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Fang, MA
Aiqi Fang, Somerville, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20080248542 | Clostridium difficile culture and toxin production methods - The invention provides methods and compositions for use in culturing | 10-09-2008 |
Cindy Y. Fang, Arlington, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20120169842 | IMAGING SYSTEMS AND METHODS FOR IMMERSIVE SURVEILLANCE - Security guards at large facilities, such as airports, monitor multiple screens that display images from individual surveillance cameras dispersed throughout the facility. If a guard zooms with a particular camera, he may lose image resolution, along with perspective on the surrounding area. Embodiments of the inventive Imaging System for Immersive Surveillance (ISIS) solve these problems by combining multiple cameras in one device. When properly mounted, example ISIS systems offer up to 360-degree, 240-megapixel views on a single screen. (Other fields of view and resolutions are also possible.) Image-stitching software merges multiple video feeds into one scene. The system also allows operators to tag and follow targets, and can monitor restricted areas and sound an alert when intruders breach them. | 07-05-2012 |
| 20120242788 | IMAGING SYSTEM FOR IMMERSIVE SURVEILLANCE - Security guards at big facilities, such as airports, monitor multiple screens that display images from individual surveillance cameras dispersed throughout the facility. If a guard zooms with a particular camera, he will lose image resolution, along with perspective on the surrounding area. Embodiments of the inventive Imaging System for Immersive Surveillance (ISIS) solve these problems by combining multiple cameras in one device. When properly mounted, example ISIS systems offer 360-degree, 100-megapixel views on a single screen. (Other resolutions may also be employed.) Image-stitching software merges multiple video feeds into one scene. The system also allows operators to tag and follow targets, and can monitor restricted areas and sound an alert when intruders breach them. | 09-27-2012 |
Francis Fang, Andover, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20080249320 | Luminacin analogs and uses thereof - The present invention provides compounds having formula (I) (and pharmaceutically acceptable derivatives thereof): | 10-09-2008 |
| 20090131405 | IMIDAZOAZEPINONE COMPOUNDS - The invention relates to compounds of formula I: | 05-21-2009 |
| 20090291998 | EPONEMYCIN AND EPOXOMICIN ANALOGS AND USES THEREOF - The present invention provides compounds having formula (1): wherein R | 11-26-2009 |
| 20110065916 | METHOD OF MAKING IMIDAZOAZEPINONE COMPOUNDS - A method of making a compound of Formula I: is carried out by (a) providing a compound of Formula (II) or (III): wherein ring A is C3-14 aryl or C3-14 heteroaryl such as phenyl or furanyl, and then (b) combining the compound of Formula (II) or (III) with an acid to produce a compound of Formula I. | 03-17-2011 |
Francis G. Fang, Andover, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20090187038 | REAGENTS AND METHODS FOR THE BETA-KETO AMIDE SYNTHESIS OF A SYNTHETIC PRECURSOR TO IMMUNOLOGICAL ADJUVANT E6020 - This invention relates to the synthesis for a precursor of E6020, compound 26, via a β-keto amide alcohol intermediate, compound 22. The synthesis reacts compound 22 with compound 25 and the resultant intermediate is oxidized to produce compound 26, the precursor to E6020. Compounds 22 and 25, and their crystalline forms, represent separate embodiments of the invention. The invention also relates to compounds of formulas (3) and (4) and processes for their preparation. | 07-23-2009 |
| 20090198074 | INTERMEDIATES AND METHODS FOR THE SYNTHESIS OF HALICHONDRIN B ANALOGS - Methods of synthesizing intermediates useful for the synthesis of halichondrin B analogs are described. | 08-06-2009 |
| 20100093842 | Laulimalide Analogs and Uses Thereof - The present invention provides compounds having formula I: | 04-15-2010 |
| 20100197951 | COMPOUNDS FOR PREPARING IMMUNOLOGICAL ADJUVANT - The present invention provides methods for preparing TLR-4 receptor agonist E6020: | 08-05-2010 |
| 20110046398 | INTERMEDIATES IN THE SYNTHESIS ZEARALENONE MACROLIDE ANALOGS - Disclosed herein are methods and intermediates useful in the preparation of macrolides, e.g., compounds of formula (IV), wherein R | 02-24-2011 |
