| Patent application number | Description | Published |
|---|
| 20080197550 | Method for adapting a vibration isolation system - The invention relates to a method for adapting a vibration isolation system as well as to an arrangement with a vibration isolation system. By constructive measures in the environment of the vibration isolation system, particularly plane-parallel surfaces areas are avoided and thereby disturbing environmental influences are reduced. | 08-21-2008 |
| 20080255698 | Device for Monitoring the Relative Positions of Several Devices - An apparatus is presented for monitoring the relative positions and/or for measuring and evaluating relative position in a system which contains at least two sub-systems. | 10-16-2008 |
| 20080294292 | METHOD AND DEVICE FOR FREQUENCY-RESPONSE CORRECTION IN VIBRATION ISOLATION SYSTEMS - To achieve improved frequency-response correction of a vibration-signal transmitter in a vibration isolation system, the invention proposes a method in which an analog sensor signal representing vibrations is generated by means of a vibration-signal transmitter, this sensor signal is amplified for correcting frequency-dependent sensitivity of the vibration-signal transmitter, an actuator control signal is generated by processing the amplified sensor signal, and an actuator is controlled with the actuator control signal for counteracting the vibrations, wherein the amplification of the sensor signal includes first amplification by means of an analog amplification stage and second amplification by means of a digital amplification stage. | 11-27-2008 |
| 20080300726 | Control system for active vibration isolation of a supported payload - The invention relates to a control system for active vibration isolation of a supported payload with a control device that comprises a processing unit ( | 12-04-2008 |
| 20090146352 | Vibration isolator for use in a vacuum - The invention relates to a vibration isolator for use in a vacuum in which mechanical and electrical modules are arranged within a fluid-tight chamber. | 06-11-2009 |
| 20100211225 | Combined motion sensor for use in feedback control systems for vibration isolation - The present invention relates to a method for controlling a vibration isolation system, and an active vibration isolation system for vibration-isolated support of lithographic devices, wafer handling systems, and/or scanning microscopes. For this purpose the following are provided: a number of vibration transducers for supplying sensor signals which are representative of vibrations; a number of actuators for vibration compensation which may be controlled by supplying actuator control signals; a control device which is designed for processing the supplied sensor signals to form the actuator control signals, wherein the vibration transducers have at least one geophone sensor as a first acceleration sensor for detecting vibrations in a first frequency range, and at least one second acceleration sensor, which is different from the first acceleration sensor, for detecting vibrations in a second frequency range which extends the first frequency range. | 08-19-2010 |
| 20110062306 | Active vibration isolation system - The present invention relates to a method for regulating an active vibration isolation system and to an active vibration isolation system, in particular for a vibration isolated positioning of lithography-devices, wafer-handling-systems and/or microscopes, as for instance scanning microscopes. The active vibration isolation system comprises the following components: a support body for bearing a load which is to be isolated; pneumatic vibration isolators with controllable valves for carrying the support body with respect to the ground; position sensors for providing vertical position signals of the support body; a first regulating system for vibration compensation in at least one degree of freedom in translation (Xt,Yt,Zt) and in at least one degree of freedom in rotation (Xr,Yr,Zr) and a second pneumatic regulating system for vibration compensation in at least one degree of freedom selected from three degrees of freedom (Zt,Xr,Yr) which are effective in vertical direction. | 03-17-2011 |
