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Hiroi, JP

Jun Hiroi, Tokyo JP

Patent application numberDescriptionPublished
20110010767Server System, Communication Method, Computer, Program And Recording Medium - Establishment of communication between client apparatuses and an arithmetic function unit is performed based on communication information acquired by communication using HTTP between the client apparatuses and the arithmetic function unit through a firewall function unit, where the client apparatuses download encrypted contents data from the arithmetic function unit by P2P without passing a firewall.01-13-2011

Kazushige Hiroi, Machida JP

Patent application numberDescriptionPublished
20090116816CHAPTERING METHOD AND APPARATUS FOR MOVIE DATA - A chaptering apparatus and method for movie data to set chapter points at more appropriate points in the movie data are disclosed. The apparatus includes a unit for acquiring the subtitle data from the movie data and a unit for chaptering the movie data. The chaptering unit detects sections designated not to display text data in the subtitle data for predetermined time or longer, based on the subtitle data acquired by the subtitle data acquisition unit, and sets, as chapter starting points, ending points of sections designated not to display text data in the subtitle data for predetermined time or longer.05-07-2009
20090129749VIDEO RECORDER AND VIDEO REPRODUCTION METHOD - In a video recorder, closed caption sentence data is outputted by analyzing digital broadcasting data including closed caption information. Index data is generated on the basis of a feature extraction rule and the effectiveness of an appearing keyword by analyzing closed caption sentence data. Closed caption feature data including a type of a closed caption sentence and a display time is generated by analyzing a closed caption ES (Elementary Stream). The broadcasting data is stored as record data, the closed caption feature data is analyzed, chapter data for reproducing a program is generated by a chapter designated by the user, and the chapter data is outputted to a storage. In the case of recording and reproducing the digital broadcasting program, it is possible to perform both the reproduction by the optimal index using the closed caption and the reproduction by the keyword voluntarily inputted by the user.05-21-2009
20100329636Video playback apparatus - A video playback apparatus includes a first unit which inputs a viewing time of video data to be played back, a second unit which extracts scenes on a basis of a power of audio in the video data or a movement of image in the video data so that a sum of the time of the extracted playback scenes is within the viewing time, and a third unit which plays back the extracted scenes.12-30-2010

Patent applications by Kazushige Hiroi, Machida JP

Makoto Hiroi, Hamamatsu-Shi JP

Patent application numberDescriptionPublished
20090259328AUDIO SIGNAL PROCESSING SYSTEM - In a mixer system including an editing device that edits a configuration of signal processing by designating a combination of a plurality of components and a DSP that processes audio signals in accordance with the signal processing configuration edited by the editing device, when the mixer engine does not store a predetermined enabling key, audio signal processing including a protected component in the mixer engine is disabled, and when the mixer engine stores the predetermined enabling key, the audio signal processing is enabled. Further, the editing device is permitted to edit a signal processing configuration including the protected component irrespective of storage of the enabling key in the mixer engine.10-15-2009
20090310800Apparatus for Editing Configuration Data of Digital Mixer - A digital mixer has a custom component specified by a configuration ID. Further, the same configuration ID is provided to another custom component for ensuring compatibility of scene data which is used for operating the custom component. When a custom component of the mixer configuration is edited, the edited custom component is provided with the same configuration ID as the initial custom component before the editing. Scene data of the initial custom component can be copied to scene data of the edited custom component or vice versa provided that their configuration IDs match with each other.12-17-2009

Patent applications by Makoto Hiroi, Hamamatsu-Shi JP

Masaki Hiroi, Miyagi JP

Patent application numberDescriptionPublished
20110109713OPTICAL DEVICE, OPTICAL SCANNING DEVICE, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF OPTICAL DEVICE - An optical device including an optical element; a package member in which the optical element is held on a bottom surface of the package member in an area surrounded by walls; and a plate member that seals the area surrounded by the walls and the bottom surface in an airtight manner, the plate member being translucent and joined to the package member with a resin material. The walls have a structure including steps, the plate member is joined onto one of the steps of the walls, and at least a part of the walls facing side surfaces of the plate member includes a positioning part for positioning the plate member and a retaining part for retaining the resin material, in a direction perpendicular to the bottom surface.05-12-2011

