Patent application number | Description | Published |
20090184340 | SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME - A semiconductor device is provided in which a semiconductor substrate can be prevented from being broken while elements can be prevented from being destroyed by a snap-back phenomenon. After an MOS gate structure is formed in a front surface of an FZ wafer, a rear surface of the FZ wafer is ground. Then, the ground surface is irradiated with protons and irradiated with two kinds of laser beams different in wavelength simultaneously to thereby form an N | 07-23-2009 |
20090206398 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE - A semiconductor device including an n-type semiconductor substrate, a p-type channel region and a junction layer provided between the n-type semiconductor substrate and the p-type channel region is disclosed. The junction layer has n-type drift regions and p-type partition regions alternately arranged in the direction in parallel with the principal surface of the n-type semiconductor substrate. The p-type partition region forming the junction layer is made to have a higher impurity concentration than the n-type drift region. This enables the semiconductor device to have an enhanced breakdown voltage and, at the same time, have a reduced on-resistance. | 08-20-2009 |
20100173476 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device according to the invention irradiates a first pulse laser beam with an irradiation energy density of 1.0 J/cm | 07-08-2010 |
20110318910 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device that sufficiently activates a deep ion injection layer and fully recovers lattice defects generated in the ion injection process. Laser light pulses are successively emitted to form substantially CW (continuous wave) laser light. This feature of the invention stably performs activation of a deep ion injection layer at about 2 μs with few defects. | 12-29-2011 |
20120064706 | SEMICONDCUTOR DEVICE AND METHOD OF PRODUCING THE SAME - A semiconductor device is provided in which a semiconductor substrate can be prevented from being broken while elements can be prevented from being destroyed by a snap-back phenomenon. After an MOS gate structure is formed in a front surface of an FZ wafer, a rear surface of the FZ wafer is ground. Then, the ground surface is irradiated with protons and irradiated with two kinds of laser beams different in wavelength simultaneously to thereby form an N | 03-15-2012 |
20120098085 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device, and method of manufacturing the device, having a p type diffusion layer; a V-groove including a bottom surface parallel to the rear surface and exposing the p type diffusion layer and a tapered side surface rising from the bottom surface; a p type semiconductor layer on the rear surface surrounded by the tapered side surface of the V-groove; and a p type isolation layer formed on the side surface and electrically connecting the p type diffusion layer on the front surface and the p type semiconductor layer on the rear surface. The V-groove has a chamfered configuration around the intersection between a corner part of the side surface and the bottom surface of the V-groove. An object is to prevent performance degradation due to stress concentration at the corner part of a recessed part caused by thermal history in soldering. | 04-26-2012 |
20120329257 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device, the method including forming a front face structure of a semiconductor device on a first main face of a semiconductor substrate, grinding a second main face of the semiconductor substrate and reducing the semiconductor substrate in thickness to a thickness equal to or less than 100 μm, ion implanting a dopant into the second main face of the semiconductor substrate of reduced thickness, and activating the dopant by irradiating the second main face with laser light and performing laser annealing while the semiconductor substrate of reduced thickness is heated. | 12-27-2012 |
20130196457 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - In some aspects of the invention, a circuit pattern of a front surface structure is formed in a front surface of a semiconductor wafer and an alignment mark is formed on the front surface of a semiconductor wafer. A transparent supporting substrate is attached to the front surface of the semiconductor wafer by a transparent adhesive. Then, a resist is applied onto a rear surface of the semiconductor wafer. Then, the semiconductor wafer is mounted on a stage of an exposure apparatus, with the supporting substrate down. Then, the alignment mark formed on the front surface of the semiconductor wafer is recognized by a camera, and the positions of the semiconductor wafer and a photomask are aligned with each other. Then, the resist is patterned. Then, a circuit pattern is formed in the rear surface of the semiconductor wafer. | 08-01-2013 |
20130260540 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A reverse blocking IGBT is manufactured using a silicon wafer sliced from a single crystal silicon ingot which is manufactured by a floating method using a single crystal silicon ingot manufactured by a Czochralski method as a raw material. A separation layer for ensuring a reverse blocking performance of the reverse blocking IGBT is formed by diffusing impurities implanted into the silicon wafer using a thermal diffusion process. The thermal diffusion process for forming the separation layer is performed in an inert gas atmosphere at a temperature equal to or more than 1290° C. and less than the melting point of silicon. In this way, no crystal defect occurs in the silicon wafer and it is possible to prevent the occurrence of a reverse breakdown voltage defect or a forward defect in the reverse blocking IGBT and thus improve the yield of a semiconductor element. | 10-03-2013 |
20130295729 | METHOD FOR MANUFACTURING REVERSE-BLOCKING SEMICONDUCTOR ELEMENT - In a method of manufacturing a reverse-blocking semiconductor element, a tapered groove is formed and ions are implanted into a rear surface and the tapered groove. Then, a furnace annealing process and a laser annealing process are performed to form a rear collector layer and a separation layer on the side surface of the tapered groove. In this way, it is possible to ensure a reverse breakdown voltage and reduce a leakage current when a reverse bias applied, even in a manufacturing method including a process of manufacturing a diffusion layer formed by forming a tapered groove and performing ion implantation and an annealing process for the side surface of the tapered groove as the separation layer for bending the termination of a reverse breakdown voltage pn junction to extend to the surface. | 11-07-2013 |
20140001487 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE | 01-02-2014 |
20140061672 | SEMICONDUCTOR DEVICE - A semiconductor device includes an active region in which current flows when the semiconductor device is in an on state and a breakdown voltage structure portion which surrounds the active region. In the active region, a MOS gate structure includes, a p well region, an n | 03-06-2014 |
20140377938 | METHOD FOR PRODUCING SEMICONDUCTOR DEVICE - A method for producing a semiconductor device is disclosed which includes a diffusion step of forming, on a CZ-FZ silicon semiconductor substrate, a deep diffusion layer involving a high-temperature and long-term thermal diffusion process which is performed at a thermal diffusion temperature of 1290° C. to a melting temperature of a silicon crystal for 100 hours or more; and a giving step of giving a diffusion source for an interstitial silicon atom to surface layers of two main surfaces of the silicon semiconductor substrate before the high-temperature, long-term thermal diffusion process. The step of giving the diffusion source for the interstitial silicon atom to the surface layers of the two main surfaces of the silicon semiconductor substrate is performed by forming thermally-oxidized films on two main surfaces of the silicon semiconductor substrate or by implanting silicon ions into surface layers of the two main surfaces of the silicon semiconductor substrate. | 12-25-2014 |
20150031175 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device, includes providing a silicon semiconductor substrate which is manufactured by a floating zone method; and performing thermal diffusion at a heat treatment temperature that is equal to or higher than 1290° C. and that is lower than a melting temperature of a silicon crystal to form a diffusion layer with a depth of 50 μm or more in the silicon semiconductor substrate, the thermal diffusion including a first heat treatment performed in an oxygen atmosphere or a mixed gas atmosphere of oxygen and inert gas, and a second heat treatment performed in a nitrogen atmosphere or a mixed gas atmosphere of nitrogen and oxygen to form the diffusion layer. The method suppresses the occurrence of crystal defects, reduces the amount of inert gas used, and reduces manufacturing costs. | 01-29-2015 |