Patent application number | Description | Published |
20080213679 | Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating method - A pellicle is provided to one end surface of end surfaces of a frame. Another end surface of the end surfaces of the frame has an area that opposes a substrate. A configuration is adopted that prevents the deformation of the one end surface of the frame and the shape of the opposing area on the other end surface from affecting one another. | 09-04-2008 |
20100073661 | Stage apparatus, exposure apparatus and device manufacturing method - An exposure apparatus comprises a stage main body having a mounting surface, and a correcting mechanism that corrects a shape of the mounting surface. | 03-25-2010 |
20110096306 | STAGE APPARATUS, EXPOSURE APPARATUS, DRIVING METHOD, EXPOSING METHOD, AND DEVICE FABRICATING METHOD - A stage apparatus includes a guide member that extends in first directions, that moves in second directions, which are substantially orthogonal to the first directions; two second moving bodies, which are provided along the guide member such that they are independently moveable in the first directions, that move in the second directions together with the guide member by the movement of the first moving body; and a holding member that holds an object and is supported by the two second moving bodies such that it is capable of moving within a two dimensional plane that includes at least the first directions and the second directions. | 04-28-2011 |
20110096312 | EXPOSURE APPARATUS AND DEVICE FABRICATING METHOD - An exposure apparatus includes: a first moving body, which comprises a guide member that extends in a first direction, that moves in a second direction, which is substantially orthogonal to the first direction; two second moving bodies, which are provided such that they are capable of moving in the first direction along the guide members, that move in the second direction together with the guide member by the movement of the first moving body; and a holding member, which is detachably supported by the two second moving bodies and is capable of holding the object and moving with respect to the two second moving bodies. The second moving bodies include a first drive part and a second drive part that are independently controllable. | 04-28-2011 |
20110096318 | EXPOSURE APPARATUS AND DEVICE FABRICATING METHOD - A first stage unit and a second stage unit are disposed adjacently in a second direction. A first holding member, which is supported by a first stage unit, and a second holding member, which is supported by the second stage unit, move in a direction parallel to the second direction while maintaining the state wherein they are in either close proximity or contact at end parts on the second direction side and transition from a first state, wherein a liquid is held between the object on the first holding member and the optical system, to a second state, wherein the liquid is held between the object on the second holding member and the optical system. | 04-28-2011 |
20110102761 | STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD - A stage apparatus comprises: a measuring apparatus that radiates a measurement beam to a measurement surface, which is formed on a surface on an side opposite a holding surface whereon an object of an holding member is held, and measures the position of the holding member in a direction corresponding to six degrees of freedom by receiving a reflected beam of the measurement beam reflected from the measurement surface; and a control apparatus that, based on tilt information of the positional information of the holding member, corrects information selected from the group consisting of the first direction positional information and the second direction positional information of the holding member. | 05-05-2011 |
20110123913 | EXPOSURE APPARATUS, EXPOSING METHOD, AND DEVICE FABRICATING METHOD - An exposure apparatus includes: a first moving body, which comprises guide members that extend in a first direction, moves in a second direction, which is substantially orthogonal to the first direction; two second moving bodies, which are provided such that they are capable of moving in the first direction along the guide members, move in the second direction together with the guide members by the movement of the first moving body; a holding apparatus holds the object and is supported by the two second moving bodies such that it is capable of moving within a two dimensional plane that includes at least the first directions and the second directions; and a transport apparatus, which comprises a chuck member that can noncontactually hold the object from above, transports the object to and from the holding apparatus. | 05-26-2011 |
20110128523 | STAGE APPARATUS, EXPOSURE APPARATUS, DRIVING METHOD, EXPOSING METHOD, AND DEVICE FABRICATING METHOD - A drive system drives the moving body based on: measurement results of a first measuring system that measures the position of the moving body within an plane by radiating a measurement beam from an arm member to a grating disposed in one surface of a moving body that is parallel to an XY plane; and measurement results of a second measuring system that uses laser interferometers to measure a change in the shape of the arm member. The drive system uses the measurement results of the second measuring system to correct measurement error, owing to a change in the shape of the arm member, included in the measurement results of the first measuring system. | 06-02-2011 |
20110164238 | EXPOSURE APPARATUS AND DEVICE FABRICATING METHOD - An exposure apparatus comprises: a first moving body, which comprises guide members that extend in a first direction, that moves in a second direction, which is substantially orthogonal to the first direction, by the drive of a first drive apparatus; two second moving bodies, which are provided such that they are capable of moving independently in the first direction along the guide members, that move in the second direction together with the guide members by the movement of the first moving body; a holding member, which holds an object W and is supported by the two second moving bodies such that it is capable of moving within a two dimensional plane that includes at least the first direction and the second direction as well as a first position directly below an optical system; and a liquid holding member that is disposed adjacent to the two second moving bodies in the second direction, moves together with the holding member, which is supported by the two second moving bodies, in a direction parallel to the second direction by the drive of a second drive apparatus, which shares at least one part of the first drive apparatus, while maintaining the state wherein the liquid holding member is in close proximity or in contact at its end part on one of the second direction sides, and causes a transition from a first state, wherein a liquid is held between the object on the holding member and the optical system, to a second state, wherein the liquid is held between the liquid holding member and the optical system. | 07-07-2011 |