| 20110060151 | REAGENTS AND METHODS FOR THE BETA-KETO AMIDE SYNTHESIS OF A SYNTHETIC PRECURSOR TO IMMUNOLOGICAL ADJUVANT E6020 - This invention relates to the synthesis for a precursor of E6020, compound 26, via a β-keto amide alcohol intermediate, compound 22. The synthesis reacts compound 22 with compound 25 and the resultant intermediate is oxidized to produce compound 26, the precursor to E6020. Compounds 22 and 25, and their crystalline forms, represent separate embodiments of the invention. The invention also relates to compounds of formulas (3) and (4) and processes for their preparation. | 03-10-2011 |
| 20110172427 | PROCESS FOR PREPARING CERTAIN CINNAMIDE COMPOUNDS - This invention relates to a new synthesis, intermediates and precursors leading to a mixture of the compounds 11 and 12 as shown below. It also relates to the resolution of the stereoisomeric mixture to provide in substantial stereochemical purity compound 12. The synthesis of the invention involves preparation of compound 7 and compound 10 as shown below and their reaction to prepare a mixture of compound 11 and compound 12. | 07-14-2011 |
| 20110184190 | COMPOUNDS USEFUL IN THE SYNTHESIS OF HALICHONDRIN B ANALOGS - In general, the invention features compounds useful for the synthesis of analogs of halichondrin B, such as eribulin or pharmaceutically acceptable salts thereof, e.g., eribulin mesylate. Exemplary compounds are of formula (I), (II), or (III): | 07-28-2011 |
| 20110237805 | INTERMEDIATES AND METHODS FOR MAKING ZEARALENONE MACROLIDE ANALOGS - Disclosed herein are methods and intermediates useful in the preparation of macrolides, e.g., compounds of formula (IV) wherein R | 09-29-2011 |
| 20120029213 | INTERMEDIATES FOR THE PREPARATION OF ANALOGS OF HALICHONDRIN B - Intermediates and methods of their use in the synthesis of analogs of halichondrin B are provided. | 02-02-2012 |
| 20120095242 | INTERMEDIATES AND METHODS FOR THE SYNTHESIS OF HALICHONDRIN B ANALOGS - Methods of synthesizing intermediates useful for the synthesis of halichondrin B analogs are described. | 04-19-2012 |
| 20120232298 | COMPOUNDS FOR PREPARING IMMUNOLOGICAL ADJUVANT - The present invention provides methods for preparing TLR-4 receptor agonist E6020: | 09-13-2012 |
| 20120289718 | COMPOUNDS USEFUL IN THE SYNTHESIS OF HALICHONDRIN B ANALOGS - In general, the invention features compounds useful for the synthesis of analogs of halichondrin B, such as eribulin or pharmaceutically acceptable salts thereof, e.g., eribulin mesylate. Exemplary compounds are of formula (I), (II), or (III): | 11-15-2012 |
| 20120309988 | INTERMEDIATES FOR THE PREPARATION OF ANALOGS OF HALICHONDRIN B - Intermediates and methods of their use in the synthesis of anslogs of halichondrin B are provided. | 12-06-2012 |
Kevin Qun Fang, Wellesley, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20100125070 | Bupropion Metabolites and Methods of Their Synthesis and Use - Methods and compositions are disclosed which utilize metabolites of bupropion for treating disorders ameliorated by inhibition of neuronal monoamine reuptake. Such disorders include, but are not limited to, sexual dysfunction, affective disorders, cerebral function disorders, cigarette smoking, and incontinence. Methods of making optically pure bupropion metabolites are also disclosed. | 05-20-2010 |
Maosen Fang, Quincy, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20090003490 | Method and system for tracking and determining a location of a wireless transmission - An apparatus for detecting and timing a transmitting device is disclosed. The device includes a receiving system receiving a signal containing at least a preamble code of a known length and at least one pulse within a receive window after the preamble code, a circuit receiving the at least one pulse comprising a zero-crossing circuit for indicting a zero-voltage crossing of the at least one pulse and a trigger device for latching the indication of zero-voltage crossing, and a ripple circuit counter, receiving the latched indication of said zero-voltage crossing and associating a time to the receipt of the latched indication. A system for detecting and locating a transmitting device is further disclosed. The system includes a plurality of sensor apparatus each determining a reception time of a signal and a processor for determining a location based on groups of the reception times | 01-01-2009 |
