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Hiroshi Tomita
Hiroshi Tomita, Kanagawa-Ken JP
| Patent application number | Description | Published |
|---|---|---|
| 20090004052 | Oxidation protection apparatus and method for chemical liquid - An oxidation protection method for chemical liquid includes: supplying inert gas into a circulating bath containing the chemical liquid to make pressure inside the circulating bath higher than pressure outside the circulating bath; supplying the chemical liquid from the circulating bath to a chamber receiving a wafer; supplying inert gas into the chamber to make pressure inside the chamber higher than pressure outside the chamber; and returning the chemical liquid after washing from the chamber to the circulating bath. An oxidation protection method for chemical liquid includes: removing dissolved oxygen in the chemical liquid; supplying the chemical liquid to a chamber receiving a wafer; and returning the chemical liquid after washing from the chamber to a circulating bath. | 01-01-2009 |
| 20110061684 | CLEANING METHOD FOR SEMICONDUCTOR WAFER - A cleaning method for a semiconductor wafer with cleaning liquid comprising: | 03-17-2011 |
Hiroshi Tomita, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20090317980 | FILTER, SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD - A filter connectable to an external circulating system, the circulating system being included by a substrate treatment apparatus which etches a substrate with an H | 12-24-2009 |
| 20100267233 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A metal member layer on a silicon member layer is patterned. A sidewall film is formed on a surface of the metal member layer. The silicon member layer is patterned to form a structure including the silicon member layer and the metal member layer, the surface of which is covered with the sidewall film. After the surface of the structure is cleaned, a water-repellent protective film is formed on the surface of the structure before the surface of the structure is dried. | 10-21-2010 |
| 20110129219 | LIGHT MULTIPLEXER - One side surface of a diffraction grating is securely held by a holder, and further, the holder is securely supported on a substrate by a supporter in such a manner that the diffraction grating held by the holder is not brought into contact with the substrate. In this manner, the diffraction grating is fixed only onto one side surface to the supporter via the holder, and further, the diffraction grating is not brought into contact with the substrate. Therefore, the lower portion of the supporter is displaced by heat generated in the substrate, however, the displacement of the supporter cannot adversely influence directly on the diffraction grating since the holder is interposed between the displaced portion and the diffraction grating. | 06-02-2011 |
Hiroshi Tomita, Koshi City JP
| Patent application number | Description | Published |
|---|---|---|
| 20100211215 | Substrate transfer apparatus and substrate treatment system - The present invention is a transfer apparatus for a substrate, including a substrate housing container housing a substrate therein and having a transfer-in/out port for the substrate formed in a side surface thereof; a gas jet unit jetting a predetermined gas toward a rear surface of the substrate in the substrate housing container; and a control unit regulating a supply amount of the predetermined gas supplied from the gas jet unit to control the substrate in the substrate housing container to a predetermined height. | 08-19-2010 |
Hiroshi Tomita, Kikuchi-Gun JP
| Patent application number | Description | Published |
|---|---|---|
| 20100047702 | RESIST PATTERN FORMING METHOD - A resist pattern forming method using a coating and developing apparatus and an aligner being connected thereto which are controlled to form a resist film on a surface of a substrate with a base film and a base pattern formed thereon, followed by inspecting at least one of a plurality of measurement items selected from: reflection ratio and film thickness of the base film and the resist film, line width after a development, an accuracy that the base pattern matches with a resist pattern, a defect on the surface after the development, etc. A parameter subject to amendment is selected based on corresponding data of each measurement item, such as the film thickness of the resist and the line width after the development, and amendment of the parameter is performed. This results in a reduced workload of an operator, and the appropriate amendment can be performed. | 02-25-2010 |
Hiroshi Tomita, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090008381 | TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, TEMPERATURE SETTING APPARATUS OF THERMAL PROCESSING PLATE, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM THEREON - Temperature setting of a thermal plate is performed so that the line width of a resist pattern is uniformly formed within a wafer. The thermal plate of a PEB unit is divided into a plurality of thermal plate regions so that the temperature can be set for each of the thermal plate regions. A temperature correction value for adjusting the temperature within the wafer mounted on the thermal plate is set for each of the thermal plate regions of the thermal plate. The temperature correction value for each of the thermal plate regions of the thermal plate is set after calculation by a calculation model created from a correlation between a line width of the resist pattern formed by thermal processing on the thermal plate and the temperature correction value. The calculation model M calculates the temperature correction value to make the line width uniform within the wafer, based on a line width measured value of the resist pattern. | 01-08-2009 |
