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Han, NY

Charles Han, New York, NY US

Patent application numberDescriptionPublished
20110242126CAPTURING IMAGE STRUCTURE DETAIL FROM A FIRST IMAGE AND COLOR FROM A SECOND IMAGE - Embodiments are described for a method to generate an image that includes image structure detail captured from a first image and color from a second image. The first image of a defined subject can be obtained from a computer memory. The first image may be a downsampled fine image with image detail. The second image captured of the defined subject in the first image can be obtained from a computer memory. The second image may be a coarse image. A target pixel in the second image can be selected. A target color distribution for a pixel window of the target pixel can then be computed. A source color distribution for a pixel window of a corresponding pixel in the first image can be computed using a computer processor. Further, a statistic of the target pixel can be determined with respect to the target color distribution. The source color in the source color distribution can be computed with the statistic. The target pixel color can then be replaced by the source color.10-06-2011
20110243438GENERATION OF MULTI-RESOLUTION IMAGE PYRAMIDS - Embodiments are described for a system and method for generating a multi-resolution image pyramid. The method can include obtaining an image captured as a coarse image of a defined subject and a fine image of the defined subject. The fine image can be downsampled to create a temporary image. A further operation is applying a structure transfer operation to the temporary image to transfer color detail from the coarse image. The structure transfer takes place while retaining structural detail from the temporary image. A blending operation can be applied between the temporary image and the fine image to construct an intermediate image for at least one intermediate level in the multi-resolution image pyramid between the fine image and the coarse image.10-06-2011

Geng Han, Fishkill, NY US

Patent application numberDescriptionPublished
20090276736Test Pattern Based Process Model Calibration - Embodiments of the present invention provide a method for performing lumped-process model calibration. The method includes creating a plurality of sub-process models for a set of sub-processes; creating a lumped-process-model incorporating said set of sub-processes; calculating a first set of output patterns from a set of test patterns by using said plurality of sub-process models; calculating a second set of output patterns from said set of test patterns by using said lumped-process-model; and adjusting process parameters used in said lumped-process-model to calculate said second set of output patterns to match said first set of output patterns. A computer system for performing the lumped-process model calibration is also provided.11-05-2009
20090290401PLACEMENT AND OPTIMIZATION OF PROCESS DUMMY CELLS - A method for laying out process dummy cells in relationship to inside memory cells of a memory array includes (a) calculating an initial process performance parameter for the memory array; (b) changing dummy cell layout configuration for a layer electrically connected to inside cells; (c) applying lithographic simulation and yield model for both the inside memory cells and the changed layout configuration process dummy cells; and (d) repeating steps (b) and (c) until yield is maximized. Checks may be performed to ensure that there is enough room to make the change and that there is no significant adverse effect to neighboring circuits. The process performance parameter may be yield or a process window for the inside memory cells.11-26-2009
20100171031CALIBRATION OF LITHOGRAPHIC PROCESS MODELS - A method is provided for calibrating a model of a lithographic process that includes defining a parameter space of lithographic model parameters that are expected in an integrated circuit layout. The parameter space is defined according to bin values of a lithographic model parameter that span the range from a predetermined minimum and maximum value of the model parameter. The bin values may be incremented uniformly between the maximum and minimum parameter values, or may be distributed according to a weighting. The lithographic model is calibrated to an initial calibration test pattern. The resulting simulated calibration pattern is evaluated to determine whether the model parameter space is adequately populated. If the parameter space is over or under populated, the calibration pattern is modified until the calibration pattern test values adequately populate the parameter space, so that the final calibrated lithographic process model will more reliably predict images over the full range of image parameters.07-08-2010
20110271238DECOMPOSITION WITH MULTIPLE EXPOSURES IN A PROCESS WINDOW BASED OPC FLOW USING TOLERANCE BANDS - Setting final dimensions while protecting against the possibility of merging shapes is provided by performing a decomposition of tolerance bands onto a plurality of masks for use in a multi-exposure process. This allows the maximum process latitude between open and short failure mechanisms, while also providing a mechanism to enforce strict CD tolerances in critical regions of a circuit. The decomposition enables co-optimizing various types of shapes placed onto each mask along with the source used to print each mask. Once the tolerance bands are decomposed onto the two or more masks, standard tolerance-band-based data preparation methodologies can be employed to create the final mask shapes.11-03-2011

