| Patent application number | Description | Published |
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| 20080242105 | Semiconductor manufacturing apparatus, semiconductor wafer manufacturing method using this apparatus, and recording medium having program of this method recorded therein - Foreign particles are prevented from adhering to a semiconductor wafer in a semiconductor manufacturing apparatus including (a) a hot plate which heats a semiconductor wafer to increase its temperature and which has a suction/discharge hole through which a negative pressure is supplied to suck and hold said semiconductor wafer at a rear surface thereof, and through which a gas is ejected to control the increase in temperature of said semiconductor wafer; and (b) a film forming section which forms a film used for production of a semiconductor device on a front surface of the semiconductor wafer, wherein the gas is ejected from the suction/discharge hole when the hot plate is placed on the film forming section and the hot plate does not hold the semiconductor wafer. | 10-02-2008 |
| 20090142907 | SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - The present invention provides means for making appropriate a preheat condition at a sapphire substrate preheating step and thereby smoothing sucking and holding of a sapphire substrate. The means includes a hot plate for heating up a sapphire substrate in the atmosphere, support portions for supporting the sapphire substrate with a back surface thereof being opposite to the hot plate and a predetermined spacing being defined therebetween, and a jet hole provided in the hot plate and for jetting gas toward a central part of the sapphire substrate. When the sapphire substrate is preheated by the hot plate, a preheat condition for the sapphire substrate is set assuming that the predetermined spacing is 1 mm or less and the jet amount of the gas from the jet hole is 20 L/min or more. An end condition for the preheat is set as the time when the temperature of the central part of the sapphire substrate becomes lower 65° C. or more than that of an outer peripheral edge portion thereof. | 06-04-2009 |
| 20100323528 | Semiconductor manufacturing apparatus and method for manufacturing a semiconductor - Provided are a semiconductor manufacturing apparatus and method, capable of reliably and rapidly transporting a heated semiconductor wafer. the apparatus is provided for transporting a semiconductor wafer, which has been processed by desired treatment (for example, film formation) and is held by a susceptor equipped with a heater, to the outside by a transport arm which holds the semiconductor wafer by suction, by moving the susceptor to a certain position above a top of a wafer waiting stage and introducing the semiconductor wafer held by the susceptor onto the top of the wafer waiting stage. Then, the susceptor present on the top of the wafer waiting stage is moved in a horizontal direction. After a certain cooling time, the transport arm holds the semiconductor wafer placed on the wafer waiting stage by suction and transports the semiconductor wafer to outside. | 12-23-2010 |
| Patent application number | Description | Published |
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| 20080218800 | IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND COMPUTER PROGRAM PRODUCT - A document detecting unit detects a document from color image data of a plurality of rectangular areas at a specific position on a scanning plate, to determine a document size in a main-scanning direction. An average-value calculating unit calculates an average value of each component of the color image data in a rectangular area. A binarizing unit binarizes the average value calculated by the average-value calculating unit. A determining unit determines a presence of the document based on a result obtained by the binarizing unit. | 09-11-2008 |
| 20090109496 | IMAGE READING DEVICE AND IMAGE FORMING DEVICE - In an image reading device, a reading unit scans first rectangle regions located within a maximum reading area equivalent to a maximum size of a document that can be scanned and acquires image data from the first rectangle regions. A transporting unit moves the reading unit to the first rectangle regions in a direction of movement opposite to a direction of movement in normal document reading. A document size judging unit detects whether a document exists in each first rectangle region based on the image data acquired by the reading unit and a predetermined threshold, so that a size of the document is judged. The reading unit is arranged to scan second rectangle regions located outside the maximum reading area, the second rectangles being different from the first rectangle regions, and acquire image data from the second rectangle regions. | 04-30-2009 |
| 20100110499 | IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD - An image processing apparatus includes an auto document feeder, and can simultaneously scans both sides of an original at a fixed scan position during one-time original feed. The image processing apparatus further includes a first scanning unit that scans a front side of the original in a single-sided scan and a double-sided scan; and a second scanning unit that scans a back side of the original in the double-sided scan. In the double-sided scan, the first scanning unit and the second scanning unit scan the original by using the same scaling method. The first scanning unit uses different scaling methods between the single-sided scan and the double-sided scan based on an original scan condition. | 05-06-2010 |
| 20100277777 | IMAGE PROCESSING APPARATUS AND IMAGE PROCESSING METHOD - An image processing apparatus includes a reading speed changing unit to change a reading resolution of a manuscript in a vertical direction by changing a carrier linear speed of the manuscript or a moving speed of a reading carriage; a resolution changing unit to change a resolution in the vertical direction of image data of which reading resolution is changed; and a resolution instruction unit to calculate a threshold of a required resolution of an image to determine instruction contents for the reading speed changing unit and the resolution changing unit, based on a data size drawn from a maximum readout size of the manuscript in a main scanning direction and information to specify a pixel and data transfer capability of a data bus, and to provide a resolution for the reading speed changing unit and the resolution changing unit according to the calculated threshold of the required resolution. | 11-04-2010 |
