| Patent application number | Description | Published |
|---|
| 20090279660 | X-RAY COMPUTED TOMOGRAPHIC APPARATUS - A rotor is rotatably supported in a gantry housing having a substantially sealed structure. An X-ray tube is provided in the rotor. A cooler is provided in the rotor and cools a refrigerant within the X-ray tube. An X-ray detector is provided in the rotor. A reconstruction unit reconstructs an image on the basis of an output of the X-ray detector. A radiator is fixed inside the gantry housing at a position opposite to an exhaust opening of the cooler when the rotor is stationary. | 11-12-2009 |
| 20090323890 | X-RAY TOMOGRAPHY APPARATUS - Fins are arranged on the rotating side of an X-ray computed tomography apparatus. The fins are rotated to generate airflow as the rotating side is rotated. This airflow serves to discharge wear debris to the outside of the X-ray CT apparatus, thereby preventing the wear debris from scattering toward an X-ray tube and support bearing. In consequence, in the X-ray CT apparatus provided with a slip ring, the wear debris produced in a contact space between the slip ring and a brush can be prevented from being scattered in the apparatus. | 12-31-2009 |
| 20100080338 | MEDICAL X-RAY CT APPARATUS - In a medical X-ray CT apparatus, a rotary portion is rotated, and a wind is produced inside the apparatus by the rotation of the rotary portion. An expanded cover portion is forced to vibrate by the wind, and noise is produced. The expanded cover portion is provided with at least one curved member including both ends. The curved member is arranged to extend along a virtual projection line obtained by geometrically projecting a virtual straight line connecting, to each other, the two ends fixed to an outer peripheral edge of an opening of the expanded cover portion onto a surface of the expanded cover portion, and the vibration of the expanded cover portion is reduced. | 04-01-2010 |
| 20100177863 | X-RAY CT SCANNER - According to an aspect of the present invention, there is provided an X-ray CT scanner including: a gantry; a revolving body provided inside the gantry; an X-ray tube assembly provided in the revolving body; a heat radiator provided inside the revolving body so as to be connected to the X-ray tube assembly; a heat storage material provided in the heat radiator and capable of accumulating a heat generated by the X-ray tube assembly; and an X-ray detector provided inside the revolving body so as to oppose the X-ray tube assembly. | 07-15-2010 |
| Patent application number | Description | Published |
|---|
| 20110065365 | GRINDING METHOD AND GRINDING APPARATUS FOR POLISHING PAD FOR USE IN DOUBLE-SIDE POLISHING DEVICE - The present invention provides an apparatus capable of uniformly grinding an polishing pad. Further, the present invention provides a method of grinding an polishing pad by using the grinding apparatus. Specifically, the present invention provides a method of, in a double-side polishing device having a carrier for holding a work, a pair of upper and lower rotating surface plates disposed to face each other to sandwich the carrier therebetween, and the polishing pad provided on each of the facing surfaces of the rotating surface plates for polishing the work, grinding the polishing pad, the method comprising the steps of: separating the upper and the lower rotating surface plates away from each other when the polishing pads on the upper and the lower rotating surface plates are to be ground; inserting, between the separated upper and lower rotating surface plates, an arm having at a front end portion thereof a grinding plate of a diameter smaller than those of the rotating surface plates; and pressing the grinding plate against the polishing pad of each of the rotating surface plates and rotating the grinding plate, thereby grinding the polishing pad of each of the rotating surface plates. The present invention also provides an apparatus which enables the grinding method described above. | 03-17-2011 |
| 20110304802 | LIQUID CRYSTAL DISPLAY - A liquid crystal display includes a first substrate including a first electrode, a second substrate including a second electrode, and a liquid crystal layer provided between the first substrate and the second substrate which is controlled to a substantially vertical orientation having a pretilt angle smaller than 90 degrees. The first electrode includes a plurality of rectangular openings extending in a direction substantially perpendicular to the orientation direction of liquid crystal molecules at substantially a center of the liquid crystal layer. A plurality of first areas and a plurality of second areas disposed mutually alternately are set in an effective display area in which the first electrode and the second electrode overlap in a planar view. Relative positions of the openings are mutually unmatched relative to at least a part of the plurality of second areas, and the openings are not formed in the plurality of first areas. | 12-15-2011 |
| 20120105786 | LIQUID CRYSTAL DISPLAY - The liquid crystal display device comprises a first and a second substrate placed opposite each other, a first electrode provided on the first substrate extending in a first direction, a second electrode provided on the second substrate extending in a second direction that is orthogonal to the first direction, and a vertically-aligned liquid crystal layer provided between the two substrates. | 05-03-2012 |