Masayuki Hiroi, Yokohama-Shi JP

Patent application numberDescriptionPublished
20110033792ELECTROPHOTOGRAPHIC PHOTORECEPTOR AND IMAGE-FORMING APPARATUS - To provide an electrophotographic photoreceptor having a high sensitivity, a good balance of various electric properties such as chargeability and residual potential, a good stability of the coating solution, and an excellent light resistance.02-10-2011

Masayuki Hiroi, Tokyo JP

Patent application numberDescriptionPublished
20090203208COPPER ALLOY FOR WIRING, SEMICONDUCTOR DEVICE, METHOD FOR FORMING WIRING, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A wiring metal contains a polycrystal of copper (Cu) as a primary element and an additional element other than Cu, and concentration of the additional element is, at crystal grain boundaries composing the Cu polycrystal and in vicinities of the crystal grain boundaries, higher than that of the inside of the crystal grains. The additional element is preferably at least one element selected from a group consisting of Ti, Zr, Hf, Cr, Co, Al, Sn, Ni, Mg, and Ag. This Cu wiring is formed by forming a Cu polycrystalline film, forming an additional element layer on this Cu film, and diffusing this additional element from the additional element layer into the Cu film. This copper alloy for wiring is preferred as metal wiring formed for a semiconductor device.08-13-2009

Masayuki Hiroi, Kanagawa JP

Patent application numberDescriptionPublished
20090075482PROCESS FOR FORMING A PATTERN INCLUDING ON A SEMICONDUCTOR DEVICE - An objective of this invention is to prevent resist poisoning and sensitivity deterioration in a chemically amplified resist. The chemically amplified resist comprises a base resin, a photoacid generator and a salt exhibiting buffer effect in the base resin.03-19-2009
20090232551ELECTROPHOTOGRAPHIC PHOTOSENSITIVE MEMBER, IMAGE FORMING DEVICE USING SAME, AND ELECTROPHOTOGRAPHIC PHOTOSENSITIVE MEMBER CARTRIDGE - To realize an electrophotographic photoreceptor excellent in abrasion resistance, the photosensitive layer of the photoreceptor comprises a polyester resin containing a repeating structural unit represented by the formula (1) and a hydrazone compound.09-17-2009
20090305496METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A post-CMP cleaning process of a copper layer is to be performed as follows. An alkaline aqueous solution, a polycarboxylic acid, BTA, and an alkaline aqueous solution are sequentially brought into contact with a primary surface of a silicon substrate over which the copper layer is provided.12-10-2009
20100150608ELECTROPHOTOGRAPHIC PHOTOSENSITIVE BODY, IMAGE-FORMING DEVICE USING SAME AND CARTRIDGE - To provide an electrophotographic photoreceptor excellent in electric characteristics and various characteristics, capable of forming a uniform photosensitive layer and excellent in repetitive characteristics, an image forming apparatus using it and an electrophotgraphic cartridge.06-17-2010
20110156219SEMICONDUCTOR DEVICE - A semiconductor device is disclosed which can prevent interlayer cracking of interlayer dielectric films while improving the adhesion between the interlayer dielectric films in a dicing process using a dicing blade. In a scribing line area, dummy wirings are formed respectively in a blade area through which a dicing blade passes in a dicing process and in non-blade areas formed on both sides of the blade area and through which the dicing blade does not pass. In the non-blade areas, vertically adjacent dummy wirings are coupled together through dummy vias, while in the blade area the vertically adjacent dummy wirings are not coupled together through dummy vias.06-30-2011

