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| 20090122303 | Apparatus And Method For Inspecting Defects - A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate. | 05-14-2009 |
| 20090141269 | Defect Inspection Method And System - An inspection system includes: a facility that uses wide-band illumination light having different wavelengths and single-wavelength light to perform dark-field illumination on an object of inspection, which has the surface thereof coated with a transparent film, in a plurality of illuminating directions at a plurality of illuminating angles; a facility that detects light reflected or scattered from repetitive patterns and light reflected or scattered from non-repetitive patterns with the wavelengths thereof separated from each other; a facility that efficiently detects light reflected or scattered from a foreign matter or defect in the repetitive patterns or non-repetitive patterns or a foreign matter or defect on the surface of the transparent film; and a facility that removes light, which is diffracted by the repetitive patterns, from a diffracted light image of actual patterns or design data representing patterns. Consequently, a more microscopic defect can be detected stably. | 06-04-2009 |
| 20090213366 | METHOD AND APPARATUS FOR DETECTING DEFECTS - A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection. | 08-27-2009 |
| 20100265496 | APPARATUS AND METHOD FOR INSPECTING DEFECTS - A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate. | 10-21-2010 |
| 20100271628 | METHOD AND APPARATUS FOR DETECTING DEFECTS - A method and apparatus for detecting defects are provided for detecting harmful defects or foreign matter with high sensitivity on an object to be inspected with a transparent film, such as an oxide film, by reducing noise due to a circuit pattern. The apparatus for detecting defects includes a stage part on which a substrate specimen is put and which is arbitrarily movable in each of the X-Y-Z-θ directions, an illumination system for irradiating the circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. Furthermore, a spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector from the specimen is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip. If these signals are not identical to each other, the foreign matter is determined to exist on the specimen in detection. | 10-28-2010 |
| 20110075134 | Defect Inspection Method and System - An apparatus for inspecting a specimen includes a first illumination unit having a laser light source and a first optical component for illuminating a specimen on which patterns are formed with a laser from a first elevation angle direction, a second illuminating unit having a light source and a second optical component for illuminating the specimen from a second elevation angle direction which is greater than the first elevation angle, a first detection optical unit which detects light from the specimen illuminated by the first illumination unit, a second detection optical unit which detects light from the specimen illuminated by the second illumination unit, and a signal processing unit which processes signals output from the first detector to detect defects in a first area on the specimen and processes signals output from the second detector to detect defects in a second area on the specimen. | 03-31-2011 |
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| 20090257647 | Method and Apparatus for Inspecting Defects - A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy. | 10-15-2009 |
| 20100014075 | Method and Apparatus for Inspecting Defects - An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction. | 01-21-2010 |
| 20100014083 | Method and Apparatus for Inspecting Defects - An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction. | 01-21-2010 |
| 20110149275 | DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD - A defect inspection device, which inspects defects such as foreign materials existing on a specimen on which a circuit pattern of wiring or the like is formed, is provided with an illumination optical system which illuminates a plurality of different areas the specimen with a plurality of linear shaped beams and an image forming optical system that forms images of the plurality of the illuminated areas on a plurality of detectors, and the detectors are configured to receive a plurality of polarization components substantially at the same time and individually, wherein the polarization components are different from each other and are contained in each of the plurality of the optical images formed by the image forming optical system, thereby detecting a plurality of signals corresponding to the polarization components and carrying out the inspection at high speed under a plurality of optical conditions. | 06-23-2011 |
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| 20090059088 | BROADCAST RECEIVING APPARATUS AND PROGRAM REFERENCE CHART DISPLAYING METHOD - According to one embodiment, a broadcast receiving apparatus includes: a tuner selecting and receiving a broadcast signal of digital broadcast; a recording control module making video data obtained by the tuner receiving the broadcast signal recorded in a recording medium; a video reproducing module reproducing a video signal by using the video data recorded in the recording medium; a video data selecting module selecting only identical apparatus video data obtained by the tuner of the identical apparatus receiving the broadcast signal, among the video data recorded in the recording medium; and a displaying control module making a program reference chart corresponding to the identical apparatus video data selected by the video data selecting module displayed. | 03-05-2009 |
| 20090060474 | BROADCAST RECEIVING APPARATUS AND RECORDING/REPRODUCING METHOD OF PROGRAM - According to one embodiment, a broadcast receiving apparatus includes the following module. In other words, the broadcast receiving apparatus includes: a tuner receiving desired program data from a broadcast wave; a recording control module making the program data received by the tuner recorded in a recording medium, with associating the program data with an apparatus code specific for the very apparatus; a program reproducing module reproducing a program by using the program data recorded in the recording medium; a reading module reading the program data and the apparatus code associated with the program data from the recording medium, when the program reproducing module reproduces the program; and a judging module comparing the read apparatus code read from the recording medium by the reading module with the apparatus code and judging reproduction allowabillty about the program data by the program reproducing module. | 03-05-2009 |
| 20090232475 | DIGITAL BROADCAST RECEIVING/RECORDING/REPRODUCING APPARATUS AND DIGITAL BROADCAST RECEIVING/RECORDING/REPRODUCING METHOD - According to one embodiment, a digital broadcast receiving/recording/reproducing apparatus has a receiving module which receives a broadcast signal of a program that is set to be recorded, a processing module which converts the broadcast signal received by the receiving module into digital picture and sound program data, a memory which records copy control information acquired from the broadcast signal received by the receiving module, a recording control module which encrypts the program data converted by the processing module and records the encrypted program data in a specified recording device, and a memory control module which encrypts the copy control information recorded in the memory and records the encrypted copy control information in the specified recording device and deletes the copy control information recorded in the memory after termination of the recording of the encrypted copy control information. | 09-17-2009 |
