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| 20090191338 | Film-Deposition Apparatus and Film-Deposition Method - A film-deposition apparatus and a film-deposition method for forming a manganese film on a surface of an object to be processed by a CVD method are provided. The film-deposition apparatus for forming a manganese film on a surface of an object to be processed by a CVD method (Chemical Vapor Deposition method), the film-deposition apparatus comprises: a process vessel capable of being evacuated; a table on which the object to be processed can be placed, the table being disposed in the process vessel; and a source-gas supply part connected to the process vessel, the source-gas supply part being configured to supply, into the process vessel, a source gas including an organic metal material containing manganese or a metal complex material containing manganese. The film-deposition method for forming a manganese film on a surface of an object to be processed by a CVD method (Chemical Vapor Deposition method), the film-deposition method comprises the steps of: placing an object to be processed in an inside of a process vessel capable of being evacuated; and forming a manganese film on a surface of the object to be processed in the process vessel by the CVD method with the use of a source gas including an organic metal material containing manganese or a metal complex material containing manganese. | 07-30-2009 |
| 20110049718 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, ELECTRONIC INSTRUMENT, SEMICONDUCTOR MANUFACTURING APPARATUS, AND STORAGE MEDIUM - When a barrier film is formed on an exposed surface of an interlayer insulation film on a substrate, the interlayer insulation film having a recess formed therein, and a metal wiring to be electrically connected to a metal wiring in a lower layer is formed in the recess, a barrier film having an excellent step coverage can be formed and increase of a wiring resistance can be restrained. An oxide film on a surface of the lower copper wiring exposed to a bottom surface of the interlayer insulation film is reduced or edged so as to remove oxygen on the surface of the copper wiring. Then, by supplying an organic metal compound containing manganese and containing no oxygen, generation of manganese oxide as a self-forming barrier film is selectively allowed on an area containing oxygen, such as a sidewall of the recess and a surface of the interlayer insulation film, while generation of the manganese oxide is not allowed on the surface of the copper wiring. Thereafter, copper is embedded in the recess. | 03-03-2011 |
| 20110237066 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND STORAGE MEDIUM - The present invention is a method of manufacturing a semiconductor device comprising: forming a recess in an interlayer insulating film formed on a substrate surface, the recess being configured to be embedded with an upper conductive channel mainly made of copper to be electrically connected to a lower conductive channel; supplying a gas containing an organic compound of manganese, and forming a barrier layer made of a compound of manganese for preventing diffusion of copper to the interlayer insulating film, such that the barrier layer covers an exposed surface of the interlayer insulating film; after the formation of the barrier layer, supplying organic acid to the barrier layer in order to increase a ratio of manganese in the compound of manganese forming the barrier layer; after the supply of the organic acid, forming a seed layer mainly made of copper on a surface of the barrier layer; after the formation of the seed-layer, heating the substrate in order to separate out manganese from on the surface of the barrier layer or from in the barrier layer onto a surface of the seed layer; supplying a cleaning liquid to the seed layer in order to remove the manganese separated out on the surface of the seed layer by the heating; and after the supply of the cleaning liquid, forming the upper conductive channel mainly made of copper in the recess. | 09-29-2011 |
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| 20100210097 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - Provided is a manufacturing method of a semiconductor device including a gate insulating film which can be formed into a thin film and of which film composition is easy to be controlled. The manufacturing method includes: forming a manganese oxide film for serving as a gate insulating film on a semiconductor substrate, on which a transistor is formed; forming a conductive film for serving as a gate electrode on the manganese oxide film; and forming a gate electrode and a gate insulating film by processing the conductive film and the manganese oxide film. | 08-19-2010 |
| 20100233865 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD - Provided is a semiconductor device manufacturing method for a capacitor having a dielectric film which can be formed into a thin film, can be formed at a low temperature, and has a readily controllable property. The manufacturing method includes: forming an oxide film or an oxynitride film on a conductor for serving as one electrode of a capacitor; forming, on the oxide film or the oxynitride film, a manganese oxide film for serving as a dielectric film of the capacitor; and forming, on the manganese oxide film, a conductive film for serving as the other electrode of the capacitor. | 09-16-2010 |
| 20100323512 | METAL OXIDE FILM FORMATION METHOD AND APPARATUS - [Problems] There is provided a metal oxide film forming method capable of controlling a film thickness of a metal oxide even if the metal oxide is subject to a self-limited thickness. | 12-23-2010 |
| 20120122289 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD - Provided is a semiconductor device manufacturing method for a capacitor having a dielectric film which can be formed into a thin film, can be formed at a low temperature, and has a readily controllable property. The manufacturing method includes: forming, on a conductor for serving as one electrode of a capacitor, a manganese oxide film for serving as a dielectric film of the capacitor; and forming, on the manganese oxide film, a conductive film for serving as the other electrode of the capacitor. | 05-17-2012 |