| 20130012227 | Method and System for Tracking and Determining a Location of a Wireless Transmission - An apparatus for detecting and timing a transmitting device is disclosed. The device includes a receiving system receiving a signal containing at least a preamble code of a known length and at least one pulse within a receive window after the preamble code, a circuit receiving the at least one pulse comprising a zero-crossing circuit for indicting a zero-voltage crossing of the at least one pulse and a trigger device for latching the indication of zero-voltage crossing, and a ripple circuit counter, receiving the latched indication of said zero-voltage crossing and associating a time to the receipt of the latched indication. A system for detecting and locating a transmitting device is further disclosed. The system includes a plurality of sensor apparatus each determining a reception time of a signal and a processor for determining a location based on groups of the reception times | 01-10-2013 |
Maosen Fang, Newton, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20110092245 | System and Method for Detecting and Controlling Transmission Devices - A method of detecting, controlling and managing transmission of a transmitting device within a facility is disclosed. The method involves transmitting information to the transmission device, detecting a response transmission from the transmission device by a least one transmission detection facility, extracting identification information associated with the transmission device in response to the transmitted information; and determining a location of the transmission device based on the response transmission received by the at least one received transmission detection facility, wherein the response transmissions are sorted by the identification information, determining an allowability of the located transmission device with the set area and interacting and manipulating transmission of the detected transmitting device. | 04-21-2011 |
Nicholas X. Fang, Belmont, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20130052762 | METHOD OF FORMING AN ARRAY OF HIGH ASPECT RATIO SEMICONDUCTOR NANOSTRUCTURES - A new method for forming an array of high aspect ratio semiconductor nanostructures entails positioning a surface of a stamp comprising a solid electrolyte in opposition to a conductive film disposed on a semiconductor substrate. The surface of the stamp includes a pattern of relief features in contact with the conductive film so as to define a film-stamp interface. A flux of metal ions is generated across the film-stamp interface, and a pattern of recessed features complementary to the pattern of relief features is created in the conductive film. The recessed features extend through an entire thickness of the conductive film to expose the underlying semiconductor substrate and define a conductive pattern on the substrate. The stamp is removed, and material immediately below the conductive pattern is selectively removed from the substrate. Features are formed in the semiconductor substrate having a length-to-width aspect ratio of at least about 5:1. | 02-28-2013 |
Q. Kevin Fang, Wellesley, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20090163456 | CARBONATE AND CARBAMATE MODIFIED FORMS OF GLUCOCORTICOIDS IN COMBINATION WITH B2 ADRENERGIC AGONISTS - Compositions containing β | 06-25-2009 |
| 20090170916 | Pyrrole and Pyrazole DAAO Inhibitors - Methods for increasing D-Serine concentration and reducing concentration of the toxic products of D-Serine oxidation, for enhancing learning, memory and/or cognition, or for treating schizophrenia, Alzheimer's disease, ataxia or neuropathic pain, or preventing loss in neuronal function characteristic of neurodegenerative diseases involve administering to a subject in need of treatment a therapeutically effective amount of a compound of formula I, or a pharmaceutically acceptable salt or solvate thereof: | 07-02-2009 |
| 20100016397 | Pyrrole and Pyrazole DAAO Inhibitors - Methods for increasing D-Serine concentration and reducing concentration of the toxic products of D-Serine oxidation, for enhancing learning, memory and/or cognition, or for treating schizophrenia, Alzheimer's disease, ataxia or neuropathic pain, or preventing loss in neuronal function characteristic of neurodegenerative diseases involve administering to a subject in need of treatment a therapeutically effective amount of a compound of formula I, or a pharmaceutically acceptable salt or solvate thereof: | 01-21-2010 |
Q. Kevin Fang, Wellesly, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20110092559 | PYRROLE AND PYRAZOLE DAAO INHIBITORS - Methods for increasing D-Serine concentration and reducing concentration of the toxic products of D-Serine oxidation, for enhancing learning, memory and/or cognition, or for treating schizophrenia, Alzheimer's disease, ataxia or neuropathic pain, or preventing loss in neuronal function characteristic of neurodegenerative diseases involve administering to a subject in need of treatment a therapeutically effective amount of a compound of formula I, or a pharmaceutically acceptable salt or solvate thereof: | 04-21-2011 |