| 20090067780 | WAVELENGTH SELECTIVE SWITCH - In a wavelength selective switch according to the present invention, an isolator is disposed between a lens array and a first lens. The isolator includes an isolator element and a transmitting means. The isolator is disposed so that the isolator element is on light paths of input lights and that the transmitting element is on a light path of an output light. The isolator element is shared among the light paths of the plurality of input lights. The isolator element intercepts lights propagating in an opposite direction to the input lights and prevents coupling of the lights to input ports. The transmitting element transmits the output light and couples it to an output port. | 03-12-2009 |
| 20090076763 | METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEAT PROCESSING APPARATUS, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON - In the present invention, a heating plate is divided into a plurality of regions. Integrated values of temperature fluctuations in each of the regions when a substrate is mounted on the heating plate in a normal state without extraneous matter are collected. A Mahalanobis reference space in the discriminant analysis method is formed based on the integrated values at normal time. During actual heat processing, an integrated value of temperature fluctuation of each of the regions when the substrate is mounted on the heating plate is then detected, so that a Mahalanobis distance about the integrated value during the processing is calculated based on the integrated value during the processing and the Mahalanobis reference space obtained in advance. Whether or not there is extraneous matter on the heating plate is determined by comparing the calculated Mahalanobis distance to a predetermined threshold value. | 03-19-2009 |
| 20090115179 | Pretensioner and seat belt apparatus - A pretensioner | 05-07-2009 |
| 20100025977 | Passenger protection device - The pretensioner is configured to provide a compact and less expensive pretensioner for improving the work assembly efficiency while effectively transmitting the pressing force of plural force transmission members to the ring gear. Plural balls inside the pipe are pressed under the pressure of gas from the gas generator in an emergency. The first ball presses the lever, and the balls other than the first ball sequentially press the subsequent levers such that the ring gear rotates to move rightward. The internal teeth of the ring gear are meshed with external teeth of the pinion attached to the rotary shaft at the side of the spool. The pinion then rotates to allow the spool to retract the seatbelt. The first ball abuts on the ball stopper portion of the pipe to stop the rest of the balls such that most of the balls are located in the circular movement path. | 02-04-2010 |
Hiroshi Tomita, Anjyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090207044 | Parking lot congested state determination device, parking lot congested state determination method, and computer program - In a case where it is determined that a vehicle is in an unparked state within a parking lot for at least a specified time, the parking lot where the vehicle is currently located is determined to be in a congested state, and information that pertains to the parking lot that is determined to be in a congested state is transmitted to a probe center as probe information. The probe center, based on the received probe information, creates parking lot guidance information to provide guidance on the parking lot that is in a congested state, then distributes the created parking lot guidance information to vehicles that are located in the vicinity of the parking lot that is determined to be in a congested state. A navigation device in a vehicle to which the parking lot guidance information is distributed provides guidance that pertains to the parking lot that is in a congested state. | 08-20-2009 |
| 20090248296 | DRIVING SUPPORT SYSTEM, DRIVING SUPPORT METHOD AND COMPUTER PROGRAM - When a vehicle enters a facility off a road on which the vehicle is traveling, information pertaining to an entry direction into the facility is sent to a probe center as probe information, and a current driving level of the host vehicle is identified. Meanwhile, the probe center that received the probe information calculates a right-turn entry percentage for facilities based upon the received probe information, and sets an entry difficulty level of the facilities based upon the calculated right-turn entry percentage. A vehicle to which information pertaining to the entry difficulty level of a set facility was distributed from the probe center is structured so as to perform driving support based upon the information pertaining to the entry difficulty level of the facility. | 10-01-2009 |
Hiroshi Tomita, Koshi-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090078695 | TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM THEREON, AND TEMPERATURE SETTING APPARATUS FOR THERMAL PROCESSING PLATE - A thermal plate of a PEB unit is divided into a plurality of thermal plate regions, and a temperature is settable for each of the thermal plate regions. A temperature correction value for adjusting the temperature within the thermal plate is settable for each of the thermal plate regions of the thermal plate. The line widths within the substrate for which a photolithography process has been finished are measured. The in-plane tendency of the measured line widths is decomposed into a plurality of in-plane tendency components using a Zernike polynomial. Then, in-plane tendency components improvable by setting the temperature correction values are extracted from the calculated plurality of in-plane tendency components and added to calculate an improvable in-plane tendency in the measured line widths. Then, the improvable in-plane tendency is subtracted from the in-plane tendency Z of the current processing states to calculate an after-improvement in-plane tendency. | 03-26-2009 |