| 20120220200 | POLISHING METHOD AND POLISHING APPARATUS - To propose a method for realizing appropriate delivering of works to carriers in the conventional transfer process. Specifically, in a polishing method for polishing a work retained in a carrier, at least one carrier for retaining a work to be polished is placed between an upper plate and a lower plate; the work is fit in a hole of the carrier; the carrier and the work are inserted between the upper plate and the lower plate; and at least one of the upper plate and the lower plate is rotated while supplying a polishing agent to a space between the upper plate and the lower plate. In fitting the work in the hole of the carrier, an end portion of the work is held and the work is carried to a position above the lower plate; the work is positioned with respect to the hole of the carrier on the lower plate; and the work is released from the hold and guided by a guide to be slowly carried down toward the hole. | 08-30-2012 |
| Patent application number | Description | Published |
|---|
| 20100128132 | WIRELESS COMMUNICATION TERMINAL - A wireless communication terminal includes a setting section and a communication control section. The setting section sets frame transmission intervals IFSh and IFSt (IFSh| 05-27-2010 | |
| 20110188515 | TRANSMISSION MODULE, RECEPTION MODULE, TRANSMISSION METHOD, RECEPTION METHOD, AND COMMUNICATIONS SYSTEM - A transmission module may include a first interface unit that inputs transmission target data and a trigger relating to halting transmission of the transmission data from a processing unit that performs processing in compliance with a communication protocol of an upper layer, a generating unit that generates a communication frame of a transport layer level corresponding to the transmission target data, a second interface unit that transmits the generated communication frame, and a setting unit that, when the trigger is inputted while communication frame corresponding to the transmission target data are being sequentially transmitted, sets a flag indicating the termination of transmission of the transmission target data to communication frame among those being transmitted which do not correspond to a final portion of the transmission target data. | 08-04-2011 |
| 20110258304 | SERVICE USAGE TERMINAL, SERVICE PROVIDING TERMINAL, CONTROL METHOD OF SERVICE PROVIDING TERMINAL, CONTROL METHOD OF SERVICE PROVIDING TERMINAL AND SERVICE PROVIDING SYSTEM - A communication control section according to the invention receives communication data on a transport layer from a service providing terminal which provides service in a higher layer than the transport layer, and a CPU performs a stopping process of a session layer relating to the service, when the communication data on the transport layer which is received by the communication control section relates to a stop request of the service. The CPU receives a trigger relating to the stop of the service, and the communication control section transmits the communication data on the transport layer including a request to the higher layer relating to the stop request of the service, to the service providing terminal, when the CPU receives the trigger. | 10-20-2011 |
| 20120272028 | WIRELESS COMMUNICATION DEVICE - In this wireless communication device, a storage unit stores writing identification information relating to permission and prohibition of writing. An acquisition unit acquires device identification information that uniquely specifies an arbitrary wireless communication device from the arbitrary wireless communication device. A determination unit determines permission or prohibition of writing to a recording medium on the basis of the device identification information acquired by the acquisition unit and the writing identification information stored in the storage unit when a communication protocol of a session layer that performs writing to and readout from the recording medium in sector units is selected. A recording medium control unit controls permission and prohibition of writing to the recording medium on the basis of a result determined by the determination unit. | 10-25-2012 |
| Patent application number | Description | Published |
|---|
| 20120033054 | Stereoscopic Video Display Apparatus and Display Method - In one embodiment, a stereoscopic video display apparatus includes: a plane display unit including a display screen in which first to third subpixels having respectively different color components are arranged in a matrix form; and an optical plate. The plane display unit includes a configuration obtained by arranging a first subpixels and the second subpixels alternately on a first subpixel row, arranging the third subpixels on a second subpixel row adjacent to the first subpixel row, arranging the first subpixels and the second subpixels alternately on a third subpixel row adjacent to the second subpixel row to have a sequence opposite to that on the first subpixel row, arranging the third subpixels on a fourth subpixel row adjacent to the third subpixel row, and arranging a set of the first to fourth subpixel rows in the column direction of subpixels on the display screen repeatedly. | 02-09-2012 |
