Patent application number | Description | Published |
20120028462 | METHOD FOR FORMING CU FILM AND STORAGE MEDIUM - In a method for forming a Cu film, a CVD Cu film is formed on a CVD-Ru film that is formed on a wafer W. In the method, the wafer W having the CVD-Ru film is loaded into a chamber 1, and a film-forming source material in a vapor state is introduced into the chamber 1. The film-forming source material includes Cu(hfac)TMVS that is a Cu complex having a vapor pressure higher than that of Cu(hfac) | 02-02-2012 |
20120040085 | METHOD FOR FORMING Cu FILM AND STORAGE MEDIUM - In a method for forming a Cu film, a wafer (W) is loaded into a chamber | 02-16-2012 |
20120064247 | METHOD FOR FORMING CU FILM, AND STORAGE MEDIUM - A film-forming source material composed of a Cu complex is supplied to a wafer, which is kept at a relatively high first temperature and has a Ru film as a film-forming base film, and initial nuclei of Cu are formed on the wafer. Then, the film-forming source material composed of the Cu complex is supplied to the wafer kept at a relatively low second temperature, and Cu is deposited on the wafer having the initial nuclei of Cu formed thereon. | 03-15-2012 |
20120064248 | METHOD FOR FORMING CU FILM AND STORAGE MEDIUM - In a method for forming a Cu film, a substrate is loaded in a processing chamber and a gaseous film-forming source material including monovalent amidinate copper and a gaseous reducing agent including a carboxylic acid are introduced into the processing chamber. Then, a Cu film is deposited on the substrate by reacting the film-forming source material and the reducing agent together on the substrate. | 03-15-2012 |
Patent application number | Description | Published |
20080224554 | BEARING ASSEMBLY AND MOTOR USING THE BEARING ASSEMBLY - In a bearing assembly, a shaft is inserted into a sleeve, and a lower end of the shaft is attracted to a magnet chip which is held by an auxiliary yoke. A retaining member and an auxiliary washer are sandwiched between a lower end surface of the sleeve and a contact portion of the auxiliary yoke so as to retain the shaft in the sleeve. The auxiliary washer has an inner diameter larger than that of the retaining member and a maximum diameter of the lower end of the shaft. | 09-18-2008 |
20080277845 | MOTOR FOR HYDRAULIC SHOCK ABSORBER - A motor used in a hydraulic shock absorber which absorbs the vibrations generated by an engine of a vehicle includes a rotor portion, a stator portion, and a bearing mechanism. The bearing mechanism includes a sleeve, a sleeve holder, and a chip member. The sleeve holder includes a single component having a cylindrical portion which covers an outer circumferential surface of the sleeve, and a bottom portion which covers a lower portion of the cylindrical portion. | 11-13-2008 |
20130249339 | MOTOR - A winding structure which is disposed over an armature and a commutator includes an equalizer. The equalizer includes a going portion and a return portion which are wound across one group of teeth through a slot and connected between two identical segments. In a case where an integer number is an expansion value among values which are integer multiples of a value which is acquired by dividing the total number of the slots by the total number of pole pairs, when one group of the teeth having the same total number as the expansion value is given as an element teeth group, the going portion and the return portion are wound across the element teeth group through the slots positioned at both sides of the element teeth group. | 09-26-2013 |
20150084460 | MOTOR - A motor includes a housing, a back cover, a brush card, a brush, and a connector member. The back cover includes a first rear wall portion and a first peripheral wall portion. The first peripheral wall portion includes a through-hole and a cut-out. The through-hole vertically penetrates through the first peripheral wall portion at or near a lower end portion of the first peripheral wall portion. The cut-out is disposed farther on an upper side than the through-hole. The connector member is fitted into the cut-out. An outer surface of the connector member is provided with a flow path groove that extends in both peripheral and axial directions. The motor includes a flow path surface on an inner surface of the back cover. The flow path surface continues from a portion that opposes the flow path groove on a lower side of the flow path groove to the through-hole. | 03-26-2015 |