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Hellmich, DE

Andreas Hellmich, Dresden DE

Patent application number	Description	Published
20100025742	TRANSISTOR HAVING A STRAINED CHANNEL REGION CAUSED BY HYDROGEN-INDUCED LATTICE DEFORMATION - A lattice distortion may be achieved by incorporating a hydrogen species into a semiconductor material, such as silicon, without destroying the lattice structure. For example, by incorporating the hydrogen species on the basis of an electron shower, a tensile strain component may be obtained in the channel of N-channel transistors.	02-04-2010
20110049585	MAINTAINING INTEGRITY OF A HIGH-K GATE STACK BY PASSIVATION USING AN OXYGEN PLASMA - In semiconductor devices, integrity of a titanium nitride material may be increased by exposing the material to an oxygen plasma after forming a thin silicon nitride-based material. The oxygen plasma may result in an additional passivation of any minute surface portions which may not be appropriately covered by the silicon nitride-based material. Consequently, efficient cleaning recipes, such as cleaning processes based on SPM, may be performed after the additional passivation without undue material loss of the titanium nitride material. In this manner, sophisticated high-k metal gate stacks may be formed with a very thin protective liner material on the basis of efficient cleaning processes without unduly contributing to a pronounced yield loss in an early manufacturing stage.	03-03-2011

Anke Hellmich, Kahl DE

Patent application number	Description	Published
20110005923	SPUTTERING SYSTEM, ROTATABLE CYLINDRICAL TARGET ASSEMBLY, BACKING TUBE, TARGET ELEMENT AND COOLING SHIELD - The application concerns a target backing tube for a rotatable cylindrical target assembly comprising: a tube for at least one target element to be disposed there around, wherein the tube has an exterior surface adapted to face the at least one target element, wherein a portion of the exterior surface of the tube has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the exterior surface of the tube. Further, the application concerns a cooling shield for a sputtering system comprising a rotatable target, the cooling shield has an interior surface adapted to face a target element of a sputtering system and an exterior surface; wherein a portion of the interior surface of the cooling shield has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the cooling shield. Additionally, the application concerns a target element for a rotatable cylindrical target assembly of a sputtering system, wherein the target element an interior surface adapted to face a target backing tube onto which the target cylinder is adapted to be disposed and exterior surface, wherein a portion of the interior surface of the target element has a mean emissivity of 0.7 to 1, wherein the portion is at least 50% of the interior surface of the target element.	01-13-2011
20110005924	TARGET BACKING TUBE, CYLINDRICAL TARGET, AND CYLINDRICAL TARGET ASSEMBLY - A target backing tube is described. The target backing tube is for a rotatable target and includes a tube adapted for one or more non-bonded target cylinders to be disposed around the tube, the tube having an exterior surface adapted to face the at least one target cylinder and at least three or more protrusion receiving positions; and protrusions mounted on the exterior surface of the tube at each of the protrusion receiving positions for centering the target cylinders.	01-13-2011
20110005925	TARGET BACKING TUBE, CYLINDRICAL TARGET ASSEMBLY AND SPUTTERING SYSTEM - The present application concerns a target backing tube for a rotatable cylindrical target assembly comprising: a tube for at least one target element to be disposed there around, wherein the tube has an exterior surface adapted to be directed to the at least one target element; and a thermal reflection cover covering a portion of at least 20% of the exterior surface of the tube. Further, the present application concerns a rotatable cylindrical target assembly comprising: said target backing tube and at least one target element disposed around the target backing tube, wherein the thermal reflection cover disposed between the target backing tube and the at least one target element.	01-13-2011
20110079511	MAGNET ARRANGEMENT FOR A TARGET BACKING TUBE AND TARGET BACKING TUBE COMPRISING THE SAME - The disclosure concerns a magnet arrangement for a target backing tube for a rotatable target of a sputtering system, the magnet arrangement having a longitudinal axis and a circumferential direction around the longitudinal axis, and being adapted for an arrangement in a cylindrical backing tube, wherein the magnet arrangement comprises in a circumferential sequence: a first magnet element extending in parallel to the longitudinal axis, a second magnet element extending in parallel to the longitudinal axis, and a third magnet element extending in parallel to the longitudinal axis, wherein each magnet element has a center axis extending in a radial direction, wherein the angular distance between the first and the third magnet elements, with respect to their center axis, is less than about 85 degrees. The disclosure also concerns a cylindrical target assembly and at least one target cylinder disposed around the target backing tube.	04-07-2011
20110192716	METHOD FOR PRODUCING AN ITO LAYER AND SPUTTERING SYSTEM - The present disclosure relates to a method for producing an indium-tin-oxide layer, comprising: providing a substrate to be coated in a sputtering chamber; providing a rotatable non-bonded target around a backing tube for coating the substrate in the sputtering chamber; and sputtering the material from the target in an atmosphere containing an O	08-11-2011

