| Patent application number | Description | Published |
|---|
| 20080198882 | Active cooling of crystal optics for increased laser lifetime - A laser beam is generated and transmitted within an enclosed pathway through at least one crystal optic at a power density that progressively degrades transmissivity of the crystal optic with accumulating fluence. The crystal optics are cooled below normal operating temperatures to slow the progressive degradation in the transmissivity of the crystal optics with the accumulating fluence or to accommodate a higher power density without correspondingly increasing the progressive degradation in transmissivity. | 08-21-2008 |
| 20080204862 | Engineered fluoride-coated elements for laser systems - The invention is directed to elements having fluoride coated surfaces having multiple layers of fluoride material coatings for use in laser systems, and in particular in laser systems operating at wavelength <200 nm. In a particular embodiment the invention is directed to highly reflective mirrors for use in wavelengths <200 nm laser systems. The invention describes the mirrors and a method of making them that utilizes a plurality of periods of fluoride coatings, each period comprising one layer a high refractive index fluoride material and one layer low refractive index fluoride material, and additionally at least one layer of an amorphous silica material. The silica material can be inserted between each period, inserted between a stack consisting of a plurality of periods, and, optionally, can also be applied as the final layer of the finished element to protect the element. | 08-28-2008 |
| 20090035586 | CLEANING METHOD FOR DUV OPTICAL ELEMENTS TO EXTEND THEIR LIFETIME - The invention is directed to a method for cleaning surfaces of optical elements made from metal fluoride single crystals of formula MF | 02-05-2009 |
| 20090141358 | DENSE HOMOGENEOUS FLUORIDE FILMS FOR DUV ELEMENTS AND METHOD OF PREPARING SAME - The invention is directed to optical elements that are coated with dense homogeneous fluoride films and to a method of making such coated elements. The coatings materials are a high (“H”) refractive index fluoride material and a low (“L”) refractive index material that are co-evaporated to form a coating layer of a L-H coating material (a co-deposited coating of L and H materials). Lanthanide metal fluorides (for example, neodymium, lanthanum, dysprosium, yttrium and gadolinium, and combinations thereof) are preferred metal fluorides for use as the high refractive index materials with lanthanum fluoride (LaF | 06-04-2009 |
| 20090297812 | Adhesive, hermetic oxide films for metal fluoride optics and method of making same - The invention is directed to single crystal alkaline earth metal fluoride optical elements having an adhesive, hermetic coating thereon, the coating being chemically bonded to the surface of the metal fluoride optical element with a bonding energy ≧4 eV and not merely bonded by van de Walls forces. The materials that can be used for coating the optical elements are selected from the group consisting of SiO | 12-03-2009 |
| 20100213391 | SYSTEM FOR MONITORING OPTICAL MODULES OF HIGH-POWER LASERS - High-power excimer lasers are assembled with individually replaceable optical module subsystems containing consumable optical components. Windows formed in the enclosures of the optical modules incorporate a fluorescent material for converting ultraviolet light scattered from the components of the optical module into visible light emanating from the windows. Changes in the amount or location of the visible light emanating from the windows are interpreted as indications of the degradation in the performance of the optical modules. | 08-26-2010 |
| 20100215932 | WIDE-ANGLE HIGHLY REFLECTIVE MIRRORS AT 193NM - The invention is directed to highly reflective optical elements having an amorphous MgAl | 08-26-2010 |
| 20110122909 | ADHESIVE PROTECTIVE COATING WITH SUPRESSED REFLECTIVITY - The disclosure is directed to a thin-film for use in below 300 nm laser systems that can be applied to a variety of substrate types. The thin film consists of a blocking layer of a selected material and a matching structure, the matching structure consisting of 1-7 layers of a selected material. The blocking layer serves to minimize or eliminate the transmission of below 300 nm laser light into an adhesive that is used to bond the substrate to a holder. The matching layer(s) minimize internal reflectance of below 300 nm laser light from the blocking layer back into the substrate. | 05-26-2011 |