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| 20080211207 | MOUNTING STRUCTURE FOR AIRBAG APPARATUS - In a mounting structure for an airbag apparatus ( | 09-04-2008 |
| 20090037067 | TRAVEL SPEED LIMITTING APPARATUS - A travel speed limiting apparatus including: a travel speed measurement device which measures a travel speed of a vehicle; a speed limit memory device which stores a speed limit set by an operator; a first driving force limit value calculation device which calculates a first driving force limit value based on a deviation of the travel speed from the speed limit; a requested driving force calculation device which calculates a requested driving force based on an operator's acceleration operation; and a second driving force limit value calculation device which calculates a second driving force limit value based on the requested driving force, wherein the driving force limiting device sets an eventual driving force limit value to the smaller of the first driving force limit value and the second driving force limit value, and controls the driving force of the vehicle to be less than the eventual driving force limit value. | 02-05-2009 |
| 20090201514 | POSITION DETECTION METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In this method, the relationship between the position of the target object in the optical-axis direction of the optical system and the evaluation value of the signal output from the image sensor is measured, and the position of a peak close to a reference focus position, which is selected if the evaluation value has a plurality of peaks in the measured relationship, is detected as the focus position. | 08-13-2009 |
| 20100097595 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - An apparatus includes a stage configured to move a substrate, an optical system configured to project an image of a pattern on an original onto the substrate, an alignment detection system configured to detect an image of an alignment mark formed on the substrate and measure a position of the alignment mark, and a focus detection system having an index mark and configured to measure a height of the substrate by projecting an image of the index mark onto the substrate. The stage includes an alignment measurement mark and a focus measurement mark that has a positional relationship with the alignment measurement mark. The alignment detection system measures a position of the alignment measurement mark. The focus detection system measures a position of the image of the index mark by projecting the image of the index mark onto the focus measurement mark. | 04-22-2010 |
| 20100233377 | IMPRINT APPARATUS AND METHOD - An imprint apparatus which includes an imprint head configured to hold a mold, and performs an imprint process including dispensing of a resin to a shot region on a substrate and pressing of the mold and the dispensed resin with each other, comprises a controller configured to control an order of the imprint process for a plurality of selected shot regions on the substrate, and a first dispenser and a second dispenser configured to dispense the resin, wherein the first dispenser is arranged on a side of a first direction with respect to the imprint head, and the second dispenser is arranged on a side of a second direction opposite to the first direction with respect to the imprint head. | 09-16-2010 |
| 20100268416 | VEHICLE GRADIENT ESTIMATING DEVICE AND VEHICLE TRAVELING CONTROL DEVICE - A vehicle gradient estimating device includes: a vehicle speed sensor which detects a traveling speed of a subject vehicle; an acceleration calculating unit which calculates an acceleration of the subject vehicle on the basis of the traveling speed; an engine load deceleration calculating unit which calculates a deceleration due to an engine load of the subject vehicle; an acceleration correcting unit which corrects the acceleration by using the deceleration; a brake fluid pressure detecting unit which detects a brake fluid pressure of the subject vehicle; and a first gradient estimating unit which estimates a gradient of a road being traveled of the subject vehicle, wherein the first gradient estimating unit estimates the gradient on the basis of a ratio between the brake fluid pressure and the acceleration corrected by the acceleration correcting unit. | 10-21-2010 |
| 20110141489 | MARK POSITION DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD - A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern. | 06-16-2011 |
| 20110147970 | IMPRINT APPARATUS AND PATTERN TRANSFER METHOD - An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process. | 06-23-2011 |
| 20110177249 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result. | 07-21-2011 |
| 20110236579 | IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold. | 09-29-2011 |
| 20110246042 | VEHICLE RUNNING CONTROL DEVICE - A vehicle running control device including: a vehicle speed sensor which detects an actual vehicle speed; a target vehicle speed setting unit; a target drive force calculation unit; a drive force control unit; a vehicle speed lowering allowance value setting unit; and a target drive force upper limit calculation unit. If the actual vehicle speed lowering amount with respect to the target vehicle speed is within the lowering allowance value, the target drive force calculation unit limits the target drive force to be not greater than the target drive force upper limit and the drive force control unit executes drive force control in accordance with the limited target drive force. | 10-06-2011 |
