| Patent application number | Description | Published |
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| 20090056877 | Plasma processing apparatus - A vertical plasma processing apparatus for performing a plasma process on a plurality of target objects together at a time includes an activation mechanism configured to turn a process gas into plasma. The activation mechanism includes a vertically elongated plasma generation box attached to a process container at a position corresponding to a process field to form a plasma generation area airtightly communicating with the process field, an ICP electrode provided to the plasma generation box, and an RF power supply connected to the electrode. | 03-05-2009 |
| 20090078201 | VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS - A vertical plasma processing apparatus for a semiconductor process includes an airtight auxiliary chamber defined by a casing having an insulative inner surface and integrated with a process container. The auxiliary chamber includes a plasma generation area extending over a length corresponding to a plurality of target substrates in a vertical direction. A partition plate having an insulative surface is located between a process field and the plasma generation. The partition plate includes a gas passage disposed over a length corresponding to the plurality of target substrates in a vertical direction. A process gas is exited while passing through the plasma generation area, and is then supplied through the gas passage to the process field. | 03-26-2009 |
| 20090145890 | Treatment apparatus, treatment method, and storage medium - A treatment apparatus uses an inductive heating method to allow an object to be heated while preventing a treatment chamber from being heated. The treatment apparatus for performing a heat treatment on the object has a treatment chamber and an induction heating coil section. The treatment chamber is capable of accommodating a plurality of objects. The induction heating coil section is wound around an outer circumference of the treatment chamber. The treatment apparatus also has a high frequency power supply and a gas supply unit. The high frequency power supply applies high frequency power to the induction heating coil section. The gas supply unit introduces a necessary gas to the treatment chamber. A holding unit is inserted in and removed from the treatment chamber under the condition that the holding unit holds the object and an induction heating generator adapted to be inductively heated by means of a high frequency wave emitted by the induction heating coil section. | 06-11-2009 |
| 20090184109 | Processing apparatus and process method - A processing apparatus subjects an object to be processed W to a heat process. The processing apparatus comprises: a processing vessel | 07-23-2009 |
| 20100186898 | PLASMA PROCESSING APPARATUS - A vertical plasma processing apparatus for performing a plasma process on a plurality of target objects together at a time includes an activation mechanism configured to turn a process gas into plasma. The activation mechanism includes a vertically elongated plasma generation box attached to a process container at a position corresponding to a process field and confining a plasma generation area airtightly communicating with the process field, an ICP electrode disposed outside the plasma generation box and extending in a longitudinal direction of the plasma generation box, and an RF power supply connected to the ICP electrode. The ICP electrode includes a separated portion separated from a wall surface of the plasma generation box by a predetermined distance. | 07-29-2010 |
| Patent application number | Description | Published |
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| 20090007579 | Load Driving Device, Outdoor Unit of Air Conditioner, and Driving Method of Load - After the power source to the control substrate is turned on, power is supplied to the compressor driver and the fan driver. Then, when it is determined that an indoor unit is in operation, the compressor driver and the fan driver are operated. Meanwhile, when it is determined that the indoor unit is not in operation, after the lapse of ten minutes or twenty minutes under a predetermined setting, the power to the compressor driver and the fan driver is cut. When the operation of the indoor unit is started again, power is supplied to the compressor driver and the fan driver. | 01-08-2009 |
| 20090038325 | Outdoor Unit of Air Conditioner and Its Control Method - An outdoor unit includes an outdoor unit control circuit, an inverter substrate and a compressor. Periodic communication showing the operating condition of the inverter substrate is set from the inverter substrate to the outdoor unit control circuit. Thus, when the communication is performed-normally, the drive of the compressor is changed to a power saving process according to the necessity of the power consumption and the operating condition of the inverter substrate. When the communication is defective, the power-on reset is done to the inverter substrate. | 02-12-2009 |
| 20090145145 | AIR CONDITIONER - An air conditioner preferably includes a selection component (switch) and an air conditioning data acquisition/processing component (printed wiring board). Preferably, a storage component (EEPROM) records at least two sets of data of whether or not an option function is being executed and a drive condition of a compressor relating to air conditioning that the printed wiring board acquires. The switch receives display setting data indicating either one of the two sets of data. The printed wiring board includes an output port that alternatively outputs one of the data of whether or not the option function is being executed and the data of the drive condition of the compressor, and the printed wiring board performs data output processing from the output port in accordance with the display setting data that the switch has received. | 06-11-2009 |
| 20090281666 | CONTROL DEVICE - A control device is configured to control an air conditioner that includes an air conditioner outdoor unit and an air conditioner indoor unit. The control device includes a microcomputer and a storage element. The microcomputer causes a signal to be transmitted and received between an outdoor communication unit of the air conditioner outdoor unit and an indoor communication unit of the air conditioner indoor unit. The storage element stores specific information in response to command from the microcomputer. The microcomputer causes the storage element to store operation information including a state of transmission and reception of the signal of the air conditioner at a constant time interval. | 11-12-2009 |
| 20090320507 | AIR CONDITIONER CONTROL DEVICE - A control device includes a microcomputer and a storage element. The microcomputer is configured to execute an inspection operation mode in which an air conditioner is operated in inspection process in a manufacturing site, and a normal operation mode in which the air conditioner is operated at an installation site. When the operation state of the air conditioner fails to satisfy predetermined conditions, the microcomputer is configured to confirm that there is an error, and abnormally stop the air conditioner. When the air conditioner is abnormally stopped, the microcomputer is configured to cause the storage element to store predetermined operation information obtained during a period until abnormal stoppage of the air conditioner and to store the operation mode being executed at the time of occurrence of the error in the air conditioner. | 12-31-2009 |
