Patent application number | Description | Published |
20090050050 | DEEP-EUTECTIC MELT GROWTH OF NITRIDE CRYSTALS - Single-crystal materials are fabricated from a melt at temperatures below their melting points. | 02-26-2009 |
20090283028 | NITRIDE SEMICONDUCTOR HETEROSTRUCTURES AND RELATED METHODS - Semiconductor structures and devices based thereon include an aluminum nitride single-crystal substrate and at least one layer epitaxially grown thereover. The epitaxial layer may comprise at least one of AlN, GaN, InN, or any binary or tertiary alloy combination thereof, and have an average dislocation density within the semiconductor heterostructure is less than about 10 | 11-19-2009 |
20100135349 | NITRIDE SEMICONDUCTOR HETEROSTRUCTURES AND RELATED METHODS - Semiconductor structures and devices based thereon include an aluminum nitride single-crystal substrate and at least one layer epitaxially grown thereover. The epitaxial layer may comprise at least one of AlN, GaN, InN, or any binary or tertiary alloy combination thereof, and have an average dislocation density within the semiconductor heterostructure is less than about 10 | 06-03-2010 |
20100187541 | Doped Aluminum Nitride Crystals and Methods of Making Them - Fabrication of doped AlN crystals and/or AlGaN epitaxial layers with high conductivity and mobility is accomplished by, for example, forming mixed crystals including a plurality of impurity species and electrically activating at least a portion of the crystal. | 07-29-2010 |
20110008621 | ALUMINUM NITRIDE BULK CRYSTALS HAVING HIGH TRANSPARENCY TO ULTRAVIOLET LIGHT AND METHODS OF FORMING THEM - In various embodiments, methods of forming single-crystal AlN include providing a substantially undoped polycrystalline AlN ceramic having an oxygen concentration less than approximately 100 ppm, forming a single-crystal bulk AlN crystal by a sublimation-recondensation process at a temperature greater than approximately 2000° C., and cooling the bulk AlN crystal to a first temperature between approximately 1500° C. and approximately 1800° C. at a first rate less than approximately 250° C./hour. | 01-13-2011 |
20110011332 | METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE - A method and apparatus for producing bulk single crystals of AlN having low dislocation densities of about 10,000 cm | 01-20-2011 |
20130152852 | LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM - Reducing the microvoid (MV) density in AlN ameliorates numerous problems related to cracking during crystal growth, etch pit generation during the polishing, reduction of the optical transparency in an AlN wafer, and, possibly, growth pit formation during epitaxial growth of AlN and/or AlGaN. This facilitates practical crystal production strategies and the formation of large, bulk AlN crystals with low defect densities—e.g., a dislocation density below 10 | 06-20-2013 |
20130157442 | DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH - Bulk single crystal of aluminum nitride (AlN) having an areal planar defect density≦100 cm | 06-20-2013 |
20140061666 | METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE - Bulk single crystals of AlN having a diameter greater than about 25 mm and dislocation densities of about 10,000 cm | 03-06-2014 |
20140093671 | LARGE ALUMINUM NITRIDE CRYSTALS WITH REDUCED DEFECTS AND METHODS OF MAKING THEM - Reducing the microvoid (MV) density in AlN ameliorates numerous problems related to cracking during crystal growth, etch pit generation during the polishing, reduction of the optical transparency in an AlN wafer, and, possibly, growth pit formation during epitaxial growth of AlN and/or AlGaN. This facilitates practical crystal production strategies and the formation of large, bulk AlN crystals with low defect densities—e.g., a dislocation density below 10 | 04-03-2014 |
20140231725 | DOPED ALUMINUM NITRIDE CRYSTALS AND METHODS OF MAKING THEM - Fabrication of doped AlN crystals and/or AlGaN epitaxial layers with high conductivity and mobility is accomplished by, for example, forming mixed crystals including a plurality of impurity species and electrically activating at least a portion of the crystal. | 08-21-2014 |
20150013592 | DEFECT REDUCTION IN SEEDED ALUMINUM NITRIDE CRYSTAL GROWTH - Bulk single crystal of aluminum nitride (AlN) having an areal planar defect density ≦100 cm | 01-15-2015 |
20150079329 | METHOD AND APPARATUS FOR PRODUCING LARGE, SINGLE-CRYSTALS OF ALUMINUM NITRIDE - Bulk single crystals of AlN having a diameter greater than about 25 mm and dislocation densities of about 10,000 cm | 03-19-2015 |