Patent application number | Description | Published |
20130062016 | TRANSFER APPARATUS AND PLASMA PROCESSING SYSTEM - A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases. | 03-14-2013 |
20140206199 | ETCHING METHOD OF MULTILAYER FILM - In an etching method of a multilayer film including a first oxide film and a second oxide film, a high frequency power in etching an organic film is set to be higher than those in etching a first and second oxide films, and high frequency bias powers in the etching of the first and second oxide films are set to be higher than that in the etching of the organic film. In the etching of the first and second oxide films and the organic film, a magnetic field is generated such that horizontal magnetic field components in a radial direction with respect to a central axis line of a target object have an intensity distribution having a peak value at a position far from the central axis line, and a position of the peak value in the etching of the organic film is closer to the central axis line. | 07-24-2014 |
20140346040 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus can easily control a plasma intensity distribution in a processing space. A substrate processing apparatus | 11-27-2014 |
20150072534 | ETCHING METHOD OF MULTILAYER FILM - A plasma processing apparatus for performing a plasma process on a substrate includes: a mounting table configured to mount thereon the substrate; an electromagnet including a core member and a plurality of coils; a current source connected to both ends of the coils for supplying currents to the coils; and a control unit configured to control the current source to start or stop and to control a current value of the current source. The core member is made of a magnetic material and has a structure including a column-shaped member, multiple cylindrical members, and a base member. The plurality of coils are accommodated in grooves and wound around an outer peripheral surface of the column-shaped member and the cylindrical members, and the grooves are formed between the column-shaped member and one of the cylindrical members and between the cylindrical members. | 03-12-2015 |
Patent application number | Description | Published |
20090028594 | IMAGE FORMING APPARATUS - An image forming apparatus includes a plurality of image bearing members; a rotatable intermediary transfer member for carrying toner images transferred from the plurality of image bearing members in contact with the plurality of image bearing members; a transfer member for press-contacting to the intermediary transfer member to form a transfer portion, at which the toner images on the intermediary transfer member are to be transferred onto a recording material; and a control portion for controlling an image forming operation so that, during execution of a continuous image forming mode in which images are formed on a plurality of recording materials conveyed with a preset minimum interval, a recording material passes through the transfer portion and thereafter transfer of a toner image to be formed on a subsequent recording material from an image bearing member, located upstream of the transfer portion and most downstream of the plurality of image bearing members with respect to a rotational direction of the intermediary transfer member, onto the intermediary transfer member is started. | 01-29-2009 |
20090080924 | IMAGE FORMING APPARATUS - An image forming apparatus is provided in which image forming sections are provided along an intermediate transfer member and in which a test voltage is applied to a transfer member to control a transfer voltage. In the image forming apparatus, the test voltage is applied to a region of the intermediate transfer member in an upstream image forming section. The test voltage is controlled so as to be applied at a time except when that region of the intermediate transfer member passes through a downstream image forming section. Accordingly, when the intermediate transfer member is charged by applying the test voltage to the transfer member in the upstream image forming section, the transfer voltage can be appropriately controlled in the downstream image forming section. | 03-26-2009 |
20100021193 | IMAGE FORMING APPARATUS - An image forming apparatus includes first and second image forming units respectively including first and second photosensitive members and first and second toner image forming devices for forming a toner image on the first and second photosensitive members respectively, and first and second transfer members configured to transfer the toner image formed on the first and second photosensitive members onto the belt member. The second image forming unit is arranged on a downstream side of the first image forming unit and is adjacent to the first image forming unit. An image forming apparatus further includes first and second photodischarging devices for discharging potential of the first and second photosensitive members respectively by irradiating thereon with light, wherein the first photodischarging device is turned off when the current is detected by applying the voltage to the second transfer member. | 01-28-2010 |
20120288292 | IMAGE FORMING APPARATUS - An image forming apparatus includes a first image forming portion including a first photosensitive member (drum), a first charging device, a first exposure device, a first developing device, and a first transfer device; a second image forming portion including a second drum, and a second charging device, a second exposure device, a second developing device, and a second transfer device; a power source for applying a common voltage to the first transfer device and the second transfer device; and a setting device for variably setting, for a period in which the transfer operation is performed, potentials of the exposed portions of the first and second drums on the basis of currents passing through the first and second transfer devices, respectively, when the common voltage is applied to the first and second transfer devices in a period other than the period in which the transfer operation is performed. | 11-15-2012 |