Patent application number | Description | Published |
20080223716 | Method And Control System For Depositing A Layer - A method and control system are provided for depositing a layer in a sputter-deposition system having a target cathode. A first dependence relationship of a deposition rate of the layer on an operating parameter, selected from cathode voltage, cathode current, and cathode power, is provided prior to deposition of the layer. A second dependence relationship of the operating parameter on time is measured during deposition of the layer, while a different operating parameter, also selected from cathode voltage, cathode current, and cathode power, is held substantially constant. On the basis of the first and second dependence relationships, a deposition time for the layer is dynamically determined during deposition of the layer. | 09-18-2008 |
20090250341 | ANODE FOR SPUTTER COATING - A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode. | 10-08-2009 |
20100225836 | THREE-DIMENSIONAL (3D) COLOR DISPLAY SYSTEM - The present invention provides a three-dimensional (3D) color display system, and a backlight for a liquid-crystal display (LCD) panel in such a 3D color display system. The backlight comprises a right-eye backlight module, a left-eye backlight module, and a backlight control module. The right-eye backlight module transmits a right-eye first-color band, a right-eye second-color band, and a right-eye third-color band, from which right-eye images are produced, to the LCD panel. The left-eye backlight module transmits a left-eye first-color band, a left-eye second-color band, and a left-eye third-color band, from which left-eye images are produced, to the LCD panel. The backlight control module activates the right-eye backlight module during right-eye activation intervals and the left-eye backlight module during left-eye activation intervals, the right-eye activation intervals and the left-eye activation intervals alternating at a switching rate. | 09-09-2010 |
20110253529 | RING CATHODE FOR USE IN A MAGNETRON SPUTTERING DEVICE - The present invention relates to a magnetron sputtering device including a large ring cathode having a defined inner radius. The position of the ring cathode is offset in relation to a center point of a planetary drive system. An anode or reactive gas source may be located within the inner radius of the ring cathode. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask. | 10-20-2011 |
20120012459 | INTEGRATED ANODE AND ACTIVATED REACTIVE GAS SOURCE FOR USE IN A MAGNETRON SPUTTERING DEVICE - The invention relates to an integrated anode and activated reactive gas source for use in a magnetron sputtering device and a magnetron sputtering device incorporating the same. The integrated anode and activated reactive gas source comprises a vessel having an interior conductive surface, comprising the anode, and an insulated outer body isolated from the chamber walls of the coating chamber. The vessel has a single opening with a circumference smaller that that of the vessel in communication with the coating chamber. Sputtering gas and reactive gas are coupled through an input into the vessel and through the single opening into the coating chamber. A plasma is ignited by the high density of electrons coming from the cathode and returning to the power supply through the anode. A relatively low anode voltage is sufficient to maintain a plasma of activated reactive gas to form stoichiometric dielectric coatings. | 01-19-2012 |
20130256720 | BROADBAND DIELECTRIC REFLECTORS FOR LED - A broadband, omnidirectional, multi-layer, dielectric reflector for an LED in a white light emitting device provides both near 100% reflectivity across the visible spectrum of light, and electrical insulation between the substrate and the electrical circuitry used to power and control the LED. When a sealant material, having a higher index of refraction than air, is used to protect the LED and the accompanying electrical circuitry, an aluminum reflector layer or substrate is provided to make up for the loss of reflectivity at certain angles of incidence. | 10-03-2013 |
20130292244 | REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS - Reactive sputter deposition method and system are disclosed, in which a catalyst gas, such as water vapor, is used to increase the overall deposition rate substantially without compromising formation of a dielectric compound layer and its optical transmission. Addition to the sputtering or reactive gas of the catalyst gas can result in an increase of a deposition rate of the dielectric oxide film substantially without increasing an optical absorption of the film. | 11-07-2013 |
20140034986 | BROADBAND DIELECTRIC REFLECTORS FOR LED WITH VARYING THICKNESS - A broadband, omnidirectional, multi-layer, dielectric reflector for an LED in a white light emitting device provides both near 100% reflectivity across the visible spectrum of light, and electrical insulation between the substrate and the electrical circuitry used to power and control the LED. When a sealant material, having a higher index of refraction than air, is used to protect the LED and the accompanying electrical circuitry, an aluminum reflector layer or substrate is provided to make up for the loss of reflectivity at certain angles of incidence. The dielectric reflector includes two separate sections with two different thicknesses, a thinner section below the LED providing better heat conductivity, and a thicker section surrounding the LED providing better reflectivity. | 02-06-2014 |
20140168761 | SENSOR DEVICE INCLUDING ONE OR MORE METAL-DIELECTRIC OPTICAL FILTERS - A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers. | 06-19-2014 |
20140170765 | SPECTROSCOPIC ASSEMBLY AND METHOD - A spectrometer assembly is provided having an optical transmission filter including a stack of continuous, non-patterned alternating dielectric and metal layers. Angle-dependent transmission wavelength shift of the optical transmission filter with continuous metal layers is small e.g. in comparison with multilayer dielectric filters, facilitating size reduction of the spectrometer assembly. | 06-19-2014 |