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| 20080283744 | Charged Particle Beam Device - A charged particle beam device of the present invention, which can correct astigmatism, off-axis aberration and out-of-focus state simultaneously at high speed, is provided with an electrostatic lens between an objective lens and a sample, which lens generates an electric field on a trajectory of a charged particle beam. The electrostatic lens is divided into a plurality of electrodes, and a voltage can be applied to the electrodes independently. By adjusting this voltage, any one of the astigmatism, the off-axis aberration and the out-of-focus state of the objective lens is corrected. | 11-20-2008 |
| 20090032722 | CORRECTOR FOR CHARGED-PARTICLE BEAM ABERRATION AND CHARGED-PARTICLE BEAM APPARATUS - In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field. | 02-05-2009 |
| 20090173887 | CHARGED PARTICLE BEAM TRAJECTORY CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS - The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal. | 07-09-2009 |
| 20090218509 | CHARGED PARTICLE BEAM APPARATUS - A charged particle beam apparatus can be constructed with a smaller size (resulting in a small installation space) and a lower cost, suppress vibration, operate at higher speed, and be reliable in inspection. The charged particle beam apparatus is largely effective when a wafer having a large diameter is used. The charged particle beam apparatus includes: a plurality of inspection mechanisms, each of which is mounted on a vacuum chamber and has a charged particle beam mechanism for performing at least an inspection on the sample; a single-shaft transfer mechanism that moves the sample between the inspection mechanisms in the direction of an axis of the single-shaft transfer mechanism; and a rotary stage that mounts the sample thereon and has a rotational axis on the single-shaft transfer mechanism. The single-shaft transfer mechanism moves the sample between the inspection mechanisms in order that the sample is placed under any of the inspection mechanisms. The rotary stage positions the sample such that a target portion of the sample can be inspected by the inspection mechanism under which the sample is placed, and the inspection mechanisms inspect the sample. | 09-03-2009 |
| 20110139980 | CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREMENT METHOD THEREFORE - Disclosed is a scanning charged particle microscope provided with an aberration measuring means that measures high-order geometrical aberration at high precision and high speed. An image obtained by a single-hole aperture and an image obtained by a multiple-hole aperture arranged in a region larger than that for the single-hole aperture are deconvoluted, an aberration quantity is determined based on the profiles of beams tilted in a plurality of directions and the obtained quantity is fed back to an aberration corrector. | 06-16-2011 |
| 20110260057 | CHARGED PARTICLE BEAM APPARATUS - According to a charged particle beam apparatus of this invention, an inspection position on a test sample (wafer coordinate system) is converted to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm ( | 10-27-2011 |
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| 20080254208 | Thin film magnetic head structure adapted to manufacture a thin film magnetic head - A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer has an end face joint structure where respective end faces of the magnetic pole end part and a yoke magnetic pole part having a size greater than that of the magnetic pole end part are joined to each other, and a surface with a flat structure on a side closer to the thin-film coil. | 10-16-2008 |
| 20080274271 | Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a york magnetic pole part, and an intervening insulative film - A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer includes a base magnetic pole part comprising the magnetic pole end part and a base depression distanced farther from the medium-opposing surface than the magnetic pole end part, and an embedded magnetic pole part buried in the base depression and joined to the base magnetic pole part. The thin-film magnetic head structure includes a yoke magnetic pole part joined to the base magnetic pole part and embedded magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer, and an intervening insulative film disposed between the embedded magnetic pole part and yoke magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer. | 11-06-2008 |
| 20090017198 | Thin-film magnetic head, method of manufacturing the same, head Gimbal assembly, and hard disk drive - A thin-film magnetic head has a laminated construction comprising a main pole layer having a magnetic pole tip on a side of the medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole tip forming a recording gap layer, on the side of the medium-opposing surface, and a thin-film coil wound around at least a portion of the write shield layer. The thin-film magnetic head has an upper yoke pole layer having a larger size than the portion of the main pole layer which is more distant from the medium-opposing surface than the recording gap layer, wherein the upper yoke pole layer is joined to the side of the main pole layer which is near the thin-film coil. | 01-15-2009 |
| 20090032494 | Thin film magnetic head structure, method of making same and thin film magnetic head - A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole tip on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole tip so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The magnetic pole tip of the main magnetic pole layer includes an even width portion having a substantially even width along an extending direction. | 02-05-2009 |
| 20090086370 | Thin film magnetic head structure, method of making same and thin film magnetic head - A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole tip on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole tip so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The magnetic pole tip of the main magnetic pole layer includes an even width portion having a substantially even width along an extending direction. | 04-02-2009 |
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| 20080211510 | METHOD AND APPARATUS FOR MEASURING THE TEMPERATURE OF A GAS IN A MASS FLOW CONTROLLER - A method and apparatus for measuring the temperature of a gas in a mass flow controller is described. One embodiment derives gas-temperature information from a mass flow sensor of the mass flow controller without relying on a separate temperature sensor. This embodiment supplies a substantially constant electrical current to a thermal mass flow sensor of the mass flow controller, the thermal mass flow sensor being designed to measure a mass flow rate of the gas; measures an input voltage of the thermal mass flow sensor to obtain a present input voltage, the input voltage varying with a temperature differential between a pair of sensing elements of the thermal mass flow sensor; calculates an adjusted input voltage by accounting for a component of the present input voltage that is dependent on the mass flow rate of the gas; and calculates the temperature of the gas based on the adjusted input voltage. In some embodiments, the calculated gas temperature is used to compensate for the variation, with temperature, of an output voltage of the thermal mass flow sensor under a zero-flow condition. | 09-04-2008 |