| 20090082911 | TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-READABLE RECORDING MEDIUM RECORDING GPROGRAM THEREON, AND TEMPERATURE SETTING APPARATUS FOR THERMAL PROCESSING PLATE - In the present invention, a thermal plate is divided into a plurality of thermal plate regions, and a temperature is settable for each of the thermal plate regions. A temperature correction value for adjusting the temperature within the thermal plate is settable for each of the thermal plate regions of the thermal plate. The line widths within the wafer for which the photolithography process has been finished are first measured, and Zernike coefficients of a Zernike polynomial indicating a plurality of in-plane tendency components are calculated from the measured values of the line widths within the wafer. Then, the temperature correction values for the regions of the thermal plate to bring the calculated Zernike coefficients close to 0 are calculated using a calculation model indicating a correlation between change amounts of the Zernike coefficients and the temperature correction values. The temperature of each of the regions of the thermal plate is set based on each of the calculated temperature correction values. | 03-26-2009 |
| 20090226077 | DEFECT INSPECTION METHOD AND COMPUTER-READABLE STORAGE MEDIUM - The present invention includes an illuminance adjustment step of setting an optimum illuminance of the illumination; and a defect inspection step of picking up the image of the substrate illuminated with the illumination at the optimum illuminance, wherein the illuminance adjustment step has: a first step of applying illuminations at different illuminances to a plurality of measurement regions on a front surface of the substrate and picking up an image of each of the measurement regions, while moving the substrate; a second step of making a luminance of the picked up image of each of the measurement regions into a histogram to find a reference luminance where an integral value from a maximum luminance side of the histogram is a predetermined value; and a third step of calculating a correlation between each of the reference luminances and the illuminance, and setting based on the correlation an illuminance at which the reference luminance coincides with a predetermined luminance, as the optimum illuminance. | 09-10-2009 |
Hiroshi Tomita, Foster City, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090194592 | Color Barcode Producing Method and Apparatus, Color Barcode Reading Method and Apparatus and Color Barcode Reproducing Method and Apparatus - A color barcode can record much more amount of information than black white barcode. However, the problem of the color barcode is that it is easy to lose integrity or authenticity in printing and copy generation. This invention provides an apparatus and a method to keep the integrity or authenticity of the color barcode. Such is accomplished by the color reference portion of the color barcode including reference color tiles filled with colors which are used in a data portion of the color barcode and an apparatus and a method for producing, reproducing and reading such color barcode. | 08-06-2009 |
Hiroshi Tomita, Kumamoto JP
| Patent application number | Description | Published |
|---|---|---|
| 20090047586 | SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTRATE-PROCESSING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDED WITH SUCH PROGRAM - A pattern forming system | 02-19-2009 |
| 20090104548 | SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTRATE-PROCESSING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDED WITH SUCH PROGRAM - A pattern forming system | 04-23-2009 |
| 20090162759 | SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING METHOD, SUBSTRATE-PROCESSING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDED WITH SUCH PROGRAM - A pattern forming system | 06-25-2009 |
Hiroshi Tomita, Okazaki-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090105938 | Navigation apparatuses, methods, and programs - Navigation apparatuses, methods, and programs store path information for a path each time the path is traveled, the path being a segment of the guidance route from a branch point to a junction. The apparatuses, methods, and programs store detour route information for the detour route each time the detour route is traveled. The apparatuses, methods, and programs receive current traffic conditions from an external system and read out, when arriving at the branch point, path information having a same or similar stored traffic condition as a current path traffic condition and detour route information having a same or similar stored traffic condition as a current detour route traffic condition. The apparatuses, methods, and programs determine a difference between a required time for traveling along the path and a required time for traveling along the detour route and output guidance information based on the determined difference. | 04-23-2009 |