Patent applications by Masayuki Hiroi, Kanagawa JP

Noriyoshi Hiroi, Sagamihara-Shi JP

Patent application numberDescriptionPublished
20090285533Optical fiber array - An optical fiber array is formed by including m number of optical fibers (where, m is a natural number other than 0), an optical fiber aligning member on a surface of which, at least m number of grooves are formed in parallel, and a cover. An end portion of the optical fiber is disposed in the groove of the optical fiber aligning member, and is held by the optical fiber aligning member and the cover. Furthermore, when being held by the optical fiber aligning member and the cover, by setting a line segment which has connected a point on an outer periphery in contact with the cover, of the optical fiber to be a straight line, the optical fiber is supported at three points by the groove and the cover. Moreover, by setting an angle of formation of the groove to be constant for all the grooves, and by setting arbitrarily a depth of the groove to differ, and by setting arbitrarily a cladding diameter of the optical fiber arranged in the groove, a line segment which has connected a center of each of the m number of optical fibers disposed in the groove is set to be an arbitrary non straight line shape.11-19-2009

Osamu Hiroi, Tokyo JP

Patent application numberDescriptionPublished
20090136832ELECTRICAL ENERGY STORAGE CELL AND ELECTRICAL ENERGY STORAGE MODULE INCLUDING THE SAME - The storage cell comprises a flat roll electrode that includes a strip of positive electrode having a positive electrode current collector foil and a positive electrode layer formed thereon, a strip of negative electrode having an electrode current collector foil and a negative electrode layer formed, and a strip of electrically insulated separator, the strip of positive electrode and the strip of negative electrode being wound into a flat roll configuration with the strip of electrically insulated separator sandwiched therebetween; a sealed casing that hermetically seals the flat roll electrode impregnated with an electrolyte; a positive terminal and a negative terminal each electrically insulated from the sealed casing, connected to the positive current collector foil and the negative current collector foil, respectively.05-28-2009
20090147442ELECTRIC DOUBLE-LAYER CAPACITOR AND METHOD OF PRODUCING SAME - The present invention relates to an electric double-layer capacitor and a method for producing same capable of evenly and rapidly doping a negative electrode layer with lithium ions. The electric double-layer capacitor comprises: a positive electrode including a positive electrode layer formed on one surface of a positive electrode current collector; a negative electrode including a negative electrode layer formed on one surface of a negative electrode current collector; a first separator disposed between the positive electrode layer and the negative electrode layer; and a second separator disposed between the positive electrode current collector and the negative electrode current collector, in which the negative electrode includes holes penetrating through the negative electrode current collector and reaching the negative electrode layer.06-11-2009
20090148759ENERGY STORAGE DEVICE CELL AND CONTROL METHOD THEREOF - An energy storage device cell includes: a capacitor cathode including a capacitor cathode collector foil, and a capacitor cathode electrode layer formed on one face of the capacitor cathode collector foil and containing microparticles of activated carbon; a first separator; a common anode including an anode collector foil having a through-hole, and an anode electrode layer formed on one face of the anode collector foil; a second separator; and a battery cathode including a battery cathode collector foil, and a battery cathode electrode layer formed on one face of the battery cathode collector foil and containing particles of a lithium-containing metal compound. The first separator is sandwiched by the capacitor cathode electrode layer and the anode electrode layer. The second separator is sandwiched by the anode collector foil and the battery cathode electrode layer.06-11-2009

Ryoichi Hiroi, Tokushima JP

Patent application numberDescriptionPublished
20090326153COMPATIBILIZING AGENT FOR POLYMER ALLOY, POLYMER ALLOY, AND MASTER BATCH FOR PREPARATION OF POLYMER ALLOY - Disclosed are: a compatibilizing agent for a polymer alloy, which can increase the compatibility with a variety of polymers; a polymer alloy using the compatibilizing agent; and master batch for a polymer alloy. Specifically disclosed is a compatibilizing agent which is used for the preparation of a polymer alloy by blending at least one polymer (A) selected from the group consisting of a polyphenylene sulfide, a polyphenylene ether and a polyamide with a polymer (B) of a different type from the polymer (A) at such a ratio that the amount of the polymer (A) blended is the same as or more than that of the polymer (B). The compatibilizing agent comprises a nanosheet-shaped layered titanic acid which is produced by intercalate an organic basic compound between the layers of a layered titanic acid.12-31-2009