| 20110160447 | METHOD FOR SYNTHESIZING ACROLEIN - An object of the present invention is to provide a method for commercially manufacturing acrolein in a large flow rate by making supercritical water and an acid interact with glycerin, wherein by efficiently mixing high-concentration glycerin and supercritical water with each other, the method is made capable of making the synthesis stably proceed with a high yield while the occlusion and abrasion of the pipes and devices due to the generation of by-products are being suppressed. The method for synthesizing acrolein of the present invention is a method for synthesizing acrolein by making supercritical water and an acid interact with glycerin, the method using a reaction apparatus including: a cylindrical mixing flow path for mixing a fluid including glycerin and a fluid including supercritical water with each other; a first inlet flow path, disposed offset from the central axis of the mixing flow path, for making the fluid including glycerin flow into the mixing flow path; and a second inlet flow path, disposed offset from the central axis of the mixing flow path, for making the fluid including supercritical water flow into the mixing flow path, wherein the first inlet flow path and the second inlet flow path are each provided in a plurality of numbers in such a way that the first inlet flow paths and the second inlet flow paths are alternately arranged so as to encircle the central axis of the mixing flow path. | 06-30-2011 |
| 20110269934 | PRODUCTION METHOD AND APPARATUS FOR POLYTRIMETHYLENE TEREPHTHALATE - An object of the present invention is to provide a reasonable polycondensation step by which an appropriate molecular weight can be obtained and material decomposition associated with thermolysis can be suppressed, so as to contribute to production technology for PTT polymers. The production method for polytrimethylene terephthalate comprises an esterification step and a polycondensation step, wherein the polycondensation step is divided into multiple stages, polycondensation is performed using a polymerization vessel having a twin-shaft agitator in the final stage of the polycondensation step, and the polymerization temperature during the subsequent stage of the polycondensation step is less than the polymerization temperature during the former stage of the polycondensation step. | 11-03-2011 |
| 20110319667 | REACTION PROCESS UTILIZING CRITICAL - In order to perform organic synthesis process through action with supercritical water and acid stably while suppressing a trouble caused by a by-product, a method and an apparatus are provided, including the following steps. Water is supplied to high-pressure pumps ( | 12-29-2011 |
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| 20090086145 | LIQUID CRYSTAL DISPLAY DEVICE, METHOD FOR PRODUCING SAME, AND ELECTRONIC APPARATUS - A liquid crystal display device includes a pair of substrates, a plurality of gate lines arranged in parallel, a plurality of common lines arranged in parallel, a plurality of source lines arranged in such a manner that the direction of the source lines intersects the direction of the gate lines and the common lines, thin-film transistors arranged in the vicinity of intersections of the gate lines and source lines, lower electrodes arranged in respective regions separated by the plurality of gate lines and the plurality of source lines, the lower electrodes being connected to the common lines and composed of a transparent conductive material, upper electrodes arranged on surfaces of the respective lower electrodes with an insulating film provided between the upper electrode and the lower electrode, each of the upper electrodes having a plurality of slits arranged in parallel with one another, the gate lines, the common lines, the source lines, the thin-film transistors, the lower electrodes, and upper electrodes being arranged on one of the pair of substrates, a liquid crystal layer arranged between the pair of substrates and driven by an electric field produced between the lower electrodes and the upper electrodes, and first conductive material layers arranged on surfaces of the common lines at intersections of the source lines and the common lines. | 04-02-2009 |
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| 20110199685 | OPTICAL DEVICE, SUN SCREENING APPARATUS, FITTING, WINDOW MATERIAL, AND METHOD OF PRODUCING OPTICAL DEVICE - An optical device includes a shaped layer, an optical function layer, and an embedding resin layer. The shaped layer has a structure forming a concave section. The optical function layer is formed on the structure, and partially reflects incident light. The embedding resin layer is made of energy beam curable resin, the embedding resin layer having a first layer having a first volume, and a second layer formed on the first layer, the second layer having a second volume, the concave section being filled with the first layer, a ratio of the second volume to the first volume being equal to or larger than 5%, the structure and the optical function layer being embedded in the embedding resin layer. In the optical device, at least one of the shaped layer and the embedding resin layer has light transmissive property, and an entrance surface for the incident light. | 08-18-2011 |
| 20110222145 | OPTICAL LAMINATED PRODUCT AND FITTING - An optical laminated product includes a first transmissive base member, a second transmissive base member, and a structured layer. The second transmissive base member faces the first transmissive base member. The structured layer is arranged between the first transmissive base member and the second transmissive base member, and configured to perform directional reflection of light which forms part of light passed through the second transmissive base member. | 09-15-2011 |
| 20110256350 | FUNCTIONAL LAMINATE AND FUNCTIONAL STRUCTURE - A functional laminate includes a functional layer including an inorganic layer formed in a predetermined three-dimensional shape, first and second resin layers disposed in close contact with two principal surfaces of the functional layer, respectively, and sandwiching the functional layer therebetween, and first and second supports disposed respectively in contact with one surface of the first resin layer on a side oppositely away from the other surface thereof, which is contacted with the functional layer, and with one surface of the second resin layer on a side oppositely away from the other surface thereof, which is contacted with the functional layer. The first and second supports have elastic moduli larger than those of the first and second resin layers. One of the first and second supports is omissible when the one support is replaced with an external support having an elastic modulus not smaller than that of the one support. | 10-20-2011 |
