Patent application number | Description | Published |
20090057769 | CMOS DEVICE HAVING GATE INSULATION LAYERS OF DIFFERENT TYPE AND THICKNESS AND A METHOD OF FORMING THE SAME - In the process sequence for replacing conventional gate electrode structures by high-k metal gate structures, the number of additional masking steps may be maintained at a low level, for instance by using highly selective etch steps, thereby maintaining a high degree of compatibility with conventional CMOS techniques. Furthermore, the techniques disclosed herein enable compatibility to front-end process techniques and back-end process techniques, thereby allowing the integration of well-established strain-inducing mechanisms in the transistor level as well as in the contact level. | 03-05-2009 |
20090321843 | CMOS DEVICE COMPRISING MOS TRANSISTORS WITH RECESSED DRAIN AND SOURCE AREAS AND A SI/GE MATERIAL IN THE DRAIN AND SOURCE AREAS OF THE PMOS TRANSISTOR - The present disclosure relates to semiconductor devices and a process sequence in which a semiconductor alloy, such as silicon/germanium, may be formed in an early manufacturing stage, wherein other performance-increasing mechanisms, such as a recessed drain and source configuration, possibly in combination with high-k dielectrics and metal gates, may be incorporated in an efficient manner while still maintaining a high degree of compatibility with conventional process techniques. | 12-31-2009 |
20100025742 | TRANSISTOR HAVING A STRAINED CHANNEL REGION CAUSED BY HYDROGEN-INDUCED LATTICE DEFORMATION - A lattice distortion may be achieved by incorporating a hydrogen species into a semiconductor material, such as silicon, without destroying the lattice structure. For example, by incorporating the hydrogen species on the basis of an electron shower, a tensile strain component may be obtained in the channel of N-channel transistors. | 02-04-2010 |
20100136762 | ENHANCING INTEGRITY OF A HIGH-K GATE STACK BY PROTECTING A LINER AT THE GATE BOTTOM DURING GATE HEAD EXPOSURE - Sophisticated gate stacks including a high-k dielectric material and a metal-containing electrode material may be covered by a protection liner, such as a silicon nitride liner, which may be maintained throughout the entire manufacturing sequence at the bottom of the gate stacks. For this purpose, a mask material may be applied prior to removing cap materials and spacer layers that may be used for encapsulating the gate stacks during the selective epitaxial growth of a strain-inducing semiconductor alloy. Consequently, enhanced integrity may be maintained throughout the entire manufacturing sequence, while at the same time one or more lithography processes may be avoided. | 06-03-2010 |
20110024805 | USING HIGH-K DIELECTRICS AS HIGHLY SELECTIVE ETCH STOP MATERIALS IN SEMICONDUCTOR DEVICES - A spacer structure in sophisticated semiconductor devices is formed on the basis of a high-k dielectric material, which provides superior etch resistivity compared to conventionally used silicon dioxide liners. Consequently, a reduced thickness of the etch stop material may nevertheless provide superior etch resistivity, thereby reducing negative effects, such as dopant loss in the drain and source extension regions, creating a pronounced surface topography and the like, as are typically associated with conventional spacer material systems. | 02-03-2011 |
20130109174 | Methods of Forming Conductive Structures Using a Spacer Erosion Technique | 05-02-2013 |
20130157432 | ENHANCING INTEGRITY OF A HIGH-K GATE STACK BY PROTECTING A LINER AT THE GATE BOTTOM DURING GATE HEAD EXPOSURE - Sophisticated gate stacks including a high-k dielectric material and a metal-containing electrode material may be covered by a protection liner, such as a silicon nitride liner, which may be maintained throughout the entire manufacturing sequence at the bottom of the gate stacks. For this purpose, a mask material may be applied prior to removing cap materials and spacer layers that may be used for encapsulating the gate stacks during the selective epitaxial growth of a strain-inducing semiconductor alloy. Consequently, enhanced integrity may be maintained throughout the entire manufacturing sequence, while at the same time one or more lithography processes may be avoided. | 06-20-2013 |
20130181265 | Methods of Forming a Gate Cap Layer Above a Replacement Gate Structure and a Semiconductor Device That Includes Such a Gate Structure and Cap Layer - Disclosed herein are various methods of forming a gate cap layer above a replacement gate structure, and a device having such a cap layer. In one example, a device disclosed herein includes a replacement gate structure having a dished upper surface, sidewall spacers positioned proximate the replacement gate structure and a gate cap layer positioned above the replacement gate structure, wherein the gate cap layer has a bottom surface that corresponds to the dished upper surface of the replacement gate structure. | 07-18-2013 |