Satoshi Hiroi, Chiba JP

Patent application numberDescriptionPublished
20080208952Information processing apparatus and method and program - Disclosed herein is an information processing apparatus configured to distribute stored content to a client reproducing apparatus connected to the information processing apparatus via a network, which may include acquiring means; real item information generating means; extracting means; virtual item generating means; reproduction sequence list generating means; virtual item information generating means; collecting means; and distributing means.08-28-2008
20080301103INFORMATION PROCESSING SYSTEM, COLLECTING SERVER, INFORMATION PROCESSING METHOD AND PROGRAM - An information processing system including, a client capable of receiving and reproducing content from a media server, and a collecting server for receiving content management information on the content from the media server and managing the content management information.12-04-2008
20090300679Information processing apparatus, information processing method, program and information processing system - An information processing apparatus according to the present invention includes a content information acquisition unit that acquires content related information related to content data managed by a content management server from the content management server managing the content data, a selection unit that selects content from a content list which is a list of the content based on the content related information, and an externally connected device control unit that notifies, when the selected content is executed by an externally connected device connected externally, the externally connected device of location information of content data corresponding to the selected content and acquires reproduction state information representing a reproduction state of content when the externally connected device reproduces the selected content from the externally connected device.12-03-2009
20100115062Information processing apparatus and method and program - Disclosed herein is an information processing apparatus configured to distribute stored content to a client reproducing apparatus connected to the information processing apparatus via a network, which may include acquiring means; real item information generating means; extracting means; virtual item generating means; reproduction sequence list generating means; virtual item information generating means; collecting means; and distributing means.05-06-2010

Patent applications by Satoshi Hiroi, Chiba JP

Takaaki Hiroi, Tokyo JP

Patent application numberDescriptionPublished
20090073653IMAGE PROCESSING APPARATUS, FAN CONTROL METHOD, AND ENERGY-SAVING CONTROL DEVICE - An image processing apparatus includes an image processing unit, a main control unit, a fan, a fan control unit, and an energy-saving control unit. The energy-saving control unit includes a fan-rotation maintaining unit that maintains rotation of the fan for a predetermined time after the operating state of the image processing apparatus is shifted to the energy-saving state, and then turns off the power supply to the fan control unit.03-19-2009

Takashi Hiroi, Yokohama JP

Patent application numberDescriptionPublished
20080285841IMAGE PROCESSING UNIT FOR WAFER INSPECTION TOOL - An image processing apparatus for wafer inspection tool that is able to perform continuously cell to cell comparison inspection, die to die comparison inspection, and cell-to-cell and die-to-die hybrid comparison inspection, employing a plurality of processors. This image processing apparatus for wafer inspection tool comprises a plurality of processors for performing parallel processing, means for cutting out image data including a forward end overlap and a rear end overlap at partition boundaries in order to cut serial data into a predetermined image size, means for distributing the cutout image data to the plurality of processors, and means for assembling results of processing performed by the plurality of processors. The forward end overlap is set greater than a pitch of the cell subject to cell to cell comparison inspection.11-20-2008
20090309022APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBSTRATE, A SCANNING ELECTRON MICROSCOPE, AND A METHOD OF PRODUCING AN IMAGE USING A SCANNING ELECTRON MICROSCOPE - An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.12-17-2009
20100246933Pattern Inspection Method And Apparatus - An apparatus for processing a defect candidate image, including: a scanning electron microscope for taking an enlarged image of a specimen by irradiating and scanning a converged electron beam onto the specimen and detecting charged particles emanated from the specimen by the irradiation; an image processor for processing the image taken by the scanning electron microscope to detect defect candidates on the specimen and classify the detected defect candidates into one of plural classes; a memory for storing output from the image processor including images of the detected defect candidates; and a display unit which displays information stored in the memory and an indicator, wherein the display unit displays a distribution of the detected and classified defect candidates in a map format by distinguishing by the classified class, and the display unit also displays an image of a defect candidate stored in the memory together with the map which is indicated on the map by the indicator. 09-30-2010
20110129141CIRCUIT PATTERN EXAMINING APPARATUS AND CIRCUIT PATTERN EXAMINING METHOD - Provided is an examination technique to detect defects with high sensitivity at an outer-most repeative portion of a memory mat of a semiconductor device and even in a peripheral circuit having no repetitiveness.06-02-2011
20110163230CHARGED PARTICLE BEAM DEVICE - There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate inspection device is such that a substrate having a circuit pattern is irradiated with a primary charged particle beam, the substrate is moved at a constant speed or at an increasing or a decreasing speed, a position resulting from the movement is monitored, the position of irradiation with the primary charged particle beam is controlled according to the coordinates of the substrate, an image in a partial region on the substrate is captured at a speed lower than the velocity of the movement, a defect candidate is detected based on the captured image, and the detected defect candidate is displayed in a map format.07-07-2011