Dirk Hellmich, Duisburg DE

Patent application number	Description	Published
20110271595	DRIVE ARRANGEMENT FOR MOTOR-OPERATED ADJUSTMENT OF A CLOSURE ELEMENT IN A MOTOR VEHICLE - Disclosed herein is a drive arrangement for motor-operated adjustment of a closure element in a motor vehicle having at least one drive with a drive motor, and a drive controller. The closure element can be driven in the motor-operated adjustment mode by the drive motor in the closing direction and in the opening direction between a closed and an open position. The drive is non-self-locking and has a sensor, in particular a Hall sensor, for sensing the drive movement. The drive controller monitors the sensor signals for a fault state, and when a fault state is sensed initiates an emergency braking and/or stop mode. The drive arrangement comprises two drives each with a sensor for determining the respective drive movement. To detect fault-induced slamming shut of the closure element, the drive controller correlates the sensor signals of the two sensors, in particular compares said sensor signals.	11-10-2011

Friedrich Hellmich, Kirchlengern DE

Patent application number	Description	Published
20090133575	METHOD FOR THE TREATMENT OF SORPTION MATERIAL IN THE PURIFICATION OF SMOKE GAS IN BRICKWORKS - A method for the treatment of sorption medium in the treatment of smoke gas in brickworks is provided, in which smoke gas which has occurred during combustion is conducted through an exhaust air duct into which treated sorption medium, in particular limestone chips, is introduced. Treatment of the sorption medium involves introducing sorption medium into a mixer as initial material, the sorption medium being fresh material, partly saturated sorption material which has been recovered from the smoke gas, or a mixture of fresh and partly saturated sorption material. Additionally, a liquid, preferably water, is added to the sorption material directly in a mixer or before entering into the mixer.	05-28-2009

Heik H. Hellmich, Kienberg DE

Patent application number	Description	Published
20110116501	DEVICE AND METHOD FOR SERIAL DATA TRANSMISSION BETWEEN A POSITION-MEASURING DEVICE AND A CONTROL UNIT - In a device and a method for serial data transmission between a position-measuring device and a control unit, made up of an interface unit on the control side and an interface unit on the measuring-device side, which are connected to each other for the transmission of serial data packets with the aid of a bidirectional data channel, the interface unit on the control side includes a control-side transmitter unit for transmitting serial data packets via the data channel to a measuring-device-side receiver unit disposed in the interface unit on the measuring-device side. The interface unit on the measuring-device side includes a measuring-device-side transmitter unit for transmitting serial data packets via the data channel to a control-side receiver unit disposed in the interface unit on the control side. Data packets transmitted by the control-side transmitter unit include a clock sequence at the beginning, from whose time characteristic it is possible to derive the frequency of a control-side transmitter clock signal underlying the transmission. The receiver unit on the measuring-device side includes a measuring-device-side clock-recognition unit which evaluates the clock sequence and, in order to read in control-side output data included in the data packet, generates a measuring-device-side receiver clock signal, whose frequency corresponds to a great extent to that of the transmitter clock signal on the control side.	05-19-2011
20110213586	Device and Method for Transmitting Data Between a Position-Measuring Device and Sequential Electronics - In a device and a method for transmitting data between a position-measuring device and sequential electronics via a data-transmission channel, the position-measuring device includes an interface unit and a processing unit, the interface unit being connected first of all to the data-transmission channel, and secondly, to the processing unit for the purpose of an internal data exchange with the aid of a request channel and a response channel. The interface unit includes a command interpreter by which, using conversion rules, commands which arrive via the data-transmission channel are convertible into internal requests and are able to be fed via the request channel to the processing unit, and response data which arrives from the processing unit via the response channel is convertible into output data. The interface unit further includes a rules memory for storing the conversion rules, which is at least partially modifiable.	09-01-2011

Wibke Hellmich, Jena DE

Patent application number	Description	Published
20110094318	METHOD FOR EMBEDDING A BIOLOGICAL SAMPLE IN A TRANSPARENT MATRIX FOR ANALYSIS USING SINGLE PLANE ILLUMINATION MICROSCOPY - The invention is directed to method for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement. According to the invention, the method mentioned above has the following method steps: a sample is introduced into a transparent medium, preferably agarose gel, which is initially liquid; the medium is changed from the liquid state to the solid state, wherein the sample is fixated within the medium, but the transparency of the medium is retained; the solidified medium is positioned in the microscope arrangement in such a way that the sample enclosed therein is situated in the detection area of the objective. Further, a device is proposed for positioning and aligning a preferably biological sample in the detection area of the objective of a microscope arrangement.	04-28-2011