Patent application number | Description | Published |
20110005923 | SPUTTERING SYSTEM, ROTATABLE CYLINDRICAL TARGET ASSEMBLY, BACKING TUBE, TARGET ELEMENT AND COOLING SHIELD - The application concerns a target backing tube for a rotatable cylindrical target assembly comprising: a tube for at least one target element to be disposed there around, wherein the tube has an exterior surface adapted to face the at least one target element, wherein a portion of the exterior surface of the tube has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the exterior surface of the tube. Further, the application concerns a cooling shield for a sputtering system comprising a rotatable target, the cooling shield has an interior surface adapted to face a target element of a sputtering system and an exterior surface; wherein a portion of the interior surface of the cooling shield has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the cooling shield. Additionally, the application concerns a target element for a rotatable cylindrical target assembly of a sputtering system, wherein the target element an interior surface adapted to face a target backing tube onto which the target cylinder is adapted to be disposed and exterior surface, wherein a portion of the interior surface of the target element has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the target element. | 01-13-2011 |
20110005924 | TARGET BACKING TUBE, CYLINDRICAL TARGET, AND CYLINDRICAL TARGET ASSEMBLY - A target backing tube is described. The target backing tube is for a rotatable target and includes a tube adapted for one or more non-bonded target cylinders to be disposed around the tube, the tube having an exterior surface adapted to face the at least one target cylinder and at least three or more protrusion receiving positions; and protrusions mounted on the exterior surface of the tube at each of the protrusion receiving positions for centering the target cylinders. | 01-13-2011 |
20110005925 | TARGET BACKING TUBE, CYLINDRICAL TARGET ASSEMBLY AND SPUTTERING SYSTEM - The present application concerns a target backing tube for a rotatable cylindrical target assembly comprising: a tube for at least one target element to be disposed there around, wherein the tube has an exterior surface adapted to be directed to the at least one target element; and a thermal reflection cover covering a portion of at least 20% of the exterior surface of the tube. Further, the present application concerns a rotatable cylindrical target assembly comprising: said target backing tube and at least one target element disposed around the target backing tube, wherein the thermal reflection cover disposed between the target backing tube and the at least one target element. | 01-13-2011 |
20110079511 | MAGNET ARRANGEMENT FOR A TARGET BACKING TUBE AND TARGET BACKING TUBE COMPRISING THE SAME - The disclosure concerns a magnet arrangement for a target backing tube for a rotatable target of a sputtering system, the magnet arrangement having a longitudinal axis and a circumferential direction around the longitudinal axis, and being adapted for an arrangement in a cylindrical backing tube, wherein the magnet arrangement comprises in a circumferential sequence: a first magnet element extending in parallel to the longitudinal axis, a second magnet element extending in parallel to the longitudinal axis, and a third magnet element extending in parallel to the longitudinal axis, wherein each magnet element has a center axis extending in a radial direction, wherein the angular distance between the first and the third magnet elements, with respect to their center axis, is less than about 85 degrees. The disclosure also concerns a cylindrical target assembly and at least one target cylinder disposed around the target backing tube. | 04-07-2011 |
20110192716 | METHOD FOR PRODUCING AN ITO LAYER AND SPUTTERING SYSTEM - The present disclosure relates to a method for producing an indium-tin-oxide layer, comprising: providing a substrate to be coated in a sputtering chamber; providing a rotatable non-bonded target around a backing tube for coating the substrate in the sputtering chamber; and sputtering the material from the target in an atmosphere containing an O | 08-11-2011 |
Patent application number | Description | Published |
20110271595 | DRIVE ARRANGEMENT FOR MOTOR-OPERATED ADJUSTMENT OF A CLOSURE ELEMENT IN A MOTOR VEHICLE - Disclosed herein is a drive arrangement for motor-operated adjustment of a closure element in a motor vehicle having at least one drive with a drive motor, and a drive controller. The closure element can be driven in the motor-operated adjustment mode by the drive motor in the closing direction and in the opening direction between a closed and an open position. The drive is non-self-locking and has a sensor, in particular a Hall sensor, for sensing the drive movement. The drive controller monitors the sensor signals for a fault state, and when a fault state is sensed initiates an emergency braking and/or stop mode. The drive arrangement comprises two drives each with a sensor for determining the respective drive movement. To detect fault-induced slamming shut of the closure element, the drive controller correlates the sensor signals of the two sensors, in particular compares said sensor signals. | 11-10-2011 |
20120146556 | DRIVE ARRANGEMENT FOR THE MOTOR-DRIVEN ADJUSTMENT OF AN ADJUSTABLE ELEMENT IN A MOTOR VEHICLE - Described herein is a drive arrangement for the motor-driven adjustment of an adjustable element in a motor vehicle, the drive arrangement having two electrical drives and a control device, the drives, in the fitted state, acting in the same way on the adjustable element and having a substantially identical configuration, apart from tolerance-related discrepancies. The control device has a power controller which, in the fitted state, during the motor-driven adjustment of the adjustable element, subjects the electrical power that is output respectively to the two drives to closed-loop control, for the purpose of compensating for the tolerance-related discrepancies, in such a way that an identical electrical power consumption is established for both drives. | 06-14-2012 |
20120285087 | METHOD FOR OPERATING A HATCH ARRANGEMENT OF A MOTOR VEHICLE - Described herein is a method for operating a hatch arrangement of a motor vehicle wherein a motor vehicle lock is controlled by means of a control arrangement in a relatch routine in such a way that a renewed latch state (a relatch state) is avoided or cancelled within a predetermined relatch time interval after the releasing process, and wherein in a relatch monitoring process the control arrangement monitors whether a relatch indication, in particular a relatch state, occurs within the predetermined relatch time interval after the releasing process and only then is the relatch routine triggered. | 11-15-2012 |