Patent applications by Takashi Hiroi, Yokohama JP

Takashi Hiroi, Yokohama-Shi JP

Patent application numberDescriptionPublished
20080302964METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN - A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.12-11-2008
20100193686Electron Beam Exposure Or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus - An electron beam apparatus equipped with a height detection system includes an electron beam unit emitting an electron beam to the specimen, and a height detection system for detecting height of the specimen which is set on a table. The height detection system includes an illumination system configured to direct first and second beams of light through a mask with a multi-slit pattern to a surface of the specimen at substantially opposite azimuth angles and at substantially equal angles of incidence, first and second detectors which respectively detect first and second multi-slit images of the first and second beams reflected from the specimen and generate output signals thereof, and a device which receives the output signals and generates a comparison signal which is responsive to the height of the specimen. An objective lens of the electron beam unit is controlled in accordance with the comparison signal.08-05-2010

Patent applications by Takashi Hiroi, Yokohama-Shi JP

Toru Hiroi, Sakado-Shi JP

Patent application numberDescriptionPublished
20080296265Shielded metal arc welding machine - A shielded metal arc welding machine having a characteristic with a constant current output characteristic and a drooping output characteristic properly combined is provided. A shielded metal arc welding machine having a constant current output characteristic, characterized by having a desired drooping output characteristic, which has an optional drooping degree with a point at which a characteristic line of said constant current output characteristic intersects a welding load characteristic line L as a base point, and replaces said constant current output characteristic.12-04-2008
20080308540Engine driven welding machine - An engine driven welding machine which is favorable in operability and has high reliability and reliably performs idle stop and restart is provided. An engine driven welding machine in which a welding generator is driven by an engine, and the aforesaid engine performs an idle operation when a welding operation is stopped is characterized by including an engine stop signal forming circuit IT which forms a stop signal for stopping an operation of the aforesaid engine when time of the aforesaid idle operation exceeds a predetermined time, a direct-current power supply PS connected to an output terminal of the aforesaid welding machine, voltage detecting means VS which detects a voltage change of the aforesaid output terminal, a restart detecting circuit RS which forms a restart signal for restarting the aforesaid engine when the detected voltage by the aforesaid voltage detecting means shows a predetermined change mode for starting the welding operation, and an engine control circuit EC which stops the aforesaid engine in response to the aforesaid stop signal, and restarts the aforesaid engine in response to the aforesaid restart signal.12-18-2008
20080308541Engine driven welding machine - An engine driven welding machine which is favorable in operability and has high reliability and reliably performs idle stop and restart is provided. An engine driven welding machine in which a welding generator is driven by an engine, and the aforesaid engine performs an idle operation when a welding operation is stopped is characterized by including an engine stop signal forming circuit IT which forms a stop signal for stopping an operation of the aforesaid engine when time of the aforesaid idle operation exceeds a predetermined time, a direct-current power supply PS connected to an output terminal of the aforesaid welding machine, voltage detecting means VS which detects a voltage change of the aforesaid output terminal, a restart detecting circuit RS which forms a restart signal for restarting the aforesaid engine when the detected voltage by the aforesaid voltage detecting means shows a predetermined change mode for starting the welding operation, and an engine control circuit EC which stops the aforesaid engine in response to the aforesaid stop signal, and restarts the aforesaid engine in response to the aforesaid restart signal.12-18-2008

