| Patent application number | Description | Published |
|---|
| 20080203302 | SAMPLE TRANSFER UNIT AND SAMPLE TRANSFERRING METHOD - There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists. | 08-28-2008 |
| 20090032707 | PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT SYSTEM - Easily and correctly measuring a dimension of a pattern of a photomask or of an OPC pattern of the photomask. | 02-05-2009 |
| 20090238443 | PATTERN MEASUREMENT METHODS AND PATTERN MEASUREMENT EQUIPMENT - An object of the present invention is to provide methods and equipment capable of providing highly accurate matching using a template including multiple patterns even when the shapes of some patterns of the template are different from corresponding ones of a SEM image, and when the template and the SEM image have a magnification error. Proposed, as a technique for achieving the object, is a method for performing matching by selectively using some of multiple patterns provided in a predetermined region of design data, and equipment for implementing the method. Moreover, proposed, as another technique for achieving the object, is a method for performing first matching by using multiple patterns provided in a predetermined region of design data and thereafter performing second matching by using some of the multiple patterns provided in the predetermined region, and equipment for implementing the method. | 09-24-2009 |
| 20100230592 | Sample Transfer Unit and Sample Transferring Method - There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists. | 09-16-2010 |
| 20110142578 | SAMPLE CONVEYING MECHANISM - A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism. | 06-16-2011 |
| Patent application number | Description | Published |
|---|
| 20080307213 | DEVICE ALLOCATION CHANGING METHOD - Switching of the allocation of a device to a guest OS is implemented through transmission of a virtual suspension interrupt to a guest OS in a VMM; a power control notification process module that causes the guest OS to start a return process from a suspended state; a guest power process module that traps a suspension process of the guest OS; an I/O configuration change process module that updates a logical device definition of the VMM in the suspended state of the guest OS; a guest I/O emulation process module that emulates an I/O instruction that is issued by an I/O reconfiguration process module and that is executed when the guest OS has returned from the suspended state, thereby to provide a new logical device configuration to the guest OS. | 12-11-2008 |
| 20090077552 | METHOD OF CHECKING A POSSIBILITY OF EXECUTING A VIRTUAL MACHINE - To determine, when a virtual machine is executed by an arbitrary machine, whether the virtual machine can access computer resources required for the virtual machine, provided is a method of checking a possibility of executing a virtual machine including a first physical computer for executing a first virtual machine and a second physical computer capable of executing a virtual machine. The method includes the steps of: acquiring information on first logical resources; acquiring setting information set to a adaptor of the first physical computer so that the first virtual machine accesses the first logical resources; listing second logical resources accessible when the first virtual machine is executed by the second physical computer by setting the setting information to a adaptor of the second physical computer; and determining whether the first virtual machine can be executed by the second physical computer by comparing the first and second logical resources. | 03-19-2009 |
| 20090150463 | METHOD OF MIGRATION BETWEEN VIRTUAL MACHINE AND PHYSICAL MACHINE AND MACHINE SYSTEM THEREOF - One of a first computer and a second computer has a virtualization module and the other one does not have a virtualization module. In response to a migration instruction, an OS in execution on the first computer is suspended. The contents of a memory area of the first computer used for the OS at the suspend point are migrated to a memory area of the second computer. In this migration, a storage area of information indicative of the OS suspend point is included. A memory area management method between the first computer and the second computer is converted. Then, the second computer resumes OS execution by referring to the information indicative of the suspend point and using the migrated contents of the memory area. | 06-11-2009 |
| 20100125843 | VIRTUAL SERVER SYSTEM, PHYSICAL CPU AND METHOD FOR ALLOCATING PHYSICAL MEMORY - The present invention prevents performance degradation due to memory latency in automatically allocating physical CPUs and memories to logical servers. Having information on arrangement of the physical CPUs and the memories, automatic allocation of physical CPUs to a logical server is implemented in consideration of reduction in memory latency. Moreover, the logical servers and the physicals CPU are grouped. Thereby, to each of the logical servers, a physical CPU in the same group as that of the logical server is allocated, and a memory under the memory controller to which the physical CPU belongs is allocated. In this way, the physical CPUs are allocated in consideration of reduction in memory latency. | 05-20-2010 |