20140049194 | DRIVE ARRANGEMENT - The invention relates to a drive arrangement for the motor-operated adjustment of an adjusting element in a motor vehicle, wherein the drive arrangement comprises two electrical drives having in each case a drive motor and a control device, wherein in the assembled state the drives act in the same manner on the adjusting element and are embodied in an essentially identical manner apart from deviations that are a result of tolerances, wherein the control device influences the two drive motors by a pulse width modulation voltage (“PWM” voltage). It is proposed that the control device influences the two drive motors by PWM voltages having PWM switching frequencies that vary continuously during the adjustment process in such a manner that the PWM switching frequencies that are allocated to the two drive motors are different from each other at least for periods of time. | 02-20-2014 |
20140188349 | METHOD FOR OPERATING A FLAP ARRANGEMENT OF A MOTOR VEHICLE - The invention relates to a method for operating a flap arrangement of a motor vehicle, wherein the flap arrangement has a flap wing and a control arrangement, wherein a flap drive which is assigned to the flap wing and by which the flap wing can be adjusted between a closed position and an open position in an adjustment process is provided, wherein at least one predetermined flap operator control event is detected by means of the control arrangement and the flap drive is actuated as a technical control reaction to a flap operator control event. It is proposed that by means of the control arrangement the technical control reaction of stopping or continuing an adjustment process, which is due to two successive flap operator control events, is suppressed if at least one suppression condition is detected. | 07-03-2014 |
Patent application number | Description | Published |
20110116501 | DEVICE AND METHOD FOR SERIAL DATA TRANSMISSION BETWEEN A POSITION-MEASURING DEVICE AND A CONTROL UNIT - In a device and a method for serial data transmission between a position-measuring device and a control unit, made up of an interface unit on the control side and an interface unit on the measuring-device side, which are connected to each other for the transmission of serial data packets with the aid of a bidirectional data channel, the interface unit on the control side includes a control-side transmitter unit for transmitting serial data packets via the data channel to a measuring-device-side receiver unit disposed in the interface unit on the measuring-device side. The interface unit on the measuring-device side includes a measuring-device-side transmitter unit for transmitting serial data packets via the data channel to a control-side receiver unit disposed in the interface unit on the control side. Data packets transmitted by the control-side transmitter unit include a clock sequence at the beginning, from whose time characteristic it is possible to derive the frequency of a control-side transmitter clock signal underlying the transmission. The receiver unit on the measuring-device side includes a measuring-device-side clock-recognition unit which evaluates the clock sequence and, in order to read in control-side output data included in the data packet, generates a measuring-device-side receiver clock signal, whose frequency corresponds to a great extent to that of the transmitter clock signal on the control side. | 05-19-2011 |
20110213586 | Device and Method for Transmitting Data Between a Position-Measuring Device and Sequential Electronics - In a device and a method for transmitting data between a position-measuring device and sequential electronics via a data-transmission channel, the position-measuring device includes an interface unit and a processing unit, the interface unit being connected first of all to the data-transmission channel, and secondly, to the processing unit for the purpose of an internal data exchange with the aid of a request channel and a response channel. The interface unit includes a command interpreter by which, using conversion rules, commands which arrive via the data-transmission channel are convertible into internal requests and are able to be fed via the request channel to the processing unit, and response data which arrives from the processing unit via the response channel is convertible into output data. The interface unit further includes a rules memory for storing the conversion rules, which is at least partially modifiable. | 09-01-2011 |
Patent application number | Description | Published |
20110094318 | METHOD FOR EMBEDDING A BIOLOGICAL SAMPLE IN A TRANSPARENT MATRIX FOR ANALYSIS USING SINGLE PLANE ILLUMINATION MICROSCOPY - The invention is directed to method for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement. According to the invention, the method mentioned above has the following method steps: a sample is introduced into a transparent medium, preferably agarose gel, which is initially liquid; the medium is changed from the liquid state to the solid state, wherein the sample is fixated within the medium, but the transparency of the medium is retained; the solidified medium is positioned in the microscope arrangement in such a way that the sample enclosed therein is situated in the detection area of the objective. Further, a device is proposed for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement. | 04-28-2011 |
20130314758 | LIGHT SCANNING MICROSCOPE AND MICROSCOPY METHOD - A light scanning microscope with an illumination module generates several illumination beams and moves them, in each case as a spot, in a predefined region of a sample to excite sample radiation. A detector module for confocal detection of the sample radiation excited by each spot includes a first detector, an imaging lens system, having an optical axis, for imaging the predefined region along an imaging beam path running from the sample as far as the first detector, and a rotatable diaphragm with several pinholes located in a pinhole plane. The diaphragm, upon rotation, may be located at least partially in the imaging beam path for confocal detection. A second detector may be arranged outside of the imaging beam path. A first beam splitter may be arranged in the imaging beam path between the sample and the diaphragm. The beam splitter deflects sample radiation onto the second detector. | 11-28-2013 |
20140202265 | METHOD FOR EMBEDDING A BIOLOGICAL SAMPLE IN A TRANSPARENT MATRIX FOR ANALYSIS USING SINGLE PLANE ILLUMINATION MICROSCOPY - The invention is directed to method for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement. According to the invention, the method mentioned above has the following method steps: a sample is introduced into a transparent medium, preferably agarose gel, which is initially liquid; the medium is changed from the liquid state to the solid state, wherein the sample is fixated within the medium, but the transparency of the medium is retained; the solidified medium is positioned in the microscope arrangement in such a way that the sample enclosed therein is situated in the detection area of the objective. Further, a device is proposed for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement. | 07-24-2014 |