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| 20100108501 | MO-BASED SPUTTERING TARGET PLATE AND METHOD FOR MANUFACTURING THE SAME - A method for efficiently manufacturing a large-area Mo-based target plate at a high yield is provided. In the manufacturing method, the condition of the content of a trace element and the rolling condition are used in combination to reduce the deformation resistance and to suppress the occurrence of cracks such as edge cracking. The method for manufacturing an Mo-based sputtering target by rolling an Mo-based ingot includes the steps of: manufacturing the Mo-based ingot in which the oxygen concentration is controlled to 10 ppm by mass or more and 1000 ppm by mass or less; and heating and rolling the Mo-based ingot at a rolling temperature of 600° C. or more and 950° C. or less. | 05-06-2010 |
| 20110068651 | ROTOR FOR PERMANENT MAGNET ROTATING MACHINE - In connection with a permanent magnet rotary machine comprising a rotor comprising a rotor core and a plurality of permanent magnet segments embedded in the rotor core and a stator comprising a stator core having a plurality of slots and windings therein, the rotor and the stator being disposed to define a gap therebetween, or a permanent magnet rotary machine comprising a rotor comprising a rotor core and a plurality of permanent magnet segments mounted on the surface of the rotor core and a stator comprising a stator core having a plurality of slots and windings therein, the rotor and the stator being disposed to define a gap therebetween, the rotor wherein each of the permanent magnet segments is an assembly of further divided permanent magnet pieces, and the coercive force near the surface of the magnet piece is higher than that in the interior of the magnet piece. | 03-24-2011 |
| 20110079325 | METHOD FOR ASSEMBLING ROTOR FOR USE IN IPM ROTARY MACHINE - An interior permanent magnet (IPM) rotary machine comprises a rotor comprising a rotor yoke having bores and a plurality of permanent magnet segments disposed in the bores of the rotor yoke, each permanent magnet segment consisting of a plurality of magnet pieces. The rotor is assembled by inserting the plurality of unbound magnet pieces in each bore for stacking the magnet pieces, and fixedly securing the stacked magnet pieces in the bore. | 04-07-2011 |
| 20110080065 | ROTOR FOR AXIAL GAP-TYPE PERMANENT MAGNETIC ROTATING MACHINE - An axial gap-type permanent magnetic rotating machine comprises a rotor comprising a rotating shaft having an axis of rotation, a rotor yoke of disc shape radially extending from the shaft, and a plurality of permanent magnet segments circumferentially arranged on a surface of the rotor yoke such that each permanent magnet segment may have a magnetization direction parallel to the axis of rotation, and a stator having a plurality of circumferentially arranged coils and disposed to define an axial gap with the rotor. In the rotor, each permanent magnet segment is an assembly of two or more divided permanent magnet pieces, and the coercive force near the surface of the magnet piece is higher than that in the interior of the magnet piece. | 04-07-2011 |
| 20110080066 | ROTOR FOR PERMANENT MAGNET ROTARY MACHINE - A permanent magnet rotary machine comprises a rotor comprising a rotor core and a plurality of permanent magnet segments embedded in the rotor core and a stator having a plurality of coils and disposed to define a gap with the rotor, or a permanent magnet rotary machine comprises a rotor comprising a rotor core and a plurality of permanent magnet segments mounted on the surface of the rotor core and a stator having a plurality of coils and disposed to define a gap with the rotor. In the rotor, each permanent magnet segment is an assembly of divided permanent magnet pieces, the coercive force near the surface of the magnet piece is higher than that in the interior of the magnet piece, and the assembly allows for electrical conduction between the magnet pieces. | 04-07-2011 |
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| 20100117280 | SUPPORTING MEMBER AND CARRIER, AND METHOD OF SUPPORTING - A supporting member, carrier and method of supporting are provided with a supporting member main body mounted to freely rotate. The supporting member main body is provided with a plurality of projections extending radially from a central rotation axis. Since the substrate is supported by abutment of the projections with an end of the substrate, the occurrence of cracking in the substrate can be prevented or the durability of the supporting member main body can be increased. | 05-13-2010 |