Patent applications by Geng Han, Fishkill, NY US

Geng Han, Yorktown Heights, NY US

Patent application numberDescriptionPublished
20100318956METHOD OF INTEGRATED CIRCUIT CHIP FABRICATION AND PROGRAM PRODUCT THEREFOR - A method of physical design for integrated circuit (IC) chip fabrication, physical design system and program product therefor. A design shape is fragmented into segments for Optical Proximity Correction (OPC) and a harmonic mean of the segments is determined. Electrical intent is determined for the shape and a harmonic mean is determined for the segments. Segments may be moved based on a effect on the harmonic mean from moving the segments, measured using a harmonic mean cost function. Finally segmented shapes are passed to OPC.12-16-2010

Hyunjoo Han, Syracuse, NY US

Patent application numberDescriptionPublished
20120114962SYSTEM AND METHOD FOR SYNTHESIZING CORE/ALLOY NANOSTRUCTURES - A system and method to tailor the optical properties of nanomaterials using a core-alloy-shell nano-ultrastructure. Atomic diffusion is used at the nanoscale in order to process as-synthesized nanomaterials into core-alloy-shell architectures. The alloy formation is controlled by the deposition of the alloy solute atoms, and then by alloy interdiffusion of the solute into the core nanoparticle. By controlling temperature, it is possible to control how far the solute diffuses into the core, which in turn allows the tailoring of the optical response of the particle itself. The alloy formation and subsequent interdiffusion allows tailoring of the nanoparticle composition and ultrastructure, resulting in a dramatic tunability of the metal nanostructures surface plasmon response.05-10-2012

Jongyoon Han, Ithaca, NY US

Patent application numberDescriptionPublished
20090047681ENTROPIC TRAPPING AND SIEVING OF MOLECULES - Nanofluidic entropic traps, comprising alternating thin and thick regions, sieve small molecules such as DNA or protein polymers and other molecules. The thick region is comparable or substantially larger than the molecule to be separated, while the thin region is substantially smaller than the size of the molecules to be separated. Due to the molecular size dependence of the entropic trapping effect, separation of molecules may be achieved. In addition, entropic traps are used to collect, trap and control many molecules in the nanofluidic channel. A fabrication method is disclosed to provide an efficient way to make nanofluidic constrictions in any fluidic devices.02-19-2009

