| Patent application number | Description | Published |
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| 20080265710 | ELECTROSTATIC ACTUATOR - An electrostatic actuator includes first and second lower electrodes formed apart from each other above a substrate, an electrode portion formed above the first and second lower electrodes and first and second upper electrodes, a distance between the first upper electrode and the first lower electrode at a first portion being greater than that at a second portion, a distance between the second upper electrode and the second lower electrode at a third portion being greater than that at a fourth portion, a first boundary portion between the first and third upper electrodes having a convex shape, a second boundary portion between the second and third upper electrodes having a convex shape, and the electrode portion driving the third upper electrode, and first and second layers formed in the first and second boundary portions. | 10-30-2008 |
| 20090231778 | HIGH FREQUENCY ELECTRICAL ELEMENT - A high frequency MEMS | 09-17-2009 |
| 20090289313 | MICRO ELECTRIC MECHANICAL SYSTEM DEVICE AND METHOD OF PRODUCING THE SAME - A MEMS device comprises a substrate, an island-shaped first insulating layer formed on the substrate, a second insulating film formed on the top and side surfaces of the first insulating layer and the top surface of the substrate, and having a thickness smaller than that of the first insulating layer, a metal layer formed on the second insulating film in an island-shaped region where the first insulating layer is formed, and a MEMS system element formed on the metal layer. | 11-26-2009 |
| 20100246087 | SEMICONDUCTOR INTEGRATED CIRCUIT INCLUDING CIRCUIT FOR DRIVING ELECTROSTATIC ACTUATOR, MICRO-ELECTRO-MECHANICAL SYSTEMS, AND DRIVING METHOD OF ELECTROSTATIC ACTUATOR - A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator. | 09-30-2010 |
| 20100328840 | MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME - A MEMS device of an aspect of the present invention including a MEMS element includes a first lower electrode provided on a substrate, a first insulator which is provided on the upper surface of the first lower electrode, and has a first thickness, and a movable first upper electrode supported by an anchor in midair above the first lower electrode, and a capacitance element includes a second lower electrode provided on the substrate, a second insulator which is provided on the upper surface of the second lower electrode, and has a second thickness, and a second upper electrode provided on the second insulator, wherein the second thickness is less than the first thickness. | 12-30-2010 |
| 20110115546 | SEMICONDUCTOR INTEGRATED CIRCUIT INCLUDING CIRCUIT FOR DRIVING ELECTROSTATIC ACTUATOR, MICRO-ELECTRO-MECHANICAL SYSTEMS, AND DRIVING METHOD OF ELECTROSTATIC ACTUATOR - A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator. | 05-19-2011 |
| Patent application number | Description | Published |
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| 20100315757 | ELECTRICAL COMPONENT - An electrical component capable of performing hot switching at low power consumption is disclosed. The electrical component has a first electrical component and a second electrical component connected in parallel to the first electrical component. The first electrical component includes a first electrode and a second electrode facing the first electrode with a space in between, the second electrode is moved by a first actuator portion. The second electrical component includes a third electrode and a fourth electrode facing the third electrode with a space in between, the fourth electrode is moved by a second actuator portion having a stiffness higher than a stiffness of the first actuator portion, the second electrical component has an impedance becoming higher or lower than an impedance of the first electrical component depending on a moving state of the fourth electrode. | 12-16-2010 |
| 20110127878 | MICRO MOVABLE DEVICE AND METHOD FOR MANUFACTURING MICRO MOVABLE DEVICE - A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate. | 06-02-2011 |
| 20110140570 | ELECTROSTATIC ACTUATOR - According to one embodiment, an electrostatic actuator includes an electrode unit, a conductive film body unit, a plurality of first urging units, and a plurality of second urging units. The electrode unit is provided on a substrate. The conductive film body unit is provided opposing the electrode unit. The plurality of first urging units are provided at a first circumferential edge portion of the conductive film body unit to support the film body unit. The plurality of second urging units are provided at a second circumferential edge portion opposing the first circumferential edge portion to support the film body unit. The electrode unit and the conductive film body unit contact or separate by the electrode unit being set to a voltage having a prescribed value. The plurality of first urging units have mutually different rigidities, and the plurality of second urging units have mutually different rigidities. | 06-16-2011 |