Xinqin Fang, Lexington, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20080255101 | NITRIC OXIDE DONATING DIURETIC COMPOUNDS, COMPOSITIONS AND METHODS OF USE - The invention describes novel compositions and kits comprising at least one nitric oxide enhancing diuretic compound, or pharmaceutically acceptable salts thereof, and, optionally, at least one nitric oxide enhancing compound and/or at least one therapeutic agent. The invention also provides methods for (a) treating conditions resulting from excessive water and/or electrolyte retention; (b) treating cardiovascular diseases; (c) treating renovascular diseases; (d) treating diabetes; (e) treating diseases resulting from oxidative stress; (f) treating endothelial dysfunctions; (g) treating diseases caused by endothelial dysfunctions; (h) treating cirrhosis; (j) treating pre-eclampsia; (k) treating osteoporosis; (l) treating nephropathy; (m) treating peripheral vascular diseases; (n) treating portal hypertension; (o) treating central nervous system disorders; (p) treating metabolic syndrome; (q) treating sexual dysfunctions; and (r) hyperlipidemia. The nitric oxide enhancing diuretic compounds comprise at least one nitric oxide enhancing group linked to the diuretic compound through one or more sites such as carbon, oxygen and/or nitrogen via a bond or moiety that cannot be hydrolyzed. | 10-16-2008 |
| 20080287407 | Nitric Oxide Releasing Pyruvate Compounds, Compositions and Methods of Use - The invention describes novel nitrosated and/or nitrosylated pyruvate compounds and pharmaceutically acceptable salts thereof, and novel compositions comprising at least one nitrosated and/or nitrosylated pyruvate compound, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or at least one therapeutic agent. The invention also provides novel compositions comprising at least one pyruvate compound and at least one compound that donates, transfers or releases nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor, stimulates endogenous synthesis of nitric oxide or is a substrate for nitric oxide synthase and/or at least one therapeutic agent. The invention also provides novel kits comprising at least one pyruvate compound, that is optionally nitrosated and/or nitrosylated, and, optionally, at least one nitric oxide donor and/or at least one therapeutic agent. The invention also provides methods for treating diseases resulting from oxidative stress, diabetes, reperfusion injury following ischemia, preservation of tissues, organs, organ parts and/or limbs. | 11-20-2008 |
| 20090005350 | CYCLOOXYGENASE-2 SELECTIVE INHIBITORS, COMPOSITIONS AND METHODS OF USE - The invention describes novel cyclooxygenase 2 (COX-2) selective inhibitors and novel compositions comprising at least one cyclooxygenase 2 (COX-2) selective inhibitor, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or at least one therapeutic agent. The invention also provides novel kits comprising at least one COX-2 selective inhibitor, optionally nitrosated and/or nitrosylated, and, optionally, at least one nitric oxide donor, and/or, optionally, at least one therapeutic agent. The novel cyclooxygenase 2 selective inhibitors of the invention can be optionally nitrosated and/or nitrosylated. The invention also provides methods for treating inflammation, pain and fever; for treating and/or improving the gastrointestinal properties of COX-2 selective inhibitors; for facilitating wound healing; for treating and/or preventing renal and/or respiratory toxicity; for treating and/or preventing other disorders resulting from elevated levels of cyclooxygenase-2; and for improving the cardiovascular profile of COX-2 selective inhibitors. | 01-01-2009 |
| 20090099139 | NITROSATED AND NITROSYLATED CYCLOOXYGENASE-2 INHIBITORS, COMPOSITIONS AND METHODS OF USE - The present invention describes novel nitrosated and/or nitrosylated cyclooxygenase 2 (COX-2) inhibitors and novel compositions comprising at least one nitrosated and/or nitrosylated cyclooxygenase 2 (COX-2) inhibitor, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or optionally, at least one therapeutic agent. The present invention also provides novel compositions comprising at least one parent COX-2 inhibitor and at least one nitric oxide donor, and, optionally, at least one therapeutic agent. The present invention also provides kits and methods for treating inflammation, pain and fever; for treating and/or improving the gastrointestinal properties of COX-2 inhibitors; for facilitating wound healing; for treating and/or preventing renal toxicity; and for treating and/or preventing other disorders resulting from elevated levels of cyclooxygenase-2. | 04-16-2009 |
