| Patent application number | Description | Published |
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| 20090237634 | ENCODER-TYPE MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD TO DETECT AN ERROR ON OR IN A GRID OR GRATING OF AN ENCODER-TYPE MEASUREMENT SYSTEM - An encoder-type measurement system is configured to measure a position dependent signal of a movable object. The measurement system includes a light source and a sensor. The light source and the sensor are mounted on one of the movable object or a substantially stationary frame. The measurement system also includes a reference object that includes a grating or grid mounted on the other of the movable object or the substantially stationary frame. The light source is configured to emit a light beam towards the reference object. The sensor is configured to detect light of the light source reflected by the reference object. The measurement system also includes an error detector capable of detecting errors in or on the grating or grid of the sensor target object during a continuous production process. | 09-24-2009 |
| 20100007867 | Lithographic Apparatus and Calibration Method - In an embodiment, a stage system calibration method includes moving the stage relative to an encoder grid in response to a setpoint signal and measuring a position of the stage by a sensor head cooperating with the encoder grid. The position of the stage is controlled by a stage controller. A signal representative of a difference between the setpoint signal and the position of the stage as measured by the sensor head is registered. The stage system is calibrated from the registered signal representative of the difference. | 01-14-2010 |
| 20100091262 | POSITIONING SYSTEM, METHOD, AND LITHOGRAPHIC APPARATUS - A lithographic apparatus includes a positioner configured to position a first part of the apparatus relative to a second part of the apparatus, the positioner including a motor having a motor position dependent motor constant defining a relation between a motor input and a motor output, and a control system to drive the motor, the control system including a set-point generator to provide a reference signal based on a desired position of the first part relative to the second part, and a controller to provide a drive signal to the motor based on the reference signal, wherein the controller includes a compensator which is configured to at least partially compensate the drive signal for the motor position dependent motor constant. The invention further relates to a positioner, a method to optimize the positioning system, and a method to derive a motor position dependent motor constant. | 04-15-2010 |
| Patent application number | Description | Published |
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| 20080273290 | Electrochemical Double-Layer Capacitor Using Organosilicon Electrolytes - Disclosed are supercapacitors having organosilicon electrolytes, high surface area/porous electrodes, and optionally organosilicon separators. Electrodes are formed from high surface area material (such as porous carbon nanotubes or carbon nanofibers), which has been impregnated with the electrolyte. These type devices appear particularly suitable for use in electric and hybrid electric vehicles. | 11-06-2008 |
| 20080280780 | METHODS FOR THE PRODUCTION OF SENSOR ARRAYS USING ELECTRICALLY ADDRESSABLE ELECTRODES - Methods for building sensor arrays using electrical signals to selectively functionalize individual electrodes in an array of electrically addressable electrodes are provided. These methods are useful for providing sensor arrays for use in chemical and biochemical assays. The method is based on the sequential electrochemical reduction of functional groups on individual electrodes in order to selectively promote the functionalization of selected electrodes with selected binding entities. | 11-13-2008 |
| 20090141376 | SURFACE PLASMON RESONANCE COMPATIBLE CARBON THIN FILMS - SPR-compatible substrates for high density microarray fabrication and analyses are provided. Novel carbon-on-metal thin film substrate architecture permits the integration of surface plasmon resonance detection with photolithographically fabricated biomolecule arrays for the analysis of biomolecular interactions. The utility of the technology is shown in the analysis of specific DNA-DNA, DNA-RNA and DNA-protein binding interactions. These new substrates may be used to determine the secondary structure of RNA molecules, to probe the sequence-specific binding kinetics and affinity of proteins and small molecules, and as substrates for small-molecule combinatorial chemistry platforms for drug discovery applications. | 06-04-2009 |
| 20100108490 | MOLECULAR AND BIOMOLECULAR FUNCTIONALIZATION OF METAL OXIDES - Disclosed herein are methods for functionalizing metal oxides, including tin dioxide. The methods comprise contacting at least one linker precursor comprising a first functional group to a metal oxide and exposing the linker precursor to UV light. The first functional group covalently binds to the metal oxide via a UV light induced reaction. The linker precursor may be an alkene having a vinyl group or an alkyne having an ethynyl group. Other molecules, such as biomolecules and dye molecules, may be bound to the linker precursors. The functionalized metal oxides may be used alone or as coatings on a substrate and find use in a variety of devices, including biosensors and dye sensitized solar cells. | 05-06-2010 |
