| Patent application number | Description | Published |
|---|
| 20090064783 | INERTIAL FORCE SENSOR - An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes. | 03-12-2009 |
| 20090120187 | INERTIAL FORCE SENSOR - An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming. | 05-14-2009 |
| 20090183569 | COMBINED SENSOR - A combined detection element ( | 07-23-2009 |
| 20090266163 | SENSOR - A sensor includes detecting element ( | 10-29-2009 |
| 20090320594 | INERTIA FORCE SENSOR - An inertia force sensor includes a detection element having two orthogonal arms each formed by connecting one first arm orthogonally to two second arms; a support portion for supporting the two first arms; and two fixing arms connected at one end thereof to the support portion and fixed at the other end thereof to a mounting substrate. The second arms include opposing portions formed by bending the second arms to face the main portions thereof. The second arms are connected at their ends to weight parts, which include recesses to which the ends of the second arms are connected. | 12-31-2009 |
| 20100071468 | INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE - An inertia force sensor includes a detection element having an acceleration detection section ( | 03-25-2010 |
| 20100229645 | INERTIA FORCE SENSOR - Inertial force sensor includes detecting element that detects inertial force. Detecting element includes: two first orthogonal arms each having first arm and second arm that are connected to each other in a substantially orthogonal direction; support portion that supports two first arms; fixing arms; and weights. Second arms include: bent portions; facing portions that are bent at bent portions so as to face second arms; driving electrodes that are formed in two facing portions facing each other, and drive and vibrate facing portions; and detection electrodes that are formed in the other two facing portions facing each other, and detect the distortion of facing portions. According to this structure, it is possible to achieve small inertial force sensor capable of detecting a plurality of different inertial forces and inertial forces acting on a plurality of detection axes. | 09-16-2010 |
| 20110203371 | ANGULAR VELOCITY SENSOR - An angular velocity sensor comprising a fixed part, a weight coupled with the fixed part via a flexible part having a bending part, a first electrode disposed outside the bending part, and a second electrode disposed inside the bending part, in which the first electrode and the second electrode have an upper electrode and a lower electrode interposed by a piezoelectric layer, respectively, and the width of the first electrode is smaller than the width of the second electrode, and the difference of the amounts of electric charges generated at the first electrode and the second electrode can be suppressed thereby improving the accuracy of detection. | 08-25-2011 |