| 20100093671 | NITROSATED NONSTEROIDAL ANTIINFLAMMATORY COMPOUNDS, COMPOSITIONS AND METHODS OF USE - The invention describes novel nitrosated nonsteroidal antiinflammatory drugs (NSAIDs) and pharmaceutically acceptable salts thereof, and novel compositions comprising at least one nitrosated NSAID, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or at least one therapeutic agent. The invention also provides novel compositions comprising at least one nitrosated NSAID, and at least one compound that donates, transfers or releases nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor, stimulates endogenous synthesis of nitric oxide or is a substrate for nitric oxide synthase and/or at least one therapeutic agent. The invention also provides novel kits comprising at least one nitrosated NSAID, and, optionally, at least one nitric oxide donor and/or at least one therapeutic agent. The invention also provides methods for treating inflammation, pain and fever; for treating gastrointestinal disorders; for facilitating wound healing; for treating and/or preventing gastrointestinal, renal and/or respiratory toxicities resulting from the use of nonsteroidal antiinflammatory compounds; for treating inflammatory disease states and/or disorders; and for treating and/or preventing ophthalmic diseases and/or disorders. | 04-15-2010 |
| 20100093708 | NITROSATED NONSTEROIDAL ANTIINFLAMMATORY COMPOUNDS, COMPOSITIONS AND METHODS OF USE - The invention describes novel nitrosated nonsteroidal antiinflammatory drugs (NSAIDs) and pharmaceutically acceptable salts thereof, and novel compositions comprising at least one nitrosated NSAID, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or at least one therapeutic agent. The invention also provides novel compositions comprising at least one nitrosated NSAID, and at least one compound that donates, transfers or releases nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor, stimulates endogenous synthesis of nitric oxide or is a substrate for nitric oxide synthase and/or at least one therapeutic agent. The invention also provides novel kits comprising at least one nitrosated NSAID, and, optionally, at least one nitric oxide donor and/or at least one therapeutic agent. The invention also provides methods for treating inflammation, pain and fever; for treating gastrointestinal disorders; for facilitating wound healing; for treating and/or preventing gastrointestinal, renal and/or respiratory toxicities resulting from the use of nonsteroidal antiinflammatory compounds; for treating inflammatory disease states and/or disorders; and for treating and/or preventing ophthalmic diseases and/or disorders. | 04-15-2010 |
| 20100137291 | NITROSATED NONSTEROIDAL ANTIINFLAMMATORY COMPOUNDS, COMPOSITIONS AND METHODS OF USE - The invention describes novel nitrosated nonsteroidal antiinflammatory drugs (NSAIDs) and pharmaceutically acceptable salts thereof, and novel compositions comprising at least one nitrosated NSAID, and, optionally, at least one compound that donates, transfers or releases nitric oxide, stimulates endogenous synthesis of nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor or is a substrate for nitric oxide synthase, and/or at least one therapeutic agent. The invention also provides novel compositions comprising at least one nitrosated NSAID, and at least one compound that donates, transfers or releases nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor, stimulates endogenous synthesis of nitric oxide or is a substrate for nitric oxide synthase and/or at least one therapeutic agent. The invention also provides novel kits comprising at least one nitrosated NSAID, and, optionally, at least one nitric oxide donor and/or at least one therapeutic agent. The invention also provides methods for treating inflammation, pain and fever; for treating gastrointestinal disorders; for facilitating wound healing; for treating and/or preventing gastrointestinal, renal and/or respiratory toxicities resulting from the use of nonsteroidal antiinflammatory compounds; for treating inflammatory disease states and/or disorders; and for treating and/or preventing ophthalmic diseases and/or disorders. | 06-03-2010 |