| 20110278768 | IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - An imprint apparatus includes a detector and an adjusting device. A second mark formed on a substrate includes a grating pattern having grating pitches in first and second directions which are respectively parallel to first and second axes which are parallel to a pattern surface of a mold and orthogonal to each other. A first mark formed on the mold includes a grating pattern having a grating pitch in the first direction. The first and second marks have different grating pitches in the first direction. The detector includes an image sensor, and an optical system which forms a moire fringe on an image sensing surface of the image sensor. The adjusting device adjusts, in a plane including the second axis and a third axis that is perpendicular to the first and second axes, an angle between the optical axis of the detector and the third axis. | 11-17-2011 |
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| 20100198548 | DIAGNOSTIC APPARATUS, DIAGNOSTIC METHOD AND TEST APPARATUS - There is provided a diagnostic apparatus for diagnosing a test apparatus including a plurality of test modules designed to test a device under test. The diagnostic apparatus includes a configuration storing section that stores thereon configuration information describing a type and a connection of each of the plurality of test modules, a generating section that generates a pattern file based on the configuration information, where the pattern file describes a diagnostic pattern used to diagnose each of the plurality of test modules, and a diagnosing section that causes each of the plurality of test modules to generate a diagnostic signal in accordance with a corresponding diagnostic pattern in order to diagnose the test module. | 08-05-2010 |
| 20100221204 | LIQUID COSMETIC - Provided is a liquid cosmetic comprising at least an inorganic pigment, a dispersant, a film forming agent and water, wherein the dispersant is a homopolymer or a copolymer obtained by polymerizing a raw material monomer of at least one compound selected from acrylic acid, methacrylic acid or (C | 09-02-2010 |
| 20110155754 | BOX BODY - A container that is capable of loading articles onto a cassette for containing articles and the like with high reproducibility and is suitably applicable to a paper-made refill, is provided with, as shown in FIG. | 06-30-2011 |
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| 20090202912 | ALL SOLID STATE SECONDARY BATTERY - This is to provide an all solid state secondary battery which can be produced by an industrially employable method capable of mass-production and has excellent secondary battery characteristics. | 08-13-2009 |
| 20100003592 | ALL SOLID STATE SECONDARY BATTERY - This is to provide an all solid state secondary battery which can be produced by an industrially employable method capable of mass-production and has excellent secondary battery characteristics. | 01-07-2010 |
| 20100216032 | LITHIUM ION RECHARGEABLE BATTERY AND PROCESS FOR PRODUCING THE LITHIUM ION RECHARGEABLE BATTERY - Conventional ion rechargeable batteries having an electrode layer on an electrolyte layer suffer from an impurity layer formed at the interface, degrading performance. Conventional batteries with no such impurity layer have a problem of weak interface bonding. In the present invention, in a baking process step after an electrode layer is laminated on an electrolyte layer, materials for an electrode layer and an electrolyte layer are selected such that an intermediate layer formed of a reaction product contributing to charging and discharging reactions is formed at the interface of the electrode layer and the electrolyte layer. In addition, a paste that an active material is mixed with a conductive material at a predetermined mixing ratio is used to form a positive electrode layer and a negative electrode layer. Reductions in electrode resistance and interface resistance and improvement of charging and discharging cycle characteristics are made possible. | 08-26-2010 |
| 20120015234 | LITHIUM ION SECONDARY BATTERY AND METHOD FOR MANUFACTURING SAME - A conventional, multilayer, all-solid-state, lithium ion secondary battery where an electrode layer and an electrolyte layer are stacked has a problem that it has a high interface resistance between the electrode layer and the electrolyte layer and has a difficulty in increasing the capacity of the battery. A battery has been manufactured by applying pastes of a mixture of an active material and a solid electrolyte to form electrode layers and baking a laminate of electrode layers and electrolyte layers at a time. As a result, a matrix structure including the active material and the solid electrolyte has been formed in the electrode layers, so that a battery with a large capacity and a reduced interface resistance between the electrode layer and the electrolyte layer has been successfully achieved. | 01-19-2012 |
| 20120064406 | ELECTRODE MATERIAL, METHOD FOR PRODUCING SAME, AND LITHIUM ION SECONDARY BATTERY - Secondary batteries for automobiles require good input/output characteristics and low internal resistance. Conventionally, the surface of an active material is coated with metal particles to reduce the internal resistance of a battery, but without achieving remarkable improvement in the conductivity of the active material or decreasing the internal resistance of the battery since an oxide film is formed on the metal particle surfaces. The present electrode material is produced by mixing and dispersing an active material and a metal source compound, then depositing metal particles on the surface of the active material by thermal decomposition, vapor phase reduction, liquid phase reduction or a chemical reaction combining any of these. Since an oxide film is not formed on the metal particles, an electrode material having high conductivity is obtained. The electrode material decreases the internal resistance of a battery and improves the input/output characteristics of a battery. | 03-15-2012 |
