Patent application number | Description | Published |
20120212747 | APPARATUS AND METHOD OF MEASURING SHAPE - An apparatus for measuring a shape of a surface comprises: a measurement head including a division unit that divides light into reference light and test light, a reference surface, a light-condensing unit that condenses the test light onto the surface, and a first detector that detects interfering light between the test light Cat's Eye-reflected by the surface and the reference light reflected by the reference surface; a driving unit that drives the measurement head along the surface; a second detector that detects a position of the measurement head; and a processor that obtains a Gouy phase generated by diffraction of the test light on the surface, calculates a phase difference between the test light and the reference light based on information of the detected interfering light, and calculates the shape of the surface from the detected position of the measurement head, the obtained Gouy phase, and the calculated phase difference. | 08-23-2012 |
20120281233 | MEASUREMENT APPARATUS - The present invention provides a measurement apparatus which measures a height of a surface to be measured, including a detection unit configured by two-dimensionally arraying a plurality of regions where an intensity of interference light between reference light and measurement light is detected, a first optical system configured to split light emitted by a light source into first light and second light, a generation unit configured to receive the first light, and generate, from the first light, the reference light including a plurality of reference beams having optical path length differences in two directions perpendicular to each other in cross section surface, and a second optical system configured to cause the reference light to reach the detection unit so as to cause the respective reference beams generated by the generation unit to reach the corresponding regions. | 11-08-2012 |
20140218730 | MEASUREMENT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a measurement apparatus which measures a position of a surface to be measured, comprising a light detection unit configured to detect light reflected by the surface to be measured, a confocal optical system configured to irradiate the surface to be measured with light and guide the light traveling from the surface to be measured to the light detection unit, and a control unit configured to determine a position of the surface to be measured, based on an output from the light detection unit, wherein the control unit obtains a plurality of signals to be used for determining the position of the surface to be measured, selects one of the plurality of signals, and obtains the position of the surface to be measured, based on the selected signal. | 08-07-2014 |
20140300904 | MEASUREMENT APPARATUS - The present invention provides a measurement apparatus including a first optical system configured to allow a first test light to pass, and a second optical system configured to allow a second test light to pass, wherein an optical power in the first optical system and an optical power in the second optical system are different, a distance between a focal point of the first test light on a side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the first test light, and a distance between a focal point of the second test light on the side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the second test light. | 10-09-2014 |
20140336811 | ARTICLE PROCESSING APPARATUS, GENERATION METHOD AND COMPUTER-READABLE STORAGE MEDIUM - An article processing apparatus having a movable member for processing an article, includes an information processor configured to generate a transition order of states of the movable member. The information processor is configured to respectively set a plurality of clusters each including, as a plurality of nodes, a plurality of states that the movable member may take, with respect to a plurality of regions of the article, respectively set a plurality of costs with respect to a plurality of combinations of two nodes respectively belonging to two clusters different from each other of the plurality of clusters, and generate the transition order by obtaining, based on the plurality of clusters and the plurality of costs, as a solution of a traveling salesman problem, an order of traveling a plurality of nodes obtained by selecting one node from each of the plurality of clusters. | 11-13-2014 |
20140336978 | MOVING BODY PLACEMENT DETERMINING METHOD, MEASURING APPARATUS, MACHINING APPARATUS, AND STORAGE MEDIUM - Provided is a method for determining a placement of a moving body that moves to face an object and perform a process at a plurality of target points on the object. The method includes the following steps executed by a processor: a step of setting candidates regarding the placement of the moving body for each of the plurality of target points; a step of obtaining a processable area, which is capable of being processed by the moving body in the object, corresponding to each of the set candidates; and a step of determining the candidate corresponding to a combination of the processable areas as the placement of the moving body by obtaining the combination of the processable areas satisfying the plurality of target points from among the obtained plurality of processable areas. | 11-13-2014 |
20150247724 | OPTICAL SYSTEM AND OPTICAL QUALITY MEASURING APPARATUS - An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, an incident area on the surface, in which light generating the first reflected light is incident, is spaced apart from an exiting area on the surface, which light, to be incident on the photodetector from the surface via the second light-receiving system, exits. | 09-03-2015 |
20150247798 | OPTICAL SYSTEM AND OPTICAL QUALITY MEASURING APPARATUS - An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, a first light-receiving area of the photodetector with respect to light, of reflected light from the surface, via the first light-receiving system is spaced apart from a second light-receiving area of the photodetector with respect to light, of the reflected light from the surface, via the second light-receiving system. | 09-03-2015 |