Patent application number | Description | Published |
20130015368 | INSPECTION APPARATUS AND INSPECTION METHODAANM NAKANISHI; HidetoshiAACI Kyoto-shiAACO JPAAGP NAKANISHI; Hidetoshi Kyoto-shi JPAANM TONOUCHI; MasayoshiAACI Suita-shiAACO JPAAGP TONOUCHI; Masayoshi Suita-shi JPAANM KAWAYAMA; IwaoAACI Suita-shiAACO JPAAGP KAWAYAMA; Iwao Suita-shi JP - A technology of inspecting a photoexcited carrier generation area of a photo device in a non-contact manner is provided. An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes an irradiation part that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface side and a detecting part (detector) that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light. | 01-17-2013 |
20130083319 | SEMICONDUCTOR INSPECTION METHOD AND SEMICONDUCTOR INSPECTION APPARATUS - A semiconductor inspection apparatus ( | 04-04-2013 |
20130153793 | ELECTROMAGNETIC RADIATION GENERATING ELEMENT, ELECTROMAGNETIC RADIATION GENERATING DEVICE, AND METHOD OF GENERATING ELECTROMAGNETIC RADIATION - An electromagnetic radiation generating device is a device that generates electromagnetic wave pulses from a plane surface. The electromagnetic radiation generating device includes an electromagnetic radiation generating element, a light irradiating unit. The electromagnetic radiation generating element includes: a depletion layer forming body formed by stacking a p-type silicon layer and an n-type silicon layer in a planar pattern; a light receiving surface electrode formed on one surface of the depletion layer forming body, the light receiving surface electrode including a plurality of parallel electrode parts that are equally spaced while a forming distance is maintained between the parallel electrode parts, the forming distance corresponding to the wavelength of the electromagnetic wave pulses generated from the depletion layer forming body; and a rear surface electrode formed on the opposite surface of the depletion layer forming body. | 06-20-2013 |
20130222004 | INSPECTION APPARATUS AND INSPECTION METHOD - An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes: an irradiation part that irradiates the photovoltaic cell panel with pulsed light (pump light) emitted from a femtosecond laser; a detecting part that detects an electromagnetic wave pulse, which is generated from the photovoltaic cell panel according to the irradiation of the pump light; and a continuous light irradiation part that irradiates a portion, which is irradiated with the pump light in the photovoltaic cell panel, with continuous light. | 08-29-2013 |
20140002125 | INSPECTING DEVICE AND INSPECTING METHOD | 01-02-2014 |
20140239182 | INSPECTING DEVICE AND INSPECTING METHOD - An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light. | 08-28-2014 |
20140253911 | INSPECTING DEVICE AND INSPECTING METHOD - An inspecting device includes: an irradiation part for dividing pulsed light emitted from a femtosecond laser into measurement pump light and measurement probe light, to irradiate a solar cell; a detection part for detecting an electromagnetic wave emitted from the solar cell in accordance with the irradiation with the measurement probe light; and a measurement delay part for delaying the time of arrival of the measurement probe light at the solar cell relatively to the measurement pump light. The irradiation part is provided with a galvano mirror for scanning with the measurement probe light a wide range which is wider than an irradiated range (pump light spot) being irradiated with the measurement pump light in a solar cell. | 09-11-2014 |
20150015297 | PHOTO DEVICE INSPECTION APPARATUS AND PHOTO DEVICE INSPECTION METHOD - A photo device inspection apparatus is an apparatus for inspecting a solar cell panel, which is a photo device. The photo device inspection apparatus includes an irradiation part configured to irradiate the solar cell panel with pulsed light radiated from a femtosecond laser, which is a light source, an electromagnetic wave detection part configured to detect a pulse of an electromagnetic wave radiated from the solar cell panel in response to irradiation with the pulsed light, and a current detection part configured to detect a current generated by the solar cell panel in response to irradiation with the pulsed light. | 01-15-2015 |
20150053869 | INSPECTION APPARATUS AND INSPECTION METHOD - An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light. | 02-26-2015 |