Patent application number | Description | Published |
20090032709 | Aberration Correction System - An aberration correction system for use in an electron microscope and which produces a negative spherical aberration and corrects a higher-order aberration. The aberration correction system has three stages of multipole elements which, respectively, produce fields of 3-fold symmetry with respect to the optical axis. Any two stages of multipole elements are disposed in directions not to cancel out the 3-fold fields. However, the three stages of multipole elements are so disposed as to cancel out 3-fold astigmatisms. | 02-05-2009 |
20100072387 | Aberration Corrector and Charged-Particle Beam System Equipped Therewith - An aberration corrector has two stages of dodecapole (12-pole) elements each of which has first through twelfth poles arranged in this order. Exciting coils of the (4n+1)th poles and the exciting coils of the (4n+2)th poles are alternately connected in series (where n=0, 1, or 2) to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within a plane perpendicular to the axis. The exciting coils of the (4n+3)th poles and the exciting coils of the (4n+4)th poles are alternately connected in series to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within the plane perpendicular to the axis. | 03-25-2010 |
20100084567 | Chromatic Aberration Corrector for Charged-Particle Beam System and Correction Method Therefor - An aberration corrector has two stages of multipole elements each of which has a thickness along the optical axis. Each multipole element produces a static electric or magnetic field of 3-fold symmetry and a static electromagnetic field of 2- or 3-fold symmetry superimposed on the static electric or magnetic field. In each of the multipole elements, the static electromagnetic field is so set that magnetic and electric deflecting forces on an electron beam accelerated by a given accelerating voltage substantially cancel out each other. Thus, chromatic aberration is corrected. Also, spherical aberration is corrected by the static electric or magnetic fields of 3-fold symmetry produced by the multipole elements. | 04-08-2010 |
20110284758 | Spherical Aberration Corrector and Method of Spherical Aberration Correction - A spherical aberration corrector and method is offered, which is easy to design and which can correct spherical aberration and even six-fold astigmatism in a charged particle beam instrument. The corrector has a first pair of multipole elements for producing a first pair of three-fold symmetric fields in which three-fold astigmatisms produced mutually are canceled out and a second pair of multipole elements for producing a second pair of three-fold symmetric fields in which three-fold astigmatisms produced mutually are canceled out. The second pair of multipole elements produce six-fold astigmatisms angularly spaced by 30° about an optical axis from six-fold astigmatisms produced by the first pair of multipole elements. | 11-24-2011 |
20120119107 | Method for Axial Alignment of Charged Particle Beam and Charged Particle Beam System - A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel. | 05-17-2012 |
20120187293 | Transmission Electron Microscope - A scanning transmission electron microscope using optical fibers as optical guiding media. The microscope obtains a high-angle scattering image or a dark-field image from electrons transmitted through a specimen. A scintillator converts electrons transmitted through the specimen into optical signals. The optical fibers couple outputs from the scintillator to the photodetector segments. The connections of the fibers with the photodetector segments are formed into arbitrary shapes. | 07-26-2012 |
20140158901 | CHROMATIC ABERRATION CORRECTOR AND ELECTRON MICROSCOPE - The chromatic aberration corrector ( | 06-12-2014 |
20140367585 | METHOD FOR AXIAL ALIGNMENT OF CHARGED PARTICLE BEAM AND CHARGED PARTICLE BEAM SYSTEM - A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel. | 12-18-2014 |
20150029593 | Spherical Aberration Corrector, Method of Spherical Aberration Correction, and Charged Particle Beam Instrument - A spherical aberration corrector is offered which permits a correction of deviation of the circularity of at least one of an image and a diffraction pattern and a correction of on-axis aberrations to be carried out independently. The spherical aberration corrector ( | 01-29-2015 |