Kyu Sang Han, Port Washington, NY US

Patent application numberDescriptionPublished
20080251092Artificial nail and method of forming same - An artificial nail is formed by injection molding a first section and a second section. The first section and second section are adjacent to one another. One of the sections defines a front distal tip of the artificial nail and is formed by injecting a quantity of heated material under pressure from a nozzle into a sprue, through a runner and through a cavity gate into a mold cavity. The other section is formed by injecting another quantity of heated material under pressure from a heated nozzle through another cavity gate into the mold cavity.10-16-2008
20110030711Artificial nail and method of forming same - An injection molded artificial nail is formed by forming a first section using a runner system method, forming a second section using a runner system method and forming a third section by a hot tip gate process. The second and third sections are disposed under the first section. The second section has a second section end and the third section has a third section end adjoining the second section end. The first section forms a top surface of the artificial nail extending from a front distal tip of the artificial nail to a back proximal end of the artificial nail and completely covers the second section and the third section.02-10-2011
20110073124Ultrasonic artificial nail remover with a natural nail shaped tip - An ultrasonic wave energy artificial nail remover in one aspect includes a handle, a body attached to the handle, an ultrasonic sound wave generator attached to the body, and a tip having the shape of a natural nail. The tip is made to vibrate by the ultrasonic sound wave generator. The shape of the tip allows for a quicker removal of the artificial nail and requires less skill to successfully remove an artificial nail without damaging the natural nail than removal with a narrow flat tip allows and requires. Ultrasonic energy is channeled through the natural nail shaped tip to facilitate removal of an artificial nail in a quick manner with little cleanup involved.03-31-2011
20110079236Artificial eyelash and method for applying same - An artificial eyelash assembly includes a base strand having a first end and a second end opposite the first end and a plurality of hairs. A first loop is disposed proximate the first end of the base strand and a second loop is disposed proximate the second end of the base strand. A first flexible member is coupled to the first loop and a second flexible member is coupled to the second loop.04-07-2011
20110132384ARTIFICIAL NAIL OR TIP ARRANGEMENT AND METHOD OF MAKING SAME - Exemplary embodiments of artificial nail or tip arrangement and method of making the same can be provided. For example, at least one body can be provided which can have a particular surface with a shape that at least approximately corresponds to a shape of at least one portion of a natural nail. Further, an adhesive layer can be secured to at least one portion of the surface of the body. The adhesive layer can have a first surface which adheres to at least one portion of the particular surface of the body and a second surface which is provided to adhere to an upper surface of the at least one portion of the natural nail when directly applied thereto. Further, a removable layer can be provided which covers at least one section of the second surface of the adhesive layer, and which is removable to expose at least one portion of the second surface of the adhesive layer for an application to the upper surface of the portion of the natural nail. The removable layer can include at least one section which extends outwardly outside a periphery of the body.06-09-2011

Patent applications by Kyu Sang Han, Port Washington, NY US

Melinda Y. Han, New York, NY US

Patent application numberDescriptionPublished
20090140801Locally gated graphene nanostructures and methods of making and using - A locally gated graphene nanostructure is described, along with methods of making and using the same. A graphene layer can include first and second terminal regions separated by a substantially single layer gated graphene nanoconstriction. A local first gate region can be separated from the graphene nanoconstriction by a first gate dielectric. The local first gate region can be capacitively coupled to gate electrical conduction in the graphene nanoconstriction. A second gate region can be separated from the graphene nanoconstriction by a second gate dielectric. The second gate region can be capacitively coupled to provide a bias to a first location in the graphene nanoconstriction and to a second location outside of the graphene nanoconstriction. Methods of making and using locally gated graphene nanostructures are also described.06-04-2009

Pengyu Han, Troy, NY US

Patent application numberDescriptionPublished
20110036984TUNABLE BROADBAND ANTI-RELFECTION APPARATUS - A broadband anti-reflection apparatus for use with terahertz radiation includes a layer having an outer surface comprising a plurality of pyramid structures having about a 30 μm to about a 110 μm period, and wherein reflectance of the terahertz radiation is reduced compared to a layer comprising a planar outer surface. Also disclosed is a method for modifying terahertz radiation which includes receiving terahertz radiation on a device having an anti-reflection layer having an outer surface comprising a plurality of pyramid structures having about a 30 μm to a 110 μm period, and modifying the terahertz radiation passing through the device or processing the terahertz radiation in the device.02-17-2011

