| Patent application number | Description | Published |
|---|
| 20090024967 | COMPUTER-IMPLEMENTED METHODS, SYSTEMS, AND COMPUTER-READABLE MEDIA FOR DETERMINING A MODEL FOR PREDICTING PRINTABILITY OF RETICLE FEATURES ON A WAFER - Computer-implemented methods, systems, and computer-readable media for determining a model for predicting printability of reticle features on a wafer are provided. One method includes generating simulated images of the reticle features printed on the wafer using different generated models for a set of different values of exposure conditions. The method also includes determining one or more characteristics of the reticle features of the simulated images. In addition, the method includes comparing the one or more characteristics of the reticle features of the simulated images to one or more characteristics of the reticle features printed on the wafer using a lithography process. The method further includes selecting one of the different generated models as the model to be used for predicting the printability of the reticle features based on results of the comparing step. | 01-22-2009 |
| 20100001269 | Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate - In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions. | 01-07-2010 |
| 20100258444 | APPARATUS AND METHODS FOR CHEMICAL ELECTRODEPOSITION ON A SUBSTRATE FOR SOLAR CELL FABRICATION - The invention relates generally to electrodeposition apparatus and methods. The invention finds particular use in fabricating thin film solar cells. Electrodeposition is improved by using a continuous thin film flow of electrodeposition solution between a substrate and a counter electrode, positioned in close proximity to each other, while the plating current is applied. Apparatus for carrying out methods described herein are highlighted particularly by flow manifolds that allow electrodeposition in the manner described. | 10-14-2010 |
| 20100273287 | METHODS FOR INTEGRATING QUANTUM WINDOW STRUCTURES INTO SOLAR CELLS - The invention relates generally to methods of fabricating photovoltaic stack structures. Methods of the invention find particular use in solar cell fabrication. The performance of a photovoltaic stack can be improved by independent control of fabrication conditions during stack formation, particularly depositing window layers after formation of absorber layers where fabrication conditions of absorber layers would otherwise detrimentally affect quantum grain structures of window layers. | 10-28-2010 |
| 20110248264 | Methods of Combinatorial Processing for Screening Multiple Samples on a Semiconductor Substrate - In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions. | 10-13-2011 |
| 20110290641 | APPARATUS AND METHODS FOR FAST CHEMICAL ELECTRODEPOSITION FOR FABRICATION OF SOLAR CELLS - The invention relates generally to electrodeposition apparatus and methods. When depositing films via electrodeposition, where the substrate has an inherent resistivity, for example, sheet resistance in a thin film, methods and apparatus of the invention are used to electrodeposit materials onto the substrate by forming a plurality of ohmic contacts to the substrate surface and thereby overcome the inherent resistance and electrodeposit uniform films. Methods and apparatus of the invention find particular use in solar cell fabrication. | 12-01-2011 |
| 20110290654 | APPARATUS AND METHODS FOR FAST CHEMICAL ELECTRODEPOSITION FOR FABRICATION OF SOLAR CELLS - The invention relates generally to electrodeposition apparatus and methods. When depositing films via electrodeposition, where the substrate has an inherent resistivity, for example, sheet resistance in a thin film, methods and apparatus of the invention are used to electrodeposit materials onto the substrate by forming a plurality of ohmic contacts to the substrate surface and thereby overcome the inherent resistance and electrodeposit uniform films. Methods and apparatus of the invention find particular use in solar cell fabrication. | 12-01-2011 |
| 20110303696 | MAINTAINING FLOW RATE OF A FLUID - A pressure gauge may be coupled to a supply line which carries liquid from a bottle to either one or more mixing vessels and/or one or more reactors in a combinatorial processing tool. A control device may monitor the pressure measured by the pressure gauge, and the control device may be configured to change the pressure supplied to the bottle based on a comparison of the measured pressure to a predetermined pressure value. The control device may adjust the pressure provided to the bottle using a pressure regulator coupled to the pressure source. By changing the pressure provided to the bottle, the control device may maintain a relatively constant flow rate of fluids from the liquid source into one or more mixing vessels and/or the one or more reactors. | 12-15-2011 |
