| Patent application number | Description | Published |
|---|
| 20080303377 | PIEZOELECTRIC SUBSTANCE AND PIEZOELECTRIC ELEMENT - A piezoelectric substance has a substrate, an electrode formed on the substrate, and a piezoelectric film formed on the electrode. The piezoelectric film is formed of crystals having a main phase of (Na | 12-11-2008 |
| 20090075066 | Piezoelectric element - A piezoelectric film formed above a Si substrate. The piezoelectric film is formed of a potassium sodium niobate expressed by a general formula (K,Na)NbO | 03-19-2009 |
| 20090096328 | Substrate with a piezoelectric thin film - A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO | 04-16-2009 |
| 20090189482 | Piezoelectric Thin Film Device - A piezoelectric thin film device according to the present invention comprises a lower electrode, a piezoelectric thin film and an upper electrode, in which the piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K | 07-30-2009 |
| 20090189490 | Piezoelectric Thin Film Device - A piezoelectric thin film device according to the present invention comprises a lower electrode, a piezoelectric thin film and a upper electrode, in which the piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K | 07-30-2009 |
| 20100156247 | Substrate with a piezoelectric thin film - A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO | 06-24-2010 |
| 20100237745 | Piezoelectric Thin Film Device - A sensor or actuator includes a piezoelectric thin film device including a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K | 09-23-2010 |
| 20110074251 | Piezoelectric Thin Film Device - A sensor for detecting a physical quantity includes a piezoelectric thin film device having a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K | 03-31-2011 |