Hiroshi Tomita, Anjo Aichi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090024322 | Navigation System for a Vehicle - When a vehicle is located within a coverage of a radio station, a navigation system for the vehicle outputs audio guidance on the basis of received traffic information, provided that the traffic information is to be output under a predetermined audio output condition according to a congested area or stores the traffic information in a storage section, provided that the traffic information is not under the predetermined audio output condition according to the congested area. Then, when the vehicle is located out of the coverage of the radio station, the navigation for the vehicle outputs traffic information stored in a storage section as audio guidance. | 01-22-2009 |
Hiroshi Tomita, Palo Alto, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080265015 | Systems and methods for preserving and maintaining document integrity - Systems and methods consistent with embodiments of the present invention provide for a method for preserving and maintaining document integrity. In some methods for preserving and maintaining document integrity, the contents of a document, or contents of a document layer may be encoded into a machine-readable form. In some embodiments, the encoded information may be represented using a 2-dimensional bar code. In some methods for preserving and maintaining document integrity, the machine-readable code is printed along with contents of the document based on space available in the document. In some embodiments, a printed document containing the machine-readable code may be scanned and digitized, and content extracted from the scanned data. In some embodiments, the machine-readable code printed on the document is used to recreate layer data from the printed document. | 10-30-2008 |
| 20080265042 | Systems and Methods for Preserving and Maintaining Document Integrity - Systems and methods consistent with embodiments of the present invention provide for a method for preserving and maintaining document integrity. In some methods for preserving and maintaining document integrity, the contents of a document, or contents of a document layer may be encoded into a machine-readable form. In some embodiments, the encoded information may be represented using a 2-dimensional bar code. In some methods for preserving and maintaining document integrity, the machine-readable code is printed along with contents of the document based on space available in the document. In some embodiments, a printed document containing the machine-readable code may be scanned and digitized, and content extracted from the scanned data. In some embodiments, the machine-readable code printed on the document is used to recreate layer data from the printed document. | 10-30-2008 |
Hiroshi Tomita, Palo Atlo, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080265030 | Systems and Methods for Preserving and Maintaining Document Integrity - Systems and methods consistent with embodiments of the present invention provide for a method for preserving and maintaining document integrity. In some methods for preserving and maintaining document integrity, the contents of a document, or contents of a document layer may be encoded into a machine-readable form. In some embodiments, the encoded information may be represented using a 2-dimensional bar code. In some methods for preserving and maintaining document integrity, the machine-readable code is printed along with contents of the document based on space available in the document. In some embodiments, a printed document containing the machine-readable code may be scanned and digitized, and content extracted from the scanned data. In some embodiments, the machine-readable code printed on the document is used to recreate layer data from the printed document. | 10-30-2008 |
Hiroshi Tomita, Kasugai-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080223455 | Gas supply unit - To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve. | 09-18-2008 |
Hiroshi Tomita, Irvine, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090086273 | METHOD FOR COMPENSATING FOR COLOR VARIATIONS ACROSS A PRINTED PAGE USING MULTIPLE-PASS PRINTING - A method for compensating for color variations introduced by printer hardware limitations and other factors is described. First, for each printer model or each individual printer, the extent of color variation throughout a printed page is determined. Based on this determination, each page is partitioned into a plurality of image areas. Then, in an actual printing process, the page of image is printed in a multi-pass process where each image area is printed in a separate pass. The digital image data is shifted and/or rotated for each pass, and the paper is shifted and/or rotated correspondingly, so that the different image areas printed in different passes form a complete image on the final printed page. From the standpoint of the pointer hardware, all passes involve printing the same area of a physical page, resulting in reduced color variation across the page. | 04-02-2009 |
| 20090086290 | METHOD FOR COMPENSATING FOR COLOR VARIATIONS ACROSS A PRINTED PAGE USING MULTIPLE COLOR PROFILES - A method for compensating for color variations introduced by printer hardware limitations and other factors is described. First, the extent of color variation throughout a printed page is determined. Based on this determination, each page is partitioned into a plurality of image areas. A color profile is generated for each image area. The partition and the multiple color profiles are stored in the printer. In an actual printing process, the page of image to be printed is divided into a plurality of image areas based on the paper size and the stored partition, and the respective stored color profiles for the image areas are retrieved and used to process the digital image for printing. | 04-02-2009 |