| Patent application number | Description | Published |
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| 20090090531 | MICROMECHANICAL COMPONENT HAVING A CAP HAVING A CLOSURE - A micromechanical component having a substrate, having a cavity and having a cap that bounds the cavity. The cap has an access opening to the cavity. The cap has a diaphragm for closing the access opening. | 04-09-2009 |
| 20090168836 | MICROMECHANICAL STRUCTURE HAVING A SUBSTRATE AND A THERMOELEMENT, TEMPERATURE SENSOR AND/OR RADIATION SENSOR, AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE - A micromechanical structure, a temperature and/or radiation sensor, and a method for manufacturing a micromechanical structure are suggested, the micromechanical structure including a substrate and a thermoelement having a reference contact and a measuring contact, the substrate having a main substrate plane), the thermoelement having a first material between the reference contact and the measuring contact and a second material between the measuring contact and a further reference contact, either the first material being situated over the second material or the second material being situated over the first material between the reference contact and the measuring contact in a direction perpendicular to the main substrate plane. | 07-02-2009 |
| 20090174148 | Method for Sealing an Opening - An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid. | 07-09-2009 |
| 20100258884 | Method for attaching a first carrier device to a second carrier device and micromechanical components - A method for attaching a first carrier device to a second carrier device includes forming at least one first bond layer and/or solder layer on a first exterior of the first carrier device, a partial surface being framed by the at least one first bond layer and/or solder layer, and placing the first carrier device on the second carrier device and fixedly bonding or soldering the first carrier device to the second carrier device. The at least one first bond layer and/or solder layer includes a first cover area which is larger than a first contact area. | 10-14-2010 |
| 20110006444 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANCAL COMPONENT HAVING A THIN-LAWYER CAP - A micromechanical component having a substrate, a micromechanical functional layer situated above the substrate, and an encapsulation layer situated above the functional layer, and a method for producing the micromechanical component are provided, the encapsulation layer having at least one trench, and a bridging of the trench by at least one electrically insulating connection link is provided. | 01-13-2011 |
| 20110030475 | SENSOR ELEMENT AND METHOD FOR OPERATING A SENSOR ELEMENT - A sensor element, in particular a multichannel acceleration sensor having a substrate and a seismic mass, the sensor element having a detecting element for detecting a deflection of the seismic mass relative to the substrate, and the sensor element having an excitation element for exciting a deflection of the seismic mass perpendicular to the main extension plane. | 02-10-2011 |
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| 20110057131 | MANUALLY OPERABLE DRIVE MODULE - A valve drive system has a valve drive device and a hand-operated apparatus to trigger control actions in the valve drive device. The hand-operated apparatus includes a magnet arrangement, and the valve drive device includes a magnetic field sensor arrangement adjusted to the magnet arrangement of the hand-operated apparatus. | 03-10-2011 |
| 20110083502 | METERING DEVICE FOR FLUID MIXTURES - The device for metering fluid mixtures, in particular liquids containing a gas such as carbon dioxide, includes a flow sensor, a metering valve, and a controller that drives the metering valve as a function of a set point and of the flow rate measured. The flow sensor has an impeller wheel having a horizontal axis, the fluid mixture being guided on an arcuate path on the periphery of the impeller wheel, the path being directed from bottom to top. Despite the presence of gas, a precise metering is achieved. | 04-14-2011 |
| 20110192471 | VARIABLE FLOW RATE VALVE SYSTEM - A variable flow rate valve system adjusts flow rate using the flow medium itself by creating differential pressures that determine a position of a valve member in relation to an associated valve seat. The valve system includes a diaphragm that divides a valve chamber into a control chamber and a flow chamber connected with an inlet. A valve body is connected with the diaphragm and cooperates with a valve seat to modulate flow from the inlet to an outlet and through the flow chamber. A first pilot valve in a first bypass extends between the outlet and the control chamber, and a second pilot valve in a second bypass extends between the inlet and the control chamber. The valves are controlled to selectively open or close respective bypasses to vary the flow through the flow chamber between a fully open and a fully closed condition in response to a control signal. | 08-11-2011 |
| Patent application number | Description | Published |
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| 20090181185 | METHOD AND APPARATUS FOR SURFACE TREATMENT OF CONTAINERS OR OBJECTS - The invention relates to a method and a device for treating the surfaces of containers or objects in which the inner surfaces to be treated are exposed to functionalizing plasma during a process step, and/or to coating plasma during a further process step. The functionalizing plasma and the coating plasma are preferably produced by a plasma source which is located inside or outside the containers or objects. | 07-16-2009 |
| 20090296099 | Interferometric Layer Thickness Determination - An interferometric measuring device for measuring layer thicknesses of partially transparent layers on substrates, especially of wear protection layers based on carbon, having a scanning device which scans these layers automatically in its depth direction, using which an interference plane is displaceable relative to the layer structure, having an interferometer part that has a white light interferometer and/or a wavelength-scanning interferometer. Also described is a corresponding evaluation method. | 12-03-2009 |
| 20100203253 | Plasma system and method of producing a functional coating - A plasma system has at least one inductively coupled high-frequency plasma jet source having a burner body delimiting a plasma generating space, having an outlet orifice for the plasma jet, and a chamber communicating with the plasma jet source through the outlet orifice, having a substrate situated in the chamber, where it is exposed to the plasma jet. The substrate is situated on a substrate electrode to which an electric voltage may be applied. In addition, a method of producing a functional coating on the substrate using such a plasma system is also described. In a preferred embodiment, during operation of the plasma system, both the plasma jet and the electric voltage on the substrate electrode are pulsed and/or a pressure gradient is maintained between the interior of the plasma jet source and the interior of the chamber. | 08-12-2010 |
| 20110129617 | Plasma system and method of producing a functional coating - A plasma system has at least one inductively coupled high-frequency plasma jet source having a burner body delimiting a plasma generating space having an outlet orifice for the plasma jet, a coil surrounding the plasma generating space in some areas, an inlet for supplying a gas and/or a precursor material into the plasma generating space and a high-frequency generator which is connected to the coil for igniting the plasma and for injecting an electric power into the plasma. The plasma jet source has an electric component using which the intensity of the plasma jet is variable periodically over time. In addition, a method of producing the functional coating on a substrate by using this plasma system is described. | 06-02-2011 |