Shu-Jen Han, Wappingers Falls, NY US

Patent application numberDescriptionPublished
20100276753Threshold Voltage Adjustment Through Gate Dielectric Stack Modification - Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.11-04-2010
20110049624MOSFET ON SILICON-ON-INSULATOR REDX WITH ASYMMETRIC SOURCE-DRAIN CONTACTS - A semiconductor device is disclosed that includes a silicon-on-insulator substrate including a buried insulator layer and an overlying semiconductor layer. Source extension and drain extension regions are formed in the semiconductor layer. A deep drain region and a deep source region are formed in the semiconductor layer. A first metal-semiconductor alloy contact layer is formed using tilted metal formation at an angle tilted towards the source extension region, such that the source extension region has a metal-semiconductor alloy contact that abuts the substrate from the source side, as a Schottky contact therebetween and the gate shields metal deposition from abutting the deep drain region. A second metal-semiconductor alloy contact is formed located on the first metal-semiconductor layer on each of the source extension region and drain extension region.03-03-2011
20110215300GRAPHENE BASED THREE-DIMENSIONAL INTEGRATED CIRCUIT DEVICE - A three-dimensional (3D) integrated circuit (IC) structure includes a first layer of graphene formed over a substrate; a first level of one or more active devices formed using the first layer of graphene; an insulating layer formed over the first level of one or more active devices; a second layer of graphene formed over the insulating layer; and a second level of one or more active devices formed using the second layer of graphene, the second level of one or more active devices electrically interconnected with the first level of one or more active devices.09-08-2011
20110241120Field Effect Transistor Device and Fabrication - A method for forming a field effect transistor (FET) device includes forming a dielectric layer on a substrate, forming a first metal layer on the dielectric layer, removing a portion of the first metal layer to expose a portion of the dielectric layer, forming a second metal layer on the dielectric layer and the first metal layer, and removing a portion of the first metal layer and the second metal layer to define a boundary region between a first FET device and a second FET device.10-06-2011
20110248362SELF-ALIGNED CONTACTS - A method of forming a gate structure with a self-aligned contact is provided and includes sequentially depositing a sacrificial layer and a secondary layer onto poly-Si disposed at a location of the gate structure, encapsulating the sacrificial layer, the secondary layer and the poly-Si, removing the sacrificial layer through openings formed in the secondary layer and forming silicide within at least the space formally occupied by the sacrificial layer.10-13-2011
20120007183Multi-gate Transistor Having Sidewall Contacts - A multi-gate transistor having a plurality of sidewall contacts and a fabrication method that includes forming a semiconductor fin on a semiconductor substrate and etching a trench within the semiconductor fin, depositing an oxide material within the etched trench, and etching the oxide material to form a dummy oxide layer along exposed walls within the etched trench; and forming a spacer dielectric layer along vertical sidewalls of the dummy oxide layer. The method further includes removing exposed dummy oxide layer in a channel region in the semiconductor fin and beneath the spacer dielectric layer, forming a high-k material liner along sidewalls of the channel region in the semiconductor fin, forming a metal gate stack within the etched trench, and forming a plurality of sidewall contacts within the semiconductor fin along adjacent sidewalls of the dummy oxide layer.01-12-2012
20120032149Vertical Stacking of Carbon Nanotube Arrays for Current Enhancement and Control - Transistor devices having vertically stacked carbon nanotube channels and techniques for the fabrication thereof are provided. In one aspect, a transistor device is provided. The transistor device includes a substrate; a bottom gate embedded in the substrate with a top surface of the bottom gate being substantially coplanar with a surface of the substrate; a stack of device layers on the substrate over the bottom gate, wherein each of the device layers in the stack includes a first dielectric, a carbon nanotube channel on the first dielectric, a second dielectric on the carbon nanotube channel and a top gate on the second dielectric; and source and drain contacts that interconnect the carbon nanotube channels in parallel. A method of fabricating a transistor device is also provided.02-09-2012
20120108017THRESHOLD VOLTAGE ADJUSTMENT THROUGH GATE DIELECTRIC STACK MODIFICATION - Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.05-03-2012