Xinquin Fang, Lexington, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20110098253 | Nitrosated Nonsteroidal Antiinflammatory Compounds, Compositions and Methods of Use - The invention also provides methods for treating inflammation, pain and fever; for treating gastrointestinal disorders; for facilitating wound healing; for treating and/or preventing gastrointestinal, renal and/or respiratory toxicities resulting from the use of nonsteroidal antiinflammatory compounds; for treating inflammatory disease states and/or disorders; and for treating and/or preventing ophthalmic diseases and/or disorders comprising administration of novel compositions comprising at least one nitrosated NSAID, and, optionally, at least one compound that donates, transfers or releases nitric oxide, elevates endogenous levels of endothelium-derived relaxing factor, stimulates endogenous synthesis of nitric oxide or is a substrate for nitric oxide synthase and/or at least one therapeutic agent. | 04-28-2011 |
Ying Fang, Cambridge, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20100087013 | Nanosensors and related technologies - The present invention generally relates to nanotechnology and sub-microelectronic circuitry, as well as associated methods and devices, for example, nanoscale wire devices and methods for use in determining nucleic acids or other analytes suspected to be present in a sample (for example, their presence and/or dynamical information), e.g., at the single molecule level. For example, a nanoscale wire device can be used in some cases to detect single base mismatches within a nucleic acid (e.g., by determining association and/or dissociation rates). In one aspect, dynamical information such as a binding constant, an association rate, and/or a dissociation rate, can be determined between a nucleic acid or other analyte, and a binding partner immobilized relative to a nanoscale wire. In some cases, the nanoscale wire includes a first portion comprising a metal-semiconductor compound, and a second portion that does not include a metal-semiconductor compound. The binding partner, in some embodiments, is immobilized relative to at least the second portion of the nanoscale wire, and the size of the second portion of the nanoscale wire may be minimized and/or controlled in some instances. Articles and devices of size greater than the nanoscale are also included in certain embodiments. Still other aspects of the invention include assays, sensors, kits, and/or other devices that include such nanoscale wires, methods of making and/or using such nanoscale wires, or the like. | 04-08-2010 |
Ziwei Fang, Beverly, MA US
| Patent application number | Description | Published |
|---|---|---|
| 20090061605 | PROFILE ADJUSTMENT IN PLASMA ION IMPLANTER - A method to provide a dopant profile adjustment solution in plasma doping systems for meeting both concentration and junction depth requirements. Bias ramping and bias ramp rate adjusting may be performed to achieve a desired dopant profile so that surface peak dopant profiles and retrograde dopant profiles are realized. The method may include an amorphization step in one embodiment. | 03-05-2009 |
| 20090084987 | CHARGE NEUTRALIZATION IN A PLASMA PROCESSING APPARATUS - A plasma processing apparatus includes a process chamber, a source configured to generate a plasma in the process chamber, and a platen configured to support a workpiece in the process chamber. The platen is biased with a pulsed platen signal having pulse ON and OFF time periods to accelerate ions from the plasma towards the workpiece during the pulse ON time periods and not the pulse OFF time periods. A plate is positioned in the process chamber. The plate is biased with a plate signal to accelerate ions from the plasma towards the plate to cause an emission of secondary electrons from the plate during at least a portion of one of the pulse OFF time periods of the pulsed platen signal to at least partially neutralize charge accumulation on the workpiece. | 04-02-2009 |
| 20090104761 | Plasma Doping System With Charge Control - A method of plasma doping includes generating a plasma comprising dopant ions proximate to a platen supporting a substrate in a plasma chamber. The platen is biased with a bias voltage waveform having a negative potential that attracts ions in the plasma to the substrate for plasma doping. At least one sensor measuring data related to charging conditions favorable for forming an electrical discharge is monitored. At least one plasma process parameter is modified in response to the measured data, thereby reducing a probability of forming an electrical discharge. | 04-23-2009 |
| 20090283670 | Technique for Monitoring and Controlling A PLasma Process - A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to selectively attract ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions. | 11-19-2009 |