| Patent application number | Description | Published |
|---|
| 20080212162 | Method for aligning die to substrate - A method for aligning a micro-mirror device die having a plurality of micro-mirror devices formed on a semiconductor substrate and fixing the micro-mirror device die on the semiconductor substrate can be provided. The method comprises a first alignment step of aligning a first guide portion of the micro-mirror device die and a second guide portion of the package substrate and a fixing step of fixing the micro-mirror device die on the package substrate in a position aligned by the first alignment step using the first and second guide portions. | 09-04-2008 |
| 20080218458 | Color display system - A color display device including: at least one spatial light modulation element forming a display picture by modulated light obtained by modulating illumination light, a color sequential light generation device changing in a time series the illumination light or the modulated light into multiple groups of different color lights in one frame of a display period of the display picture, a control device controlling the spatial light modulator, and a color sequential light generation device based on the input picture data. The control device controls the spatial light modulator and the color sequential light generation device to change the ratio of the display time of each color of the reflected light time-shared in the display period of the frame depending on the character and/or the set value of the input picture data. | 09-11-2008 |
| 20080218537 | Color display system - A color display device including: at least one spatial light modulation element forming a display picture by modulated light obtained by modulating illumination light, a color sequential light generation device changing in a time series the illumination light or the modulated light into multiple groups of different color lights in one frame of a display period of the display picture, a control device controlling the spatial light modulator, and a color sequential light generation device based on the input picture data. The control device controls the spatial light modulator and the color sequential light generation device to change the ratio of the display time of each color of the reflected light time-shared in the display period of the frame depending on the character and/or the set value of the input picture data. | 09-11-2008 |
| 20080239454 | Mirror device - A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure. | 10-02-2008 |
| 20080246782 | Color display system - A color display device including: at least one spatial light modulation element forming a display picture by modulated light obtained by modulating illumination light, a color sequential light generation device changing in a time series the illumination light or the modulated light into multiple groups of different color lights in one frame of a display period of the display picture, a control device controlling the spatial light modulator, and a color sequential light generation device based on the input picture data. The control device controls the spatial light modulator and the color sequential light generation device to change the ratio of the display time of each color of the reflected light time-shared in the display period of the frame depending on the character and/or the set value of the input picture data. | 10-09-2008 |
| 20080285111 | Mirror device - A mirror device, comprising: a mirror; an electrode which is placed on a substrate and on which surface a cavity is formed; and a hinge placed between the mirror and electrode, wherein the hinge is connected to the cavity of the electrode. | 11-20-2008 |
| 20080285112 | Mirror device - A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof. | 11-20-2008 |
| 20080291524 | Mirror device - A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the flat part is placed between the flat part and the mirror. | 11-27-2008 |
| 20090008669 | Package for micromirror device - The present invention discloses a mirror device that includes a mirror element which further comprising an elastic hinge and a mirror and which modulates incident light emitted from a light source, a device substrate on which a drive circuit for driving the mirror element is placed, a package substrate which is made of transparent glass or a silicon material and on which the device substrate is placed, a metallic thermal transfer path connected to the device substrate, and a cover glass connected to the package substrate so that the device substrate is covered. | 01-08-2009 |
| 20090009732 | Projection display system using laser light source - The present invention provides a projection apparatus that includes a mirror element and a drive circuit for driving a laser light source for projecting an illumination light. The projection apparatus further includes mirror device for modulating the illumination light and a projection lens for projecting the modulated light from the mirror element. The mirror device is disposed on a device substrate and packaged in a package substrate made of a transparent silicon material with a metallic thermal transfer path connected to the device substrate and a cover glass covering the package substrate. The distance between the mirror and the bottom surface of the cover glass is larger than the focal length of the projection lens. | 01-08-2009 |
| 20090009851 | Projection apparatus with coherent light source - The present invention discloses a projection apparatus comprising: a light source for emitting illumination light; a mirror device comprising a plurality of mirrors for generating an image by reflecting the illumination light toward a projecting direction by means of a deflecting operation; and a projection optical system which is placed in the optical axis of reflection light in the projecting direction of the illumination light incident to the mirror device and which projects the reflection light, wherein the optical axis of the illumination light incident to the mirror device and the optical axis of the reflection light in the projecting direction forms an angle that is larger than the expansion angle α of the flux of the illumination light that satisfies NA=n*sin α, where NA is the numerical aperture of the flux of the illumination light, and n is the reflectance. | 01-08-2009 |