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| 20080203839 | BEARING UNIT AND MOTOR USING BEARING UNIT - A bearing unit includes a radial bearing; a thrust bearing; a path forming member; a housing; viscous fluid; and a communicating path. The communicating path has an axial path formed in the axis direction on a circumferential face of the radial bearing and a second end side path formed on the second end side face of the radial bearing. The second end side path is formed by a plurality of projections formed on one of the second end side face of the radial bearing and a face of the housing opposing to the second end side face of the radial bearing. The cross section of the second end side path has a cross sectional area greater than that of the cross section of the axial path. | 08-28-2008 |
| 20090072643 | BEARING UNIT, MOTOR USING THE BEARING UNIT, AND ELECTRONIC EQUIPMENT USING THE MOTOR - Disclosed herein is a bearing unit including a shaft; a radial bearing for supporting the outer circumferential surface of the shaft; a housing for accommodating the radial bearing, the housing having an open end from which the shaft is inserted and a closed end opposite to the open end in the axial direction of the shaft; a lubricating oil filled in the housing to reduce rotational friction of the shaft; a holding member provided at the open end of the housing for holding the lubricating oil; and a sealing member for closing the open end of the housing to prevent the leakage of the lubricating oil; wherein the sealing member having a side wall portion interposed between the holding member and the shaft and opposed to the outer circumferential surface of the shaft. | 03-19-2009 |
| 20090215969 | Epoxy resin composition - Disclosed is an epoxy resin composition which is solid at ordinary room temperature, cures with excellent light resistance and heat resistance and minimal shrinkage, and is useful for encapsulating LEDs. The epoxy resin composition is characterized by comprising as an essential component an epoxy resin having an epoxy equivalent of 300-1000 g/eq and a softening point of 65-110° C. obtained by reacting a nonaromatic polycarboxylic acid (A) having an acid value of 100-250 mgKOH/g with a nonaromatic epoxy resin (B) having an epoxy equivalent of 100-400 g/eq. The nonaromatic polycarboxylic acid (A) may be obtained by reacting 1,4-cyclohexanedimethanol, 2,2-bis(4-hydroxycyclohexyl)propane, or 3,9-bis(1,1-dimethyl-2-hydroxyethyl)-2,4,8,10-tetraoxaspiro[5,5]undecane with methylhexahydrophthalic acid or hexahydrophthalic acid. | 08-27-2009 |
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| 20080220568 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - A semiconductor device in the form of a resin sealed semiconductor package is disclosed, wherein a gate terminal connected to a gate pad electrode formed on a surface of a semiconductor chip and a source terminal connected to a source pad electrode formed on the chip surface exposed to a back surface of a sealing resin portion, a first portion of a drain terminal connected to a back-surface drain electrode of the semiconductor chip is exposed to an upper surface of the sealing resin portion, and a second portion of the drain terminal formed integrally with the first portion of the drain terminal is exposed to the back surface of the sealing resin portion. When forming the sealing resin portion in such a semiconductor device, first the sealing resin portion is formed so as to also cover an upper surface of the first portion of the drain terminal and thereafter the upper surface side of the sealing resin portion is polished by liquid honing, thereby allowing the upper surface of the first portion of the drain terminal to be exposed on the upper surface of the sealing resin portion. Both heat dissipating property and production yield of the semiconductor device are improved. | 09-11-2008 |
| 20080268577 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor chip is sealed by resin without covering an outer terminal of a semiconductor device having a power transistor. A semiconductor chip having a power transistor is housed within a recess of a metal cap while a drain electrode on a first surface of the semiconductor chip is bonded to a bottom of the recess via a connection material. A gate electrode and a source electrode are formed on a second surface opposite to the first surface of the semiconductor chip, and the gate electrode and the source electrode are bonded with metal plate terminals | 10-30-2008 |
| 20080272472 | Semiconductor packaging device comprising a semiconductor chip including a MOSFET - A thin semiconductor device difficult to cause breakage of a semiconductor chip is disclosed. The semiconductor device comprises a sealing member, a semiconductor chip positioned within the sealing member, the semiconductor chip having a source electrode and a gate electrode on a first main surface thereof and a drain electrode on a second main surface as a back surface thereof, a first electrode plate (drain electrode plate) having an upper surface and a lower surface, a part of the upper surface of the first electrode plate being exposed to an upper surface of the sealing member and the lower surface portions of end portions of the first electrode plate being exposed to a lower surface of the sealing member, and second electrode plates (source electrode plate and gate electrode plate) each having a lower surface exposed to the lower surface of the sealing member and an upper surface positioned within the sealing member, wherein the drain electrode of the semiconductor chip is electrically connected to the drain electrode plate through an adhesive, one or plural stud type bump electrodes are formed by gold wire on the surface of each of the source electrode and gate electrode of the semiconductor chip, the bump electrode(s) being covered with an electrically conductive adhesive, the bump electrode(s) and the source and gate electrode plates are electrically connected with each other through the adhesive, and the bump electrode(s) and the source and gate electrode plates are not in contact with each other. | 11-06-2008 |