| 20120033055 | Stereoscopic Video Display Apparatus and Display Method - In one embodiment, a stereoscopic video display apparatus is configured to assign one subpixel column to each of a plurality of parallax images, and select three subpixels, which are the first to third subpixels, arranged consecutively in the column direction of subpixels with the third subpixel located in the center, as a pixel displaying each parallax image; cause pixels adjacent in the column direction of subpixels in each parallax image to share the first subpixel or the second subpixel; divide each of frames displaying a stereoscopic video into two subframes; assign one pixel from among the plurality of parallax images to each row in each subframe; display odd-numbered rows when displaying one of the first and second subframes; and display even-numbered rows when displaying the other of the first and second subframes. | 02-09-2012 |
| 20120033056 | Stereoscopic Video Display Apparatus and Display Method - In one embodiment, a stereoscopic video display apparatus includes: a plane display unit including a display screen in which first to third subpixels having respectively different color components are arranged in a matrix form; and an optical plate disposed to be opposed to the plane display unit and having a plurality of optical aperture parts. The plane display unit includes a configuration obtained by arranging the first subpixels on a first subpixel row, arranging the third subpixels on a second subpixel row adjacent to the first subpixel row, arranging the second subpixels on a third subpixel row adjacent to the second subpixel row, arranging the third subpixels on a fourth subpixel row adjacent to the third subpixel row, and arranging a set of the first to fourth subpixel rows in the column direction of subpixels on the display screen repeatedly. | 02-09-2012 |
| 20120033058 | Stereoscopic Video Display Apparatus and Display Method - In one embodiment, a stereoscopic video display apparatus is configured to divide each of frames displaying a stereoscopic video into two subframes; assign one pixel from among the plurality of parallax images to each row in each subframe; display parallax images of a first group from among the plurality of parallax images in odd-numbered rows and displaying parallax images of a remaining second group from among the plurality of parallax images in even-numbered rows, when displaying one of the first and second subframes; and display parallax images of the second group in odd-numbered rows and displaying parallax images of the first group in even-numbered rows when displaying the other of the first and second subframes. | 02-09-2012 |
| Patent application number | Description | Published |
|---|
| 20080236301 | DISPENSING APPARATUS, DISPENSING METHOD, AND ANALYZER - A dispensing apparatus includes a syringe which has a piston and sucks and discharges a liquid; and a storage unit which stores therein a reference driving profile indicating a reference of a driving position and a driving time at starting the piston. The apparatus also includes a position detector which detects an actual driving position of the piston; a timer which measures an actual driving time of the piston; and a driving controller which controls driving of the piston based on the reference driving profile, the driving controller creating an actual driving profile based on the actual driving position and the actual driving time of the piston, and the driving controller comparing the reference driving profile with the actual driving profile to determine based on a result of the comparing whether the dispensing is proper or not. | 10-02-2008 |
| 20090056477 | DISPENSING APPARATUS, DISPENSING METHOD, AND AUTOMATIC ANALYZER - A dispensing apparatus includes a dispensing nozzle that moves between a first position and a second position. The dispensing nozzle sucks in a liquid specimen including a reagent at the first position and dispenses the liquid specimen into a vessel located at the second position. An agent applicator is located on the path of movement of the dispensing nozzle. The agent applicator applies, to the discharge end portion of the dispensing nozzle, an agent having a low affinity for the liquid specimen than the inner surface of the dispensing nozzle. | 03-05-2009 |
| 20090110606 | DISPENSING APPARATUS AND ANALYZER - A dispensing apparatus includes a syringe that houses a liquid thereinside; and a plunger that moves forward and backward inside the syringe to thus discharge the liquid from an outlet formed in the syringe to the outside of the syringe. A hydrophilic film is formed on at least either of an inner wall of the syringe and a surface of the plunger. | 04-30-2009 |
| Patent application number | Description | Published |
|---|
| 20090183567 | OPERATION DEVICE CONTROL APPARATUS, OPERATION DEVICE CONTROL METHOD, INFORMATION STORAGE MEDIUM, AND OPERATION DEVICE - To provide an operating device control device for obtaining information about a rotational angle of an operating device, while reducing the influence due to an individual difference and/or variation of a reference sensor signal in accordance with a sensor signal output from the gyro sensor mounted in the operating device. A control device of an operating device having a gyro sensor for detecting an angular velocity and outputting a sensor signal in accordance with the detected angular velocity, the control device obtains an output signal from signal output means for outputting an output signal in accordance with a difference between the sensor signal output from the gyro sensor and a predetermined reference signal, then estimates a reference sensor signal to be output by the gyro sensor when no angular velocity is detected, based on the output signal, and changes the predetermined reference signal according to the estimated reference sensor signal. | 07-23-2009 |