Patent applications by Shu-Jen Han, Wappingers Falls, NY US

Shu-Jen Han, Yorktown Heights, NY US

Patent application numberDescriptionPublished
20110115044DIFFUSION SIDEWALL FOR A SEMICONDUCTOR STRUCTURE - A method of forming diffusion sidewalls in a semiconductor structure and a semiconductor structure having diffusion sidewalls includes etching a trench into a semiconductor substrate to form first and second active regions, lining each trench with an oxide liner along exposed sidewalls of an active silicon region (RX) of the first and second active regions, removing the oxide liner formed along the exposed sidewalls of the RX region of one of the first and second active regions, forming diffusion sidewalls by epitaxially growing in-situ doped material within the exposed sidewalls of the RX region of the one of the first and second active regions, and forming an isolation region within the trench between the first and second active regions to electrically isolate the first and second active regions from each other.05-19-2011
20120112310DIFFUSION SIDEWALL FOR A SEMICONDUCTOR STRUCTURE - A method of forming diffusion sidewalls in a semiconductor structure and a semiconductor structure having diffusion sidewalls includes etching a trench into a semiconductor substrate to form first and second active regions, lining each trench with an oxide liner along exposed sidewalls of an active silicon region (RX) of the first and second active regions, removing the oxide liner formed along the exposed sidewalls of the RX region of one of the first and second active regions, forming diffusion sidewalls by epitaxially growing in-situ doped material within the exposed sidewalls of the RX region of the one of the first and second active regions, and forming an isolation region within the trench between the first and second active regions to electrically isolate the first and second active regions from each other.05-10-2012

Shu-Jen Han, Hopewell Junction, NY US

Patent application numberDescriptionPublished
20110121370EMBEDDED STRESSOR FOR SEMICONDUCTOR STRUCTURES - A method of fabricating an embedded stressor within a semiconductor structure and a semiconductor structure including the embedded stressor includes forming forming a dummy gate stack over a substrate of stressor material, anistropically etching sidewall portions of the substrate subjacent to the dummy gate stack to form the embedded stressor having angled sidewall portions, forming conductive material onto the angled sidewall portions of the embedded stressor, removing the dummy gate stack, planarizing the conductive material, and forming a gate stack on the conductive material.05-26-2011

Shu-Jen Han, Cortlandt Manor, NY US

Patent application numberDescriptionPublished
20110223612Magnetic Sensor Based Quantitative Binding Kinetics Analysis - Methods for quantitatively determining a binding kinetic parameter of a molecular binding interaction are provided. Aspects of embodiments of the methods include: producing a magnetic sensor device including a magnetic sensor in contact with an assay mixture including a magnetically labeled molecule to produce a detectable molecular binding interaction; obtaining a real-time signal from the magnetic sensor; and quantitatively determining a binding kinetics parameter of the molecular binding interaction from the real-time signal. Also provided are systems and kits configured for use in the methods.09-15-2011
20110227043GRAPHENE SENSOR - A method for forming a sensor includes forming a channel in substrate, forming a sacrificial layer in the channel, forming a sensor having a first dielectric layer disposed on the substrate, a graphene layer disposed on the first dielectric layer, and a second dielectric layer disposed on the graphene layer, a source region, a drain region, and a gate region, wherein the gate region is disposed on the sacrificial layer removing the sacrificial layer from the channel.09-22-2011
20110315961Ultrathin Spacer Formation for Carbon-Based FET - A method for formation of a carbon-based field effect transistor (FET) includes depositing a first dielectric layer on a carbon layer located on a substrate; forming a gate electrode on the first dielectric layer; etching an exposed portion of the first dielectric layer to expose a portion of the carbon layer; depositing a second dielectric layer over the gate electrode to form a spacer, wherein the second dielectric layer is deposited by atomic layer deposition (ALD), and wherein the second dielectric layer does not form on the exposed portion of the carbon layer; forming source and drain contacts on the carbon layer and forming a gate contact on the gate electrode to form the carbon-based FET.12-29-2011
20120007054Self-Aligned Contacts in Carbon Devices - A method for forming a semiconductor device includes forming a carbon material on a substrate, forming a gate stack on the carbon material, removing a portion of the substrate to form at least one cavity defined by a portion of the carbon material and the substrate, and forming a conductive contact in the at least one cavity.01-12-2012
20120043585Field Effect Transistor Device with Shaped Conduction Channel - A field effect transistor device includes a substrate, a silicon germanium (SiGe) layer disposed on the substrate, gate dielectric layer lining a surface of a cavity defined by the substrate and the silicon germanium layer, a metallic gate material on the gate dielectric layer, the metallic gate material filling the cavity, a source region, and a drain region.02-23-2012