Toshiaki Hiroi, Toyokawa-Shi JP

Patent application numberDescriptionPublished
20080304877Image-forming apparatus equipped with specified intermediate transfer member - An image-forming apparatus comprises an intermediate transfer member having a hard release layer on the surface that receives a primarily transferred toner image from a latent image-supporting member on the hard release layer and secondarily transfers the toner image to an image-receiving medium, wherein, 12-11-2008
20080310877Image-forming apparatus - An image-forming apparatus that is provided with an intermediate transfer member that has a hard releasing layer formed on the surface thereof, supports a toner image primary-transferred onto the hard releasing layer from a latent-image supporting member, and secondary-transfers the supported toner image onto an image-receiving medium, and a cleaning blade that is arranged in contact with the intermediate transfer member, and removes residual toner from the hard releasing layer of the intermediate transfer member, wherein the cleaning blade has an impact resilience in the range from 20 to 50% at 20° C.12-18-2008
20080310890IMAGE-FORMING APPARATUS EQUIPPED WITH INTERMEDIATE TRANSFER MEMBER - An image-forming apparatus, comprises: 12-18-2008
20090074477Image Forming Apparatus - An image-forming apparatus, equipped with an intermediate transfer member 03-19-2009
20090310989IMAGE FORMING APPARATUS - An image forming apparatus which is free from occurrence of image noise due to the bleed phenomenon even without providing any contact-and-separation mechanism for the transfer member includes a control device which counts stop time elapsing from a stop to a restart of the image carrier, calculates an avoidance sheet count corresponding to the stop time at a restart of the image carrier, and makes a toner image carried on only part of the image carrier that has been out of the nip against the transfer member during the stop of the image carrier until the avoidance sheet count is reached after the restart of the image carrier.12-17-2009
20100239281IMAGE FORMING APPARATUS - An image forming apparatus includes an image carrier, a transfer member provided at a position at which the transfer member can be pressed against the image carrier, a detection device for detecting a toner attachment amount of the toner image formed on the image carrier, an avoidance judging section for judging whether or not avoidance of a pressed region should be performed when a toner image for image formation is formed on the image carrier, the pressed region serving as a region located on the image carrier and being pressed against the transfer member from the end of a previous image forming operation to the start of a present image forming operation, and an avoidance continuation judging section for judging the necessity for continuation of the avoidance by being operated when it is judged as avoidance by the avoidance judging section.09-23-2010

Patent applications by Toshiaki Hiroi, Toyokawa-Shi JP

Toshiaki Hiroi, Tokyo JP

Patent application numberDescriptionPublished
20080310892IMAGE-FORMING APPARATUS - An image-forming apparatus comprises, 12-18-2008

Toshiyuki Hiroi, Saitama JP

Patent application numberDescriptionPublished
20090228727METHOD AND PROGRAM FOR SETTING MICROPROCESSOR POWER SUPPLY VOLTAGE - A determining unit determines the state of the microprocessor. A setting unit sets a power supply voltage to be supplied to the microprocessor according to the state of the microprocessor determined by the determining unit. A power supply circuit supplies the power supply voltage set by the setting unit, to the microprocessor via a power supply line. The determining unit determines repeatedly the state of the microprocessor at preset timing, and the setting unit resets the power supply voltage every time the determination is performed by the determining unit.09-10-2009
20110159957PORTABLE TYPE GAME DEVICE AND METHOD FOR CONTROLLING PORTABLE TYPE GAME DEVICE - Provided are a portable game device and a method of controlling the portable game device capable of making improved use of an image generated by image pickup unit. A pickup object image generating unit (06-30-2011