| 20110159723 | A PLUG WITH A REGULATION PIN TO NOTIFY THE REQUIRED VOLTAGE | 06-30-2011 |
| 20120095714 | INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND INFORMATION STORAGE MEDIUM - An information processing device acquires an output value in accordance with a state in which an operating device is held, acquires the output value in accordance with a predetermined first holding state of the operating device as a first reference value, acquires the output value in accordance with a predetermined second holding state of the operating device, different from the first holding state, as a second reference value, and calculates a state value indicative of the state in which the operating device is held, which is in accordance with the acquired output value, based on the first reference value and the second reference value. | 04-19-2012 |
| 20120130667 | CALIBRATION APPARATUS, CALIBRATION METHOD, AND MANUFACTURING METHOD FOR AN ELECTRONIC DEVICE - Provided is a calibration apparatus, including: a holder for fixing an electronic device; a first motor for rotating the holder with a first rotation axis as a center; a second motor for rotating the holder with a second rotation axis perpendicular to the first rotation axis as a center; and a stopper for restricting a rotational position of the holder about the second rotation axis to a range between a reference position and a perpendicular position reached by rotating the holder by 90 degrees from the reference position, in which the first motor rotates the holder to which the electronic device is fixed at a predetermined speed in each of states in which the rotational position of the holder about the second rotation axis falls in the reference position and in which the rotational position of the holder about the second rotation axis falls in the perpendicular position. | 05-24-2012 |
| 20120248890 | WIRELESS POWER FEEDER/RECEIVER AND WIRELESS POWER TRANSMISSION SYSTEM - A wireless power feeder/receiver according to an embodiment of the present invention includes: a power feed/receive coil; a power feed/receive capacitor to configure a resonance circuit together with the power feed/receive coil; a coupling coil electromagnetically coupled to the power feed/receive coil; a power adjustment section performing at least any one of adjustment for AC power to be transmitted from the power feed/receive coil and adjustment for AC power to be received by the power feed/receive coil; a switching section switching connection of the power feed/receive coil, the power feed/receive capacitor, and the coupling coil to the power adjustment section; and a switching control section controlling the switching section. | 10-04-2012 |
| 20120326522 | WIRELESS POWER FEEDER, WIRELESS POWER RECEIVER, AND WIRELESS POWER TRANSMISSION SYSTEM - To increase efficiency of wireless power feeding to a moving object in wireless power feeding. A wireless power feeder | 12-27-2012 |
| 20120326523 | WIRELESS POWER FEEDER, WIRELESS POWER RECEIVER, AND WIRELESS POWER TRANSMISSION SYSTEM - To increase efficiency of wireless power feeding to a moving object in wireless power feeding of a magnetic field resonance type. A wireless power feeder includes a plurality of feeding coils and a power feeding source (power transmission control circuit) provided in common to the plurality of feeding coils and feeds power from the plurality of feeding coils to a receiving coil by wireless. The plurality of feeding coils are adjacently arranged such that coil surfaces thereof partially overlap each other. | 12-27-2012 |
| Patent application number | Description | Published |
|---|
| 20090031825 | DETECTING DEVICE - A detecting device including a pressure sensor that is deformed by a load from an outside and causes stress dispersion includes a slip detecting unit that calculates a pressure center position using a pressure value detected by the pressure sensor, calculates a movement value of the calculated pressure center position using a temporal change of the pressure center position, and detects a slip on the basis of the calculated movement value of the pressure center position. The pressure sensor has a multilayer structure in which two detecting units that detect pressure are arranged to hold a viscoelastic body made of a viscoelastic material that is deformed by a load from the outside. | 02-05-2009 |
| 20090076657 | CONTROL DEVICE, CONTROL METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM - A control device that controls grip of an object is disclosed. The control device includes: detecting means for detecting a slip of the object and outputting a slip detection value; change-value calculating means for calculating, on the basis of the slip detection value, a change value for changing a command value, which sets gripping force for the object, to magnitude for resting the object; suppression-value calculating means for calculating, on the basis of the slip detection value, a suppression value for suppressing the command value to necessary minimum magnitude for resting the object; and setting means for setting the magnitude of the command value on the basis of the change value and the suppression value. | 03-19-2009 |