| 20100126415 | CONVEYOR AND DEPOSITION APPARATUS, AND MAINTENANCE METHOD THEREOF - A conveyor and a deposition apparatus, and a maintenance method thereof are disclosed. The conveyor includes a frame; a lower support mechanism for supporting a carrier on which is longitudinally mounted a substrate and for transferring the carrier; and an upper support mechanism for supporting the carrier, in which the frame comprises a lower frame and an upper frame, and in which the lower support mechanism is provided on the lower frame and the upper support mechanism is provided on the upper frame, the upper frame and the lower frame being configured to be separately movable. Therefore, with the rotational movement of the upper frame, it is possible to arrange a cathode member in a space formed above the lower frame. This can make the spacing between the deposition treatment passage and the carrier transfer passage small. As a result, it is possible to make an inner court of the deposition apparatus narrow. Therefore, in the conveyor capable of transferring a carrier and in the deposition apparatus including the conveyor and further including a vacuum treatment apparatus and a transfer system, it is possible to make the installation area thereof small and narrow. | 05-27-2010 |
| 20100175990 | DUMMY SUBSTRATE, AND START METHOD OF, RETENTION/MODIFICATION METHOD OF DEPOSITION CONDITION, AND STOP METHOD OF DEPOSITION APPARATUS USING SAME - This dummy substrate is for use in an inline reactive sputtering apparatus. The main unit thereof is made of a rectangular-plate-like frame structure in which an opening portion in a rectangular shape is formed in a metal plate in a similar shape. It is configured such that a contact portion of a carrier with the main unit is covered with the main unit. As a result, even while the sputtering apparatus is in operation, there is no possibility of the occurrence of undesirable situations such as glass cracking, making it possible to significantly increase the number of times the dummy substrate is used. Furthermore, the dummy substrate continues to cover the contact portion with the carrier. Thereby, it is possible to prevent deposition of a substance left in a sputter deposition chamber, especially a compound thin film, on the contact portion of the carrier with the substrate. Therefore, it is possible to prevent undesirable situations such as an abnormal discharge due to the deposition of the compound thin film. As a result of these, it is possible to start (activate) an apparatus that deposits a compound thin film by the sputtering method, retain and modify a deposition condition in the apparatus, and stop (deactivate) the apparatus in a shorter time, and more efficiently and at a lower cost than before. | 07-15-2010 |
| 20100288625 | FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD - A film deposition apparatus that deposits a compound thin film on a front surface of a substrate held in a sputter deposition chamber by reactive sputtering, in which the sputter deposition chamber includes a first film quality adjustment gas introduction device that introduces a film quality adjustment gas to a rear surface of the substrate, the film quality adjustment gas adjusting a film quality of a compound thin film deposited on the front surface of the substrate. | 11-18-2010 |
| 20100294649 | SPUTTERING FILM FORMING METHOD AND SPUTTERING FILM FORMING APPARATUS - In a sputtering film forming method of the invention, a magnetron cathode with a magnet arranged on a back surface side of a target is used, a substrate is transported in a first direction on a front surface side of the target, and the magnet is moved in reciprocating motion in the first direction and a second direction which is opposite to the first direction, thereby performing sputtering film formation on the substrate. Sputtering film formation is performed where a speed of the movement of the magnet in the first direction and a speed of the movement of the magnet in the second direction are different from each other. | 11-25-2010 |
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| 20100005186 | ADAPTIVE CONTROL OF LAYER COUNT OF LAYERED MEDIA STREAM - A technique is disclosed of controlling a layer count of actual layers within a layered media stream having a maximum number “M” of layers that include “m(0≦m≦M)” video layers and an audio layer. The technique includes: receiving from at least one destination a quality event indicative of audio quality of the audio layer; calculating an estimated value of subjective quality of the received audio layer, based on the received quality event; calculating a quality value indicative of transmission quality of the media stream, based on the calculated subjective quality, and a ratio of a layer count “m” of at least one of the video layers, to the maximum number “M;” and, based on the calculated quality value, controlling a layer count of actual layers within the media stream. | 01-07-2010 |
