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Frosien
Jurgen Frosien, Riemerling DE
| Patent application number | Description | Published |
|---|---|---|
| 20090101819 | ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS - An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens. | 04-23-2009 |
Jürgen Frosien, Ricmerling DE
| Patent application number | Description | Published |
|---|---|---|
| 20100320382 | HIGH THROUGHPUT SEM TOOL - A multi-beam scanning electron beam device ( | 12-23-2010 |
Jürgen Frosien, Ricmerling DE
| Patent application number | Description | Published |
|---|---|---|
| 20100320382 | HIGH THROUGHPUT SEM TOOL - A multi-beam scanning electron beam device ( | 12-23-2010 |
Jürgen Frosien, Riemerling DE
| Patent application number | Description | Published |
|---|---|---|
| 20110139978 | CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE - A charged particle beam device is provided, including a primary beam source for generating a primary charged particle beam, an objective lens for focusing the primary charged particle beam onto a specimen, and an achromatic beam separator adapted to separate the primary charged particle beam from a secondary charged particle beam originating from the specimen. The achromatic beam separator is adapted to separate the primary charged particle beam and the secondary charged particle beam earliest practicable after generation of the secondary charged particle beam. | 06-16-2011 |