| 20100090691 | DETECTING DEVICE AND DETECTING METHOD - A detecting device includes a viscoelastic magnet obtained by kneading and molding a magnet material and a viscoelastic material and a magnetic-flux detecting unit that detects a change in a magnetic flux density vector due to deformation of the viscoelastic magnet. | 04-15-2010 |
| 20110238213 | GRIPPING JUDGMENT APPARATUS AND GRIPPING JUDGMENT METHOD - There is provided a gripping judgment apparatus including a plan unit that generates a target orbit for moving a gripping unit in a state in which an object as a gripping target is gripped by the gripping unit, an observation unit that measures movement of the gripping unit driven based on the target orbit, a gripping state judgment unit that judges whether or not an object as a gripping target is grippable based on a target value of the gripping unit derived from the target orbit and an actual measured value measured by the observation unit, and a gripping state change unit that changes a gripping state of an object gripped by the gripping unit based on a judgment result obtained by the gripping state judgment unit. | 09-29-2011 |
| 20110252896 | DETECTING DEVICE - A detecting device including a pressure sensor that is deformed by a load from an outside and causes stress dispersion includes a slip detecting unit that calculates a pressure center position using a pressure value detected by the pressure sensor, calculates a movement value of the calculated pressure center position using a temporal change of the pressure center position, and detects a slip on the basis of the calculated movement value of the pressure center position. The pressure sensor has a multilayer structure in which two detecting units that detect pressure are arranged to hold a viscoelastic body made of a viscoelastic material that is deformed by a load from the outside. | 10-20-2011 |
| 20120290132 | ROBOT DEVICE, METHOD OF CONTROLLING THE SAME, AND PROGRAM FOR CONTROLLING THE SAME - Provided is a robot device including a drive unit including a plurality of links and joints connecting the links, a task instruction input unit for inputting an instruction of a task, a drive control unit for controlling an operation of the drive unit on the basis of the input task and determining a restricted area including a space necessary for the operation of the drive unit, and an area display unit for displaying the restricted area. | 11-15-2012 |
| Patent application number | Description | Published |
|---|
| 20110050888 | INSPECTION SYSTEM, MOBILE TERMINAL, INSPECTION METHOD, AND RECORDING MEDIUM - First, a mobile terminal displays a parent evidence photo previously selected on an image display and then accepts a specification of an association position, which is a desired position for associating a child evidence photo on the parent evidence photo through an operation device. And then, the mobile terminal accepts an instruction to shoot an image from a user, and starts shooting and stores the shot the child evidence photo in a memory. The child evidence photo stored in the memory is displayed on the image display. The mobile terminal associates the child evidence photo stored in the memory with the ID of the parent evidence photo, coordinate information indicating the specified position on the parent evidence photo, and the shooting point ID uniquely allocated to the position, and then stores the associated child evidence photo in the memory again. | 03-03-2011 |
| 20110142344 | BROWSING SYSTEM, SERVER, AND TEXT EXTRACTING METHOD - In order to precisely extract a character in an image displayed at a terminal device in the case that an imaged web page is sent to the terminal device and the web page is browsed at the terminal device, a server acquires the web page from the Internet, generates the image from the acquired web page, and sends the image to a client terminal, the client terminal receives the image, displays the image on a display part, specifies a rectangular area, and sends information regarding the specified rectangular area to the server, and the server extracts the image in the rectangular area from the image of the web page, recognizes a text by an OCR process, extracts a text from a source of an HTML file which matches the recognized text most closely, and sends the extracted text to the client terminal. | 06-16-2011 |
| Patent application number | Description | Published |
|---|
| 20100323484 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device may include, but is not limited to the following processes. First and second gate electrodes are formed over a semiconductor substrate. An epitaxial layer is selectively formed over the semiconductor substrate. The epitaxial layer is adjacent to the first gate electrode. A first impurity is introduced into the semiconductor substrate through the epitaxial layer to form a first impurity region and directly into the semiconductor substrate to form a second impurity region. The first and second impurity regions are adjacent to the first and second gate electrodes, respectively. The first impurity region includes the epitaxial layer. A first bottom surface of the first impurity region is shallower in level than a second bottom surface of the second impurity region. | 12-23-2010 |