Sung Su Han, Niskayuna, NY US

Patent application numberDescriptionPublished
20100283033CARBIDE NANOSTRUCTURES AND METHODS FOR MAKING SAME - A structure includes a substrate and a metallized carbon nano-structure extending from a portion of the substrate. In a method of making a metallized carbon nanostructure, at least one carbon structure formed on a substrate is placed in a furnace. A metallic vapor is applied to the carbon nanostructure at a preselected temperature for a preselected period of time so that a metallized nanostructure11-11-2010

Weiqiang Han, Weiqiang, NY US

Patent application numberDescriptionPublished
20090117384Titania Nanocavities and Method of Making - Disclosed herein are compositions of metal oxide nanoparticles having regular polyhedral nanocavities, where the metal oxide can be titania, and where the nanoparticles be nanorods. Also disclosed are titania nanoparticles with nanocavities that are doped with dopants. Methods of making metal oxide nanoparticles with nanocavities are also disclosed. Also disclosed are ultraviolet-blocking compositions including metal oxide nanoparticles with nanocavities, as well as methods of enhancing ultraviolet absorbance efficiency of an ultraviolet blocking composition. Additional uses of metal oxide nanoparticles with nanocavities include solar energy conversion systems and lithium-ion batteries.05-07-2009

Yang Han, New York, NY US

Patent application numberDescriptionPublished
20110160081 FUNCTIONAL COMPLEMENTATION ASSAY FOR DEFINED GPCR OLIGOMERS - The present invention is directed to, inter alia, a biological reagent that includes a complex having a first GPCR and a second GPCR linked to a G-protein, the linkage between the second GPCR and the G-protein being of a length, which pre-vents productive interaction between the G-protein and the second GPCR, wherein the first GPCR and the second GPCR linked to the G-protein alone are incapable of producing a signal when presented with a ligand. The invention also provides methods of producing such a biological reagent, as well as methods of determining oligomeric GPCR interactions, methods of identifying compounds that have an effect on GPCR oligomers, methods of identifying a compound capable of interacting with GPCR oligomers, methods of identifying a compound having the ability to modulate binding between a GPCR oligomer and its ligand, and methods for evaluating differential G-protein coupling.06-30-2011

Yongbin Han, Syracuse, NY US

Patent application numberDescriptionPublished
20080199950Enhanced Bio-Assays By Using Gradient Nanotopgraphy - ABSTRACT A system and method for using gradient nanotopography to increase mammalian cell attachment and cell confinement on surfaces. A surface platform consisting of a thin film of gold possessing a gradient of topography on the surface and self-assembled monolayers of alkanethiols presenting desired functional groups is formed. A gradient in the chemical properties is induced in the terminal groups of the monolayer because of the continuous increase in the surface area and the anisotropy of gold film structure. The gradient nanotopraphy provides simultaneous control of two key properties, the presentation of the terminal functional groups and a continuous increase in the surface density of functional groups on the surface. This control provides for drug screening assays using adherent cell-based experiments.08-21-2008

Yoon-Chi Han, New York, NY US

Patent application numberDescriptionPublished
20110178159INHIBITORY RNAS THAT REGULATE HEMATOPOIETIC CELLS - Provided are compositions and methods for preventing, treating, ameliorating or diagnosing conditions or diseases involving a myeloid cell proliferation disorder. Such compositions and methods target miRNA function myeloproliferative diseases. More particularly, such compositions and methods target miR-29a function in myeloid cell proliferation disorders. Also provided are methods for diagnosing risk or presence of a myeloid cell proliferation disorder in a subject.07-21-2011

Yufeng Han, Rochester, NY US

Patent application numberDescriptionPublished
20080197854Harmonic Derived Arc Detector - An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.08-21-2008
20100201371Harmonic Derived Arc Detector - An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.08-12-2010