Patent applications by Toshiyuki Hiroi, Saitama JP

Yoshiomi Hiroi, Toyama-Shi JP

Patent application numberDescriptionPublished
20090217759Method of Determining Sublimate in Thermoset Film with Qcm Sensor - A method for measuring an amount of a sublimate in real time with respect to a lapse of heating time, comprising: adhering the sublimate from a thermoset film during heating to a surface of a crystal oscillator using a nozzle inserted into a detection part; and measuring the amount of the sublimate from a change in a resonance frequency corresponding to the amount of the sublimate adhered to the crystal oscillator. In the method, the thermoset film may be formed on a silicon wafer and the measurement is performed while the thermoset film is heated by a heat source disposed under the silicon wafer; or the sublimate may be set so as to flow together with an airstream ascending toward an upper part of an enclosure covering the thermoset film, and the airstream directly contacts the crystal oscillator through the nozzle inserted into the detection part disposed in the path of the airstream.09-03-2009
20090317740Composition containing hydroxylated condensation resin for forming resist underlayer film - Disclosed is a lithographic composition for forming a resist underlayer film, which can be used as a lower layer antireflection film by which an exposure light striking on a photoresist formed on a semiconductor substrate is inhibited from being reflected from the substrate in a lithographic process of manufacturing semiconductor equipment, a planarization film for flattening a semiconductor substrate having a rugged surface used in order to fill in a hole formed on the semiconductor substrate, a film which prevents a photoresist from being contaminated by a substance generated from a semiconductor substrate during heating/burning, or the like. The lithographic composition for forming a resist underlayer comprises a polymer having a structure of formula (1):12-24-2009
20100221657RESIST UNDERLAYER FILM FORMING COMPOSITION AND METHOD OF FORMING RESIST PATTERN USING THE SAME - There is provided a composition for forming a resist underlayer film not only having a large selection ratio of a dry etching rate but also exhibiting desired values of the k value and of the refractive index n at a short wavelength such as a wavelength of an ArF excimer laser. A resist underlayer film forming composition for lithography comprising: a linear polymer; and a solvent, wherein a backbone of the linear polymer has a unit structure in which 2,4-dihydroxy benzoic acid is introduced through an ester bond and an ether bond.09-02-2010
20100266951RESIST UNDERLAYER FILM FORMING COMPOSITION AND METHOD FOR FORMING RESIST PATTERN - There is provided a composition for forming a resist underlayer film having a large selection ratio of dry etching rate, exhibiting desired values of the k value and the refractive index n at a short wavelength, for example, in an ArF excimer laser, and further, exhibiting solvent resistance. A resist underlayer film forming composition for lithography comprises a linear polymer having, in a main chain thereof, at least one of an aromatic ring-containing structure and a nitrogen atom-containing structure; and a solvent, wherein to the aromatic ring or the nitrogen atom, at least one alkoxyalkyl group or hydroxyalkyl group is directly bonded.10-21-2010
20110053091SULFUR ATOM-CONTAINING RESIST UNDERLAYER FILM FORMING COMPOSITION AND METHOD FOR FORMING RESIST PATTERN - It is an object to provide a resist underlayer film forming composition having a selection ratio of dry etching rate larger than that of a resist film and exhibiting a low k value and a high n value at a short wavelength such as that of an ArF excimer laser, and enabling the formation of a resist pattern having a desired shape. When the composition is produced or used, it is required that odor due to a raw material monomer causes no problem. The object is solved by a resist underlayer film forming composition for lithography containing a polymer having in backbone thereof, a disulfide bond (S—S bond), and a solvent. The polymer may be a product of a reaction between at least one type of compound (diepoxy compound) containing two epoxy groups and at least one type of dicarboxylic acid containing a disulfide bond.03-03-2011

Patent applications by Yoshiomi Hiroi, Toyama-Shi JP