| 20110151656 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of forming a semiconductor device, the method including the following processes. A groove is formed in a semiconductor substrate. A gate electrode is formed in the groove. A boron-phosphorus silicate glass film is formed over the gate electrode. An etching process is performed using the boron-phosphorus silicate glass film as an etching stopper for preventing the gate electrode from being removed. | 06-23-2011 |
| 20120193696 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - In order to achieve the reduction of contact resistance by forming a metal silicide layer with a sufficient thickness in an interface between a polycrystalline silicon plug and an upper conductive plug, the polycrystalline silicon plug contains germanium, which is ion-implanted before forming the metal silicide layer. | 08-02-2012 |
| 20130075824 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device has first and second conductive type transistors on a substrate. First conductive type transistor includes: a first lower gate electrode portion on the substrate, including silicon including first impurity ions; a first intervening layer on the first lower gate electrode portion, including silicon including oxygen and/or nitrogen; and a first upper gate electrode portion on the first intervening layer, the first upper gate electrode portion including silicon including the first impurity ions. Second conductive type transistor includes: a second lower gate electrode portion on the substrate, the second lower gate electrode portion including silicon including second impurity ions; a second intervening layer on the second lower gate electrode portion, the second intervening layer including silicon including oxygen and/or nitrogen; and a second upper gate electrode portion on the second intervening layer, the second upper gate electrode portion including silicon including the second impurity ions. | 03-28-2013 |
| Patent application number | Description | Published |
|---|
| 20090057143 | FILM-DEPOSITING TARGET AND PREPARATION OF PHASE SHIFT MASK BLANK - A film-depositing target for use in the manufacture of a halftone phase shift mask blank includes a transparent substrate and a translucent film of one or more layers having a controlled phase and transmittance, at least one layer of the translucent film including silicon, molybdenum and zirconium at the same time as constituent elements, and at least two elements, zirconium and molybdenum in a molar ratio Zr/Mo between 0.05 and 5. | 03-05-2009 |
| 20100143831 | PHOTOMASK BLANK AND PHOTOMASK - A photomask blank to be used as a material for a photomask is provided with a mask pattern having a transparent area and an effectively opaque area to exposure light on a transparent substrate. On the transparent board, one or more layers of light shielding films are formed with or without other film (A) in between, at least one layer (B) which constitutes the light shielding film includes silicon and a transition metal as main component, and a molar ratio of silicon to the transition metal is silicon:metal=4-15:1 (atomic ratio). The photomask provided with the mask pattern having the transparent area and the effectively opaque area to exposure light on the transparent board is also provided. | 06-10-2010 |
| 20100261099 | PHOTOMASK BLANK AND PHOTOMASK MAKING METHOD - A photomask blank comprises a transparent substrate, a light-shielding film deposited on the substrate and comprising a metal or metal compound susceptible to fluorine dry etching, and an etching mask film deposited on the light-shielding film and comprising another metal or metal compound resistant to fluorine dry etching. When the light-shielding film is dry etched to form a pattern, pattern size variation arising from pattern density dependency is reduced, so that a photomask is produced at a high accuracy. | 10-14-2010 |
| 20100261100 | PHOTOMASK BLANK AND PHOTOMASK - A photomask blank is provided comprising an etch stop film which is disposed on a transparent substrate and is resistant to fluorine dry etching and removable by chlorine dry etching, a light-shielding film disposed on the etch stop film and including at least one layer composed of a transition metal/silicon material, and an antireflective film disposed on the light-shielding film. When the light-shielding film is dry etched to form a pattern, pattern size variation arising from pattern density dependency is reduced, so that a photomask is produced at a high accuracy. | 10-14-2010 |
| 20100261101 | PHOTOMASK BLANK AND PHOTOMASK - A photomask blank is provided comprising an etch stop film which is disposed on a transparent substrate and is resistant to fluorine dry etching and removable by chlorine dry etching, a light-shielding film disposed on the etch stop film and including at least one layer composed of a transition metal/silicon material, and an antireflective film disposed on the light-shielding film. When the light-shielding film is dry etched to form a pattern, pattern size variation arising from pattern density dependency is reduced, so that a photomask is produced at a high accuracy. | 10-14-2010 |