| 20090103053 | Projection apparatus comprising spatial light modulator - The present invention provides a projection apparatus, comprising: a light source; a plurality of spatial light modulators each comprising a micromirror for deflecting and reflecting an incident light emitted from the light source in directions between a first direction and a second direction different from the first direction, and all angles between the first and second directions; and an optical prism comprising surfaces (i), (ii), (iii) and (iv), where the surface (i) is a first optical surface with at least two lights of different frequencies are projected thereto, the surface (ii) is a second optical surface for ejecting the two lights incident to the first optical surface therefrom and a modulation light modulated by the spatial light modulator and is incident thereto, the surface (iii) is a synthesis surface for synthesizing the modulation lights modulated by a plurality of spatial light modulators into a same light path, and the surface (iv) is an ejection surface for ejecting the synthesized light synthesized on the synthesis surface, wherein the locus of deflection of the deflection light is approximately parallel to the synthesis surface when the aforementioned locus of deflection is projected onto a flat surface perpendicular to the synthesis surface. | 04-23-2009 |
| 20090103054 | Projection apparatus comprising spatial light modulator - The present invention provides a projection apparatus, comprising: a light source; a plurality of spatial light modulators each comprising a micromirror for modulating and deflecting an incident light emitted from the light source in an intermediate direction between a first and a second directions and all angles between the first and second directions The projection apparatus further includes a projection optical system for projecting a modulation light modulated by the spatial light modulator The projection apparatus further includes a first joinder prism comprising a first optical surface with at least two of the incident lights with different frequencies projected thereto, a second optical surface for ejecting the incident light incident from the first optical surface and for projecting the modulation light thereto, and a selective reflection surface for reflecting the incident light incident from the first optical surface and transmitting the modulation light. The projection apparatus further includes and a second joinder prism comprising a third optical surface with the modulation light ejected from the first joinder prism transmitted thereto, a synthesis surface for synthesizing the modulation lights with different frequencies incident from the third optical surface transmitted in the same light path, and an ejection surface disposed at a position approximately opposite to the projection optical system for ejecting a synthesized light synthesized on the synthesis surface, wherein the first optical surface is approximately perpendicular to the synthesis surface. | 04-23-2009 |
| 20090115917 | Speckle reduction method - A projection apparatus comprising a light source for projecting an illumination light through an illumination optical system to a spatial light modulator (SLM) for modulating the illumination light for generating and transmitting an image projection light to an image projection surface through a projection optical system to display an image. The projection apparatus further includes an image process unit for receiving and analyzing an input image data; and the image process unit applies a conversion process to a signal related to the input image data to generate different control patterns for a plurality of adjacent pixel elements included in the SLM for a predetermined period during at least one frame period to reproduce a gradation of the pixel whereby each of the plurality of adjacent pixel elements has a gradation of approximately a same level. | 05-07-2009 |
| 20090128888 | Mirror array device - The present invention provides a mirror array device, comprising: a plurality of mirror elements each comprising a hinge and a deflectable mirror supported by the hinge; a memory cell for controlling the mirror element; a bit line for transmitting a data signal to the memory cell; a word line for controlling a connection between the bit line and the memory cell; a plate line for controlling the memory cell. Each of the mirror elements further comprises a first address electrode controlled by the word line to connect to the memory cell. Each of the mirror elements further comprises a second address electrode electrically connected to the plate line. | 05-21-2009 |
| 20090135313 | Method for projecting colored video image and system thereof - The present invention provides a method for projecting a colored video image, characterized in that a color-light generation device for generating and projecting at least two light fluxes having at least two different colors wherein the different colors are controlled to change in a time division manner; at least two spatial light modulators receiving and applying input video image date for modulating the light fluxes for generating modulated lights from each of the spatial light modulators; an optical device for combining the modulated lights from the spatial light modulators into a combined modulated light and projecting the combined modulated light; and a controller for controlling the color-light generation device and the spatial light modulators, wherein the controller controls and adjusts a ratio of a modulation period of each color synchronized with a change of the colors of the light fluxes in the time division manner. | 05-28-2009 |
| 20090149004 | Micromirror manufacturing method - A micro-mirror manufacturing method for dividing a plurality of micro-mirror devices each having at least one mirror, formed on a semiconductor wafer into individual micro-mirror devices can be provided. The manufacturing method comprises a step of depositing an inorganic protection layer on the mirror before separating the micro-mirror devices from the wafer and a step of removing the inorganic protection layer after separating the micro-mirror devices from the wafer. | 06-11-2009 |
| 20090153579 | Speckle reduction method - A projection apparatus includes a laser light source for projecting an illumination light to a plurality of spatial light modulators (SLMs) through an illumination optical system. The projection apparatus further comprises an image position change unit for changing a position of an image projected on a projection surface by projecting a modulation light from at least one said plurality of SLMs; and a control unit for controlling the SLMs and the image position change unit. | 06-18-2009 |
| 20090161077 | PROJECTION DISPLAY SYSTEM FOR MODULATING LIGHT BEAMS FROM PLURAL LASER LIGHT SOURCES - The present invention provides a projection display system comprising: illumination lights of plural colors emitted from plural laser light sources; an illumination optical system for illuminating the illumination light of at least one of the colors in an beam axis or in an illumination range, either of which is different from the other colors; a deflection mirror device for modulating the illumination lights of respective colors in the same deflection angle, with the modulation of each color being performed in sequence within one frame; a projection optical system for projecting the reflection light of the illumination light from the deflection mirror device; and a laser light source control circuit for controlling the intensity of the illumination light of each color, wherein the laser light source control circuit performs adjustment so that the ratio of intensity of each of the colors is a prescribed ratio. | 06-25-2009 |
| 20090161193 | Projection display system for modulating light beams from plural laser light sources - The present invention provides a projection display system, comprising: plural laser light sources; an illumination optical system for illuminating, in different beam axes, light beams emitted from the individual laser light sources; a deflection mirror device, constituted by plural mirror elements, for modulating the light beams illuminated by the illumination optical system; and a projection optical system for projecting a reflection light from the deflection mirror device illuminated by the light beams. | 06-25-2009 |
| 20090161198 | Micro mirror device - The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance. | 06-25-2009 |
| 20090161199 | Mircromirror device having a vertical hinge - A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described. | 06-25-2009 |
| 20090174810 | Video display system - A video display system includes: an image processing unit receives continuously an input video signal including an input frame signal for generating an output video signal comprising an output frame signal having a higher frame rate than the input frame signal; and a spatial light modulator (SLM) applies the output frame signal for modulating an illumination light, wherein an amount of data in the output frame signal is smaller than the amount of data in the input frame signal. | 07-09-2009 |
| 20090180171 | Projection apparatus using micromirror device - A projection apparatus comprising a micromirror device for reflecting and modulating a light emitted from a light source to project a display an image on a display screen. The projection apparatus further includes a projection optical system comprises an adjustable aperture for adjusting an aperture ratio to control an amount of output light reflected from the micromirror device to the image display screen. | 07-16-2009 |
| 20090185257 | Mirror device having vertical hinge - The present invention provides a mirror device, comprising: a substrate; a mirror disposed approximately in parallel to the substrate above the substrate; and a hinge supported on and extended approximately perpendicularly from the substrate for supporting the mirror, wherein the hinge is connected to the mirror with a first edge part of the hinge buried in the mirror. | 07-23-2009 |
| 20090201568 | Three states of micro mirror device - The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states. | 08-13-2009 |
| 20090206052 | Method for manufacturing a mirror device by means of a plurality of sacrificial layers - A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers. | 08-20-2009 |
| 20090207474 | Micro mirror device - The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode. | 08-20-2009 |
| 20090231667 | Mirror device with an anti-stiction layer - A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate. | 09-17-2009 |
| 20090231668 | Mirror device with an anti-stiction layer - A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate. | 09-17-2009 |
| 20090257110 | Mirror device comprising drive electrode equipped with stopper function - The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for deflectably supporting the mirror; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror. | 10-15-2009 |
| 20090273825 | Mirror device comprising micromirrors possessing a specific natural oscillation frequency - The present invention aims at providing a mirror device, comprising a plurality of mirror elements, wherein each of the mirror elements comprises a deflectable mirror, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies: | 11-05-2009 |
| 20100046061 | Mems package having inclined surface - An image projection system comprises a micro-electromechanical system (MEMS) package wherein the MEMS package further includes: a first substrate and a second substrate joined together at a joinder surface applied with a ponder material thereon to provide an internal space to contain and package a MEMS device therein, wherein at least one of the first and second substrate is configured to have a an inclined surface near the joinder surface. | 02-25-2010 |
| 20100046062 | Mirror device and MEMS device comprising layered electrode - The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode. | 02-25-2010 |
| 20100067096 | Structure body electrically connected via semiconductor material layer - The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer. | 03-18-2010 |
| 20100128335 | Mirror device - A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof. | 05-27-2010 |
| 20100284057 | Mircromirror device having a vertical hinge - A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device. | 11-11-2010 |
| 20110058247 | Mirror device with an anti-stiction layer - A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate. | 03-10-2011 |
