Patent application number | Description | Published |
20110059245 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value. | 03-10-2011 |
20110059246 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate; a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the liquid material is transported; and an adjusting part which adjusts at least one of oxygen concentration and humidity inside the chamber. | 03-10-2011 |
20110059248 | COATING METHOD AND COATING APPARATUS - A coating method including coating a liquid material including an oxidizable metal on a substrate, and heating the substrate having the liquid material coated thereon in the presence of an inert gas. | 03-10-2011 |
20110059250 | COATING METHOD AND COATING APPARATUS - A coating method including coating a liquid material including an oxidizable metal on a substrate a plurality of times to laminate a plurality of liquid material layers on the substrate; and adjusting at least one of oxygen concentration and humidity inside a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the liquid material is transported. | 03-10-2011 |
20110059574 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate; a chamber having a coating section in which the coating part applies the liquid material on the substrate and a transport section into which the liquid material is transported; an adjusting part which adjusts at least one of oxygen concentration and humidity inside the chamber; and a control part which stops an operation of the coating part in response to the entrance of foreign object into the chamber. | 03-10-2011 |
20120238075 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which applies a liquid material containing an oxidizable metal and a solvent to a substrate; a chamber having a coating space in which the coating part applies the liquid material to the substrate and a transport space into which the substrate is transported; and a removal part which removes the liquid material from the atmosphere inside the chamber when a concentration of the solvent in the atmosphere inside the chamber exceeds a threshold value. | 09-20-2012 |
20120304921 | HEATING APPARATUS, COATING APPARATUS AND HEATING METHOD - A heating apparatus including: a first heating part and a second heating part between which a substrate having a coating film is disposed at a substrate position in the film thickness direction; and a distance control part which controls at least one of a first distance between the substrate position and the first heating part and a second distance between the substrate position and the second heating part. | 12-06-2012 |
20120308715 | COATING APPARATUS AND COATING METHOD - A coating apparatus including: a coating part having a nozzle which ejects a liquid material containing an oxidizable metal and a solvent to a substrate; a supplying system which supplies the liquid material to the coating part; and a recycling system which recovers the liquid material from at least one of the supplying system and the coating part, and supplies the recovered liquid material to at least one of the supplying system and the coating part. | 12-06-2012 |
20120309179 | SUBSTRATE TREATING APPARATUS AND METHOD OF TREATING SUBSTRATE - A substrate treating apparatus including: a first chamber having a coating part which forms a coating film of a liquid material containing an oxidizable metal and a solvent on a substrate; a second chamber having a first heating part which heats the coating film; and a connection part which connects the first chamber and the second chamber, wherein the connection part is provided with a second heating part which heats the coating film coated on the substrate and a pressure control part which controls the pressure around the coating film. | 12-06-2012 |
20130269602 | TRANSPORTING APPARATUS AND COATING APPARATUS - A transporting apparatus which transports a heated substrate, the substrate having a liquid containing a metal coated thereon, the transporting apparatus including a holding part which is moveable and holds the heated substrate, and a temperature control part which controls the temperature of the holding part. | 10-17-2013 |
20130269604 | NOZZLE AND COATING APPARATUS - A nozzle including a main part and a tip part provided at a tip of the main part, wherein a liquid material containing a metal is ejected from the tip part, and the tip part is separably mounted on the main part. | 10-17-2013 |
20130273252 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which coats a liquid material containing a metal on a substrate, a coating-film forming part which subjects the liquid material coated on the substrate to a predetermined treatment to form a coating film, and a removing part which removes a peripheral portion of the coating material formed along the outer periphery of the substrate. | 10-17-2013 |
20130280844 | COATING APPARATUS AND COATING METHOD - A coating apparatus including a coating part which has a nozzle which ejects a liquid material including an oxidizable metal from a tip portion, and a relative driving unit which moves a substrate and the nozzle in relation to each other so that the tip portion passes through the substrate, such that at least the tip portion of the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials. | 10-24-2013 |
20130309408 | COATING APPARATUS AND COATING METHOD - A coating apparatus including: a coating part having a nozzle which ejects a liquid material including a solvent and a plurality of metals to a substrate, a storing part which is connected to the nozzle and stores the liquid material, and an ultrasonic wave oscillating part which oscillates an ultrasonic wave to the liquid material stored in the storing part. | 11-21-2013 |
20150060434 | CHAMBER APPARATUS AND HEATING METHOD - Provided is a chamber apparatus which includes a chamber, in a part of which an internal space capable of accommodating a substrate therein is formed, a heating portion which heats the substrate disposed in the internal space, and a temperature adjustment portion which adjusts the temperature of a part of the chamber, which is in contact with the internal space. | 03-05-2015 |