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Gerd Benner, Aalen DE

Gerd Benner, Aalen DE

Patent application numberDescriptionPublished
20080296509Phase-shifting element and particle beam device having a phase-shifting element - A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.12-04-2008
20090039257Electron beam device - An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.02-12-2009
20100038537Particle beam apparatus having an annularly-shaped illumination aperture - A particle beam apparatus has an optical axis (OA), an illuminating system (02-18-2010
20100181481Phase contrast electron microscope - A phase contrast electron microscope has an objective (07-22-2010
20100258719PARTICLE-BEAM MICROSCOPE - A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.10-14-2010
20110210249Transmission Electron Microscope - A transmission electron microscope in which a sample is positioned in a sample plane 09-01-2011
20110233402Phase-shifting element and particle beam device having a phase-shifting element - A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.09-29-2011
20120025094CHARGED PARTICLE BEAM SYSTEM - A charged particle beam system for performing precession diffraction includes a lens 02-02-2012

Patent applications by Gerd Benner, Aalen DE