| 20100246596 | CONTROL OF PACKET BUFFER USING TOKEN BUCKETS WITH DIFFERENT TOKEN BUCKET SIZES - Control of readout of packets from a packet buffer is disclosed in which equal numbers of tokens are removed and used from token buckets having different bucket sizes; tokens are generated at token rates for the token buckets, wherein each token rate is preset such that the larger the token bucket size, the lower the token rate, and the generated tokens are added to the token buckets; a used-token count is measured for each token bucket, and a stored-token count is measured for each token bucket, with the stored-token count given a negative value if each token bucket is empty; and a number of data packets are read out of the packet buffer, which depends on the measured value of the used-token count for each token buffer. | 09-30-2010 |
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| 20100228757 | INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND MEMORY MEDIUM - An information processing system using apparatus data recorded in a database in accordance with a data definition updated as needed, comprises a storage unit configured to store a data definition history that makes a data definition version and a period during which a data definition for the data definition version was used to correspond to each other, a data definition library in which the data definition version and the data definition for the data definition version are registered in correspondence with each other, and a detection unit configured to detect, from the data definition history, a data definition version of a data definition used in a period designated via a user interface, to detect a data definition for the detected data definition version from the data definition library, and to provide the detected data definition version and data definition to the user interface. | 09-09-2010 |
| 20100235384 | INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM - An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface. | 09-16-2010 |
| 20100248165 | INFORMATION PROCESSING METHOD, EXPOSURE PROCESSING SYSTEM USING SAME, DEVICE MANUFACTURING METHOD, AND INFORMATION PROCESSING APPARATUS - The information processing method of the present invention is provided that specifies an extraction period for extracting apparatus data to be generated by an industrial apparatus and analyzes a state of the industrial apparatus based on the apparatus data having an occurrence time within the extraction period. The information processing method includes a period changing step of changing the extraction period so as to enable the apparatus data required for the analysis of the state to be included, when the apparatus data required for the analysis of the state is not included within the extraction period. | 09-30-2010 |
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| 20090139864 | Vertical Substrate Transfer Apparatus and Film-Forming Apparatus - To provide a vertical substrate transfer apparatus and a film-forming apparatus capable of, regardless of a carrying position of a substrate, subjecting either surface thereof to film-formation, and capable of supporting and carrying the substrate without interfering with a non-film-forming surface. | 06-04-2009 |
| 20090277798 | CATALYST ATTACHMENT-ENHANCING AGENT - Disclosed is a technique for direct plating which causes no deposition of a metal on the rack coating. A catalyst attachment-enhancing agent comprising a high molecular compound having primary, secondary and tertiary amino groups as active ingredient; and a method for direct electroplating onto a Pd/Sn colloidal catalyst which has been subjected to a conductivity-imparting treatment, comprising the step of, prior to the attachment of the Pd/Sn colloidal catalyst to a non-conductive material, treating the non-conductive material with a catalyst attachment-enhancing agent which comprises a high molecular compound having primary, secondary and tertiary amino groups as an active ingredient. | 11-12-2009 |
| 20100001301 | ORGANIC LIGHT EMITTING DEVICE, METHOD FOR PRODUCING THEREOF AND ARRAY OF ORGANIC LIGHT EMITTING DEVICES - The present invention is directed to an organic light emitting device (OLED) including a first electrode, a second electrode, at least one layer of organic material arranged between the first electrode and the second electrode, and a dielectric capping layer arranged on the second electrode opposite to the first electrode, wherein the capping layer comprises an outer surface, opposite to the second electrode, for emission of light generated in the at least one layer of organic material. The capping layer has the effect that a reflectance of external light is reduced whereas outcoupling of the light generated in the at least one layer of organic material through the capping layer is increased. | 01-07-2010 |
