device to provide a second chamber in the second substrate over the sensing element opposite to the first chamber. | 03-04-2010 |
| 20100072561 | METHOD FOR FABRICATING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE - A micro-electro-mechanical system (MEMS) device includes a substrate, having a first side and second side, the second side has a cavity and a plurality of venting holes in the substrate at the second side with connection to the cavity. However, the cavity is included in option without absolute need. A structural dielectric layer has a dielectric structure and a conductive structure in the dielectric structure. The structural dielectric layer has a chamber in connection to the cavity by the venting holes. A suspension structure layer is formed above the chamber. An end portion is formed in the structural dielectric layer in fix position. A diaphragm has a first portion of the diaphragm fixed on the suspension structure layer while a second portion of the diaphragm is free without being fixed. | 03-25-2010 |
| 20100277229 | MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE WITH SENSTIVITY TRIMMING CIRCUIT AND TRIMMING PROCESS - A microelectromechanical system (MEMS) device includes a diaphragm capacitor, connected between a capacitor biasing voltage source and a ground. A source follower circuit is coupled to the diaphragm capacitor. An amplifier is coupled to the source follower circuit to amplify the voltage signal as an output voltage signal. A programmable trimming circuit is implemented with the amplifier to trim a gain or implemented with the capacitor biasing voltage source to trim voltage applied on the diaphragm capacitor. Whereby, the output voltage signal has a target sensitivity. | 11-04-2010 |
| 20100330722 | CMOS MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE AND FABRICATION METHOD THEREOF - A method for fabricating the MEMS device includes providing a substrate. Then, a structural dielectric layer is formed over the substrate at a first side, wherein a diaphragm is embedded in the structural dielectric layer. The substrate is patterned from a second side to form a cavity in corresponding to the diaphragm and a plurality of venting holes in the substrate. An isotropic etching process is performed from the first side and the second side of the substrate via vent holes to remove a dielectric portion of the structural dielectric layer for exposing a central portion of the diaphragm while an end portion is held by a residue portion of the structural dielectric layer. | 12-30-2010 |
| 20110104844 | METHOD FOR FABRICATING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE - A method for fabricating MEMS device includes providing a substrate having a first side and a second side. Then, a structural dielectric layer is formed over the substrate at the first side, wherein a structural conductive layer is embedded in the structural dielectric layer. A multi-stage patterning process is performed on the substrate from the second side, wherein a plurality of regions of the substrate with different levels is formed and a portion of the structural dielectric layer is exposed. An isotropic etching process is performed from the second side of the substrate or from the both side of the substrate to etch the structural dielectric layer, wherein a remaining portion of the structural dielectric layer comprises the structural conductive layer and a dielectric portion enclosed by the structural conductive layer. | 05-05-2011 |
| 20110156106 | HERMETIC MEMS DEVICE AND METHOD FOR FABRICATING HERMETIC MEMS DEVICE AND PACKAGE STRUCTURE OF MEMS DEVICE - A hermetic microelectromechanical system (MEMS) package includes a CMOS MEMS chip and a second substrate. The CMOS MEMS Chip has a first substrate, a structural dielectric layer, a CMOS circuit and a MEMS structure. The structural dielectric layer is disposed on a first side of the first structural substrate. The structural dielectric layer has an interconnect structure for electrical interconnection and also has a protection structure layer. The first structural substrate has at least a hole. The hole is under the protection structure layer to form at least a chamber. The chamber is exposed to the environment in the second side of the first structural substrate. The chamber also comprises a MEMS structure. The second substrate is adhered to a second side of the first substrate over the chamber to form a hermetic space and the MEMS structure is within the space. | 06-30-2011 |
| 20110165717 | METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) PACKAGE - A method for forming a micro-electro-mechanical systems (MEMS) package includes following steps. A plurality of MEMS units are formed on a substrate, and each of the MEMS units includes at least a MEMS sensing element and a first chamber over the MEMS sensing element. The MEMS units include electric connection pads. A plurality of covering units are formed correspondingly over the MEMS units. Each of the covering units provides a second chamber over the MEMS sensing element opposite to the first chamber. The covering units are adhered to the MEMS units by an adhesive material. The MEMS units are diced into singulated units. | 07-07-2011 |
| 20110183456 | METHOD FOR FABRICATING MEMS DEVICE - A method for fabricating MEMS device includes: providing a single crystal substrate, having first surface and second surface and having a MEMS region and an IC region; forming SCS mass blocks on the first surface in the MEMS region; forming a structural dielectric layer over the first surface of the substrate, wherein a dielectric member of the structural dielectric layer is filled in spaces surrounding the SCS mass blocks in the MEMS region, the IC region has a circuit structure with an interconnection structure formed in the structural dielectric layer; patterning the single crystal substrate by an etching process on the second surface to expose a portion of the dielectric member filled in the spaces surrounding the SCS mass blocks; performing isotropic etching process at least on the dielectric portion filled in the spaces surrounding the SCS mass blocks. The SCS mass blocks are exposed to release a MEMS structure. | 07-28-2011 |
| 20110300659 | METHOD FOR FABRICATING MEMS DEVICE - Method for fabricating MEMS device has a first surface and a second surface and having a MEMS region and an IC region. A MEMS structure is formed over the first surface. A structural dielectric layer is formed over the first surface. The structural dielectric layer has a dielectric member and the spaces surrounding the MEMS structure is filled with the dielectric member. The substrate is patterned by etching process from the second surface of the substrate to expose a portion of the dielectric member filled in the space surrounding the MEMS structure. A wettable thin layer is formed to cover an exposed portion of the substrate at the second surface. An etching process is performed on the dielectric member filled in the spaces surrounding the MEMS structure. The MEMS structure is exposed and released by the etching process. The etching process comprises an isotropic etching process with a wet etchant. | 12-08-2011 |
| 20120090398 | MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURE - A MEMS structure includes a substrate, a structural dielectric layer, and a diaphragm. A structural dielectric layer is disposed over the substrate. The diaphragm is held by the structural dielectric layer at a peripheral end. The diaphragm includes multiple trench/ridge rings at a peripheral region surrounding a central region of the diaphragm. A corrugated structure is located at the central region of the diaphragm, surrounded by the trench/indent rings. | 04-